SBIR Phase I: A Novel Approach for Production of Freestanding GaN Wafers for III-Nitride Light Emitters and Detectors

SBIR 第一阶段：用于生产 III 族氮化物光发射器和探测器的独立式 GaN 晶圆的新方法

• 批准号: 0911826
• 负责人: Shaoping Wang
• 金额: $ 10万
• 依托单位: Fairfield Crystal Technology, LLC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-07-01 至 2009-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0911826&HistoricalAwards=false
• 关键词: SBIR; Phase; Novel; Approach; Production

This Small Business Innovation Research (SBIR) Phase I project will demonstrate a novel technique for producing freestanding GaN wafers and substrates. High-quality freestanding GaN substrates are important for fabrication of high-performance light emitters, such as blue laser diodes, UV LEDs, and UV detectors that have many indispensable applications from data storage/data communication, to water/air purification, to detection/analysis of chemical and biological agents for homeland security applications. Despite the research efforts in the last decade, affordable freestanding GaN wafers and substrates of large diameters (2inches) have not been available commercially. This project will demonstrate a novel approach to growth of GaN thick films and fabrication of freestanding GaN wafers.The broader impact/commercial potential of this project will be commercially available freestanding GaN wafers and substrates of large diameters; at an affordable price, the commercialization potential will be great. This project will enable development and commercialization of high performance III-nitride-based light emitters and detectors."This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5)."

这个小型企业创新研究(SBIR)第一阶段项目将展示一种生产独立GaN晶片和衬底的新技术。高质量的独立GaN衬底对于制造高性能发光器件非常重要，例如蓝色激光二极管、紫外光LED和紫外光探测器，它们具有许多不可或缺的应用，从数据存储/数据通信到水/空气净化，再到国土安全应用中的化学和生物制剂的检测/分析。尽管在过去十年中进行了大量的研究工作，但价格实惠的大直径(2英寸)独立式GaN晶片和衬底还没有商业化。该项目将展示一种生长GaN厚膜和制造独立GaN晶片的新方法。该项目的更广泛的影响/商业潜力将是商业上可获得的大直径的独立GaN晶片和衬底；以负担得起的价格，商业潜力将是巨大的。该项目将使高性能III-氮化物基光发射器和探测器的开发和商业化成为可能。“该奖项由2009年美国复苏和再投资法案(公法111-5)资助。”