GOALI: Nanoscale Hysteresis Modeling and Control in Precision Equipment

性能要求的提高推动了精密运动设备的改进，现在精度达到纳米级。 然而，这样的精度需要昂贵的非接触轴承，而滚子轴承提供最佳的性能/成本效益。尽管过去在这一领域的研究，充分的摩擦缓解仍然是精密机械运动平台的限制因素。 本研究将探讨利用摩擦知识提高精密运动控制的技术。 滞后模型将被用来识别，评估和预测摩擦实验，并设计改进的运动控制系统，减轻摩擦的影响。 本研究还将研究通过检测滚珠轴承位置并将其与速度波动相关联来拒绝由精密运动平台上的滚子轴承引起的干扰的能力。 最后，将研究用于最小化轴承扰动和轴承摩擦对级的超慢运动的影响的控制方法。 如果成功，这项研究将通过将滚子轴承平台的精度推向纳米级来提高精密运动系统的精度和响应速度。 虽然非接触式轴承提供最低的摩擦和最高的精度，制造它们以更严格的公差推高了成本。 滚子轴承制造技术的改进提高了其性能，现在使用滚子轴承的舞台可以实现纳米性能。 尽管如此，滚子轴承的滞后特性限制了它们的性能。这项研究将使精密工作台以更低的成本运行，具有更高的精度和准确度。 这为精密运动平台的最终用户提供了相当大的影响，由于改进的运动控制系统，他们将能够实现改进的制造和计量过程。 最后，这项研究将提供大学研究与工业需求的一致性，并为学生提供在工业环境中进行研究的机会，研究具有直接技术应用的研究问题。

Heightened performance requirements have driven improvements in precision motion equipment that now boast accuracies in the nanometer range. However, such accuracies require expensive noncontacting bearings, while roller bearings provide the best performance/cost benefit. Despite past research in this area, adequate friction mitigation remains the limiting factor for precision mechanical motion stages. This research will investigate techniques for improving precision motion control using knowledge of friction. Hysteresis models will be used to identify, evaluate and predict friction experimentally, and to design improved motion control systems that mitigate friction's effects. This research will also investigate the ability to reject disturbances caused by roller bearings on precision motion stages by sensing the ball bearing position and relate that to fluctuations in velocity. Finally, control approaches for minimizing the effects of bearing disturbances and bearing friction on the ultra-slow motion of stages will be studied. If successful, this research will increase the accuracy and speed of response of precision motion systems by pushing the accuracy of roller bearing stages to the nanoscale. While noncontact bearings provide the lowest friction and highest precision, manufacturing them to ever tighter tolerances drives up cost. Improved manufacturing techniques for roller bearings have improved their performance, and now stages using roller bearings can realize nanometer performance. Still, the hysteretic characteristics of roller bearings limits their performance. This research will enable precision stages to be operated at lower cost with higher precision and accuracy. This provides considerable impact for end users of precision motion stages, who will be able to achieve improved manufacturing and metrology processes as a result of improved motion control systems. Finally, this research will provide an alignment of university research with industrial needs and the opportunity for students to conduct research in an industrial setting, working on research problems with immediate technological application.