GOALI: Nanoscale Hysteresis Modeling and Control in Precision Equipment

更高的性能要求推动了精密运动设备的改进，这些设备现在号称具有纳米级的精度。然而，这样的精度需要昂贵的非接触式轴承，而滚子轴承提供最佳的性能/成本效益。尽管过去在这一领域进行了研究，但足够的摩擦减缓仍然是精密机械运动平台的限制因素。这项研究将研究利用摩擦知识提高运动控制精度的技术。迟滞模型将被用来在实验中识别、评估和预测摩擦，并设计改进的运动控制系统，以减轻摩擦的影响。这项研究还将研究通过检测滚珠轴承位置并将其与速度波动相关联来抑制滚子轴承在精密运动平台上造成的干扰的能力。最后，研究了减小轴承扰动和轴承摩擦对工作台超慢运动影响的控制方法。如果成功，这项研究将通过将滚子轴承工作台的精度推到纳米级来提高精密运动系统的响应精度和速度。虽然非接触式轴承提供了最低的摩擦力和最高的精度，但制造它们的公差越来越小，这会增加成本。改进的滚子轴承制造技术提高了它们的性能，现在使用滚子轴承的阶段可以实现纳米级的性能。尽管如此，滚子轴承的滞后特性限制了它们的性能。这项研究将使精密工作台能够以较低的成本操作，具有较高的精度和精确度。这为精密运动平台的最终用户提供了相当大的影响，他们将能够由于改进的运动控制系统而实现改进的制造和计量工艺。最后，这项研究将使大学研究与工业需求保持一致，并为学生提供在工业环境中进行研究的机会，致力于具有直接技术应用的研究问题。

Heightened performance requirements have driven improvements in precision motion equipment that now boast accuracies in the nanometer range. However, such accuracies require expensive noncontacting bearings, while roller bearings provide the best performance/cost benefit. Despite past research in this area, adequate friction mitigation remains the limiting factor for precision mechanical motion stages. This research will investigate techniques for improving precision motion control using knowledge of friction. Hysteresis models will be used to identify, evaluate and predict friction experimentally, and to design improved motion control systems that mitigate friction's effects. This research will also investigate the ability to reject disturbances caused by roller bearings on precision motion stages by sensing the ball bearing position and relate that to fluctuations in velocity. Finally, control approaches for minimizing the effects of bearing disturbances and bearing friction on the ultra-slow motion of stages will be studied. If successful, this research will increase the accuracy and speed of response of precision motion systems by pushing the accuracy of roller bearing stages to the nanoscale. While noncontact bearings provide the lowest friction and highest precision, manufacturing them to ever tighter tolerances drives up cost. Improved manufacturing techniques for roller bearings have improved their performance, and now stages using roller bearings can realize nanometer performance. Still, the hysteretic characteristics of roller bearings limits their performance. This research will enable precision stages to be operated at lower cost with higher precision and accuracy. This provides considerable impact for end users of precision motion stages, who will be able to achieve improved manufacturing and metrology processes as a result of improved motion control systems. Finally, this research will provide an alignment of university research with industrial needs and the opportunity for students to conduct research in an industrial setting, working on research problems with immediate technological application.