Optimized Manufacturing of Microholes in Ceramic Materials by Dry Electrical Discharge Machining

由于其热工作原理允许几乎无力加工而不依赖于被加工材料的机械性能，S电火花加工(EDM)是一种成熟的制造微小孔的生产技术。尤其是在加工陶瓷这一注定要应用于微技术领域的材料组时，电火花加工的作用越来越大。然而，制造具有复杂几何形状和高深宽比的精密微孔往往涉及到许多困难。在加工过程中，电极损耗高、材料去除率低以及在大长宽比和小间隙宽度下的冲洗问题日益严重是限制因素。在制造高精度微孔时，不断提高生产率的需求使得钻削工艺必须不断优化和适应。这项预期的科学工作的目标是研究和应用高精度制造陶瓷材料微孔的特定技术。为此，S的研究重点将放在如何应用干式电火花钻削加工导电陶瓷的技术、技术和经济课题上，以最大限度地减少电极的磨损，提高材料的去除率。

Due to its thermal working principle that allows a nearly force free machining independent of the working material´s mechanical properties Electrical Discharge Machining (EDM) is a well established production technique for manufacturing micro holes. Especially when machining ceramics, a materialgroup that is predestined for the application within the field of micro technology, EDM comes more and more into action. However, the production of precise micro holes with complex geometries and high aspect ratios is often related to many difficulties. High electrode wear, small material removal rate andincreasing problems concerning flushing at high aspect ratios and small gap widths are limiting factors during the machining process.The continuous demand for an increasing productivity when manufacturing high-precision micro holes makes a constant optimization and adaptation of the drilling process mandatory. Goal of the intended scientific work is the investigation and application of specific technologies for highprecision manufacturing of micro holes in ceramic materials. At this, the research´s focus will be put on the application of methods to minimize the electrode´s wear and to increase the material removal rate.Therefore a dry EDM drilling technique to machine conductive ceramics is analyzed, including the processing of technical, technological and economical topics.