MRI: Acquisition of a multi-pocket e-beam evaporator for nano/micro facility at CCNY

计划摘要这项提案要求获得资金，以便在纽约城市学院(CCNY)购买一个多口袋电子束蒸发器。该系统将被配置为提供高水平的能力和最大的灵活性，以便在共享设施环境中使用。多袋电子束蒸发器将提供在高真空中沉积六种不同金属/电介质的能力，以实现它们之间的平滑和精确的界面。通过在课程材料中融入实践经验，在CCNY购买具有纳米/微型设施的电子束蒸发器将提高研究培训和教育的质量和范围，并通过为本科生和研究生提供新的研究机会，促进研究和教育的整合。使用拟议设备进行的研究是跨学科的，涉及到不同部门的合作努力。这将是我们的学生通过参与这些研究活动获得跨学科知识和研究经验的一个很好的机会。CCNY致力于为其主要的拉美裔美国人、非裔美国人和女性学生提供高质量的教育。收购电子束蒸发器系统带来的研究机会将促进更多未被充分代表的少数群体在CCNY攻读科学和工程高级学位，并使他们在毕业后更好地为行业和纳米/微技术领域的研究生学习做好准备。拟议中的设备将满足纽约城市学院对纳米/微技术教育和研究的关键和不断增长的需求。

Program AbstractThis proposal requests funding to acquire a multi-pocket electron-beam evaporator at the City College of New York (CCNY). The system will be configured to provide a high level of capability and maximum flexibility for use in a shared facility environment. A multi-pocket electron beam evaporator will provide a capability of depositing six different metals/dielectrics in a high vacuum for smooth and precise interface between them. The acquisition of an e-beam evaporator with the nano/micro facility at CCNY will enhance the quality and scope of the research training and education by incorporating hands-on experience in the class materials and also foster the integration of research and education by offering new research opportunities for both undergraduate and graduate students. The research conducted using the proposed equipment is interdisciplinary and involves the collaborative efforts from various departments. This will be a great opportunity for our students to obtain interdisciplinary knowledge and research experience through participating in these research activities. CCNY is committed to providing a high-quality education to its predominant Hispanic American, African-American, and female students. Research opportunities resulting from the acquisition of the e-beam evaporator system will promote more underrepresented minority groups to pursue in advanced degrees in science and engineering at CCNY and better prepare them for the industry and graduate studies in nano/micro technology areas upon their graduation. The proposed equipment will fulfill a critical and growing need for both the education and research on nano/micro technology at the City College of New York.