Collaborative Research: Heterogeneous Integration of Patterned 3-D Nanotube Supercapacitators on CMOS

这一跨学科的研究项目旨在证明碳纳米管超级电容器作为可靠的片上能源在互补金属-氧化物-硅集成电路上异质集成的新概念。将对互补金属-氧化物-硅集成电路上图案化碳纳米管超级电容器的设计、制备和异质集成的基础研究和关键问题进行研究。图案化的碳纳米管薄膜将使用与传统的互补金属氧化物硅技术兼容的模板引导增强型介质电泳技术来组装。所制备的纳米管薄膜将被用于构建具有多向功率流动能力的超级电容器作为片上电源。这种合作将导致集成超级电容器作为独立的、芯片上的电源的开发。它将为超大规模集成系统提供立竿见影的变革性解决方案，并显著减少体积和成本。它将提高系统的可靠性和运行时间，并刺激从植入式设备、远程医疗保健到智能建筑以及无处不在的计算和传感的各种新应用。一个并行和综合的教育计划旨在培训学生在类似行业的环境中，并提高他们解决问题的技能和团队合作技能。教育努力包括招聘和保留工程教育的学生研究人员，加强两个研究机构(特拉华大学和亚利桑那大学)的工程学课程，在社会中进行更广泛的教育，以及向代表性不足的群体成员进行外联。此外，它强调工程教育的多样性，将产生巨大的社会效益。

Abstract This cross-disciplinary research project aims at demonstrating a proof of new concept on heterogeneous integration of carbon nanotube supercapacitors on complementary metal-oxide-silicon integrated circuits as reliable on-chip energy sources. Fundamental studies and key issues on design, fabrication and heterogeneous integration of patterned carbon nanotube supercapacitors on the complementary metal-oxide-silicon integrated circuits will be investigated. Patterned carbon nanotube films will be assembled using a template-guide enhanced dielectrophoretic technique which is compatible to the traditional complementary metal-oxide-silicon technology. The fabricated nanotube films will be utilized to construct supercapacitors, which have multi-directional power flow capability as on-chip power sources. The collaborative effort will result in the development of integrated supercapacitors as independent, on-chip, power sources. It will provide an immediate transformative solution to very large scale integrated systems with the significant reduction on size and cost. It will improve system reliability and run-time and stimulate a large variety of new applications ranging from implantable devices, remote healthcare to smart buildings and ubiquitous computing and sensing. A concurrent and integrated educational program is designed to train students in industry-like environments and to enhance their problem-solving techniques and team-work skills. The educational efforts include recruitment and retention of student researchers in engineering education, enhancement of the engineering curriculum at the two research institutions (University of Delaware and University of Arizona), broader education in the society, and outreach to members of underrepresented groups. Moreover, it emphasizes diversity in engineering education and will result in tremendous social benefits.