MRI: Acquisition of a multi-pocket e-beam evaporator for nano/micro facility at CCNY

MRI：为 CCNY 的纳米/微米设施采购多腔电子束蒸发器

• 批准号: 0922903
• 负责人: Sang-Woo Seo
• 金额: $ 23.44万
• 依托单位: CUNY City College
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-09-15 至 2011-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0922903&HistoricalAwards=false
• 关键词: MRI; Acquisition; multi; pocket; beam

Program AbstractThis proposal requests funding to acquire a multi-pocket electron-beam evaporator at the City College of New York (CCNY). The system will be configured to provide a high level of capability and maximum flexibility for use in a shared facility environment. A multi-pocket electron beam evaporator will provide a capability of depositing six different metals/dielectrics in a high vacuum for smooth and precise interface between them. The acquisition of an e-beam evaporator with the nano/micro facility at CCNY will enhance the quality and scope of the research training and education by incorporating hands-on experience in the class materials and also foster the integration of research and education by offering new research opportunities for both undergraduate and graduate students. The research conducted using the proposed equipment is interdisciplinary and involves the collaborative efforts from various departments. This will be a great opportunity for our students to obtain interdisciplinary knowledge and research experience through participating in these research activities. CCNY is committed to providing a high-quality education to its predominant Hispanic American, African-American, and female students. Research opportunities resulting from the acquisition of the e-beam evaporator system will promote more underrepresented minority groups to pursue in advanced degrees in science and engineering at CCNY and better prepare them for the industry and graduate studies in nano/micro technology areas upon their graduation. The proposed equipment will fulfill a critical and growing need for both the education and research on nano/micro technology at the City College of New York.

计划摘要本建议要求资金，以获得多口袋电子束蒸发器在纽约城市学院（CCNY）。该系统的配置将提供高水平的能力和最大的灵活性，以便在共享设施环境中使用。多袋式电子束蒸发器将提供在高真空中沉积六种不同金属/镍的能力，以实现它们之间的平滑和精确界面。在CCNY的纳米/微设施的电子束蒸发器的收购将提高研究培训和教育的质量和范围，通过将实践经验纳入课堂材料，并通过为本科生和研究生提供新的研究机会，促进研究和教育的整合。使用拟议设备进行的研究是跨学科的，涉及各部门的合作努力。这将是一个很好的机会，让我们的学生获得跨学科的知识和研究经验，通过参与这些研究活动。CCNY致力于为其主要的西班牙裔美国人，非洲裔美国人和女性学生提供高质量的教育。电子束蒸发器系统的收购所带来的研究机会将促进更多代表性不足的少数群体在CCNY攻读科学和工程高级学位，并更好地为他们毕业后在纳米/微技术领域的行业和研究生学习做好准备。拟议的设备将满足纽约城市学院纳米/微米技术教育和研究的关键和日益增长的需求。