Hybrid Electromagnetic Near-Field Probing for Sub-surface Inhomogeneous Material Characterization

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。本研究的目的是开发一种低成本、非破坏性、非接触的探测方法，用于非均匀材料和器件的表面和亚表面表征。新型人工和纳米材料的发展需要快速、低复杂性和超灵敏的材料高分辨率表征，以及在制造过程中具有亚微米空间分辨率的缺陷检测。该方法的重点是将近场微波探测系统与光学干涉测量相结合，用于拓扑传感和校正。该研究的智力价值源于通过调查基本限制而设计的新电子设计，以及通过集成而实现的小型化，从而实现可扩展的解决方案。电磁和噪声分析，校准测试结构的设计，以及相关的计量学，用于了解灵敏度的基本限制和设计小型化有源探头。不同的穿透深度可以使用不同的频率进行地下探测。所提出的研究的更广泛的影响是为新材料技术的缺陷检测提供一种快速和廉价的工具，并为成品率和均匀性分析提供快速分类样品。这样的工具能影响材料制造技术，维持国家吗？美国在这一领域的领导地位。对该机构的影响将是该领域核心能力的发展，以及与现有研究项目和多学科教育的互动。在现有的K-12推广活动中，将增加一个名为“电磁眼”的新模块，让孩子们在哪里看到？透过不透明盖子的硬币。将扩大针对代表性不足群体的成功招聘工作，并与德国顶尖工程大学之一Technische Universität m<e:1> nchen开展国际合作。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). The objective of this research is to develop a low-cost non-destructive, non-contact probing method for surface and sub-surface characterization of inhomogeneous materials and devices. New artificial and nano-material development requires fast, low-complexity and ultra-sensitive high-resolution characterization of materials, as well as defect detection during fabrication processes, with sub-micron spatial resolution. The approach focuses on combining a near-field microwave probing system with optical interferometry for topology sensing and correction.The intellectual merit of the research stems from new electronic designs through investigation of fundamental limitations, and miniaturization through integration, enabling a scalable solution. Electromagnetic and noise analysis, design of calibration test structures, and related metrology, are used to understand the fundamental limitations on sensitivity and design miniaturized active probes. Different penetration depths enable sub-surface probing by using different frequencies. The broader impacts of the proposed research are to provide a fast and inexpensive tool for detection of defects for new material technologies and rapid classification of samples into batches for yield and uniformity analysis. Such a tool can impact material manufacturing technology and maintain the nation?s leadership in this area. An impact on the institution will be development of core competency in the field and interactions with existing research projects and multidisciplinary education. A new module will be added to existing K-12 outreach, entitled Electromagnetic Eyes, where children ?see? a coin through an opaque cover. A successful recruiting effort which focuses on under-represented groups will expand, and the international collaboration with one of the top engineering universities in Germany, Technische Universität München, developed.