Self-Controlled Surface-Selective Atomic Layer Deposition for Integrated Vertical Nanowire Field Effect Transistors

用于集成垂直纳米线场效应晶体管的自控表面选择性原子层沉积

基本信息

  • 批准号:
    0926245
  • 负责人:
  • 金额:
    $ 15.9万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2009
  • 资助国家:
    美国
  • 起止时间:
    2009-09-01 至 2012-08-31
  • 项目状态:
    已结题

项目摘要

The objective of this proposed research is to gain fundamental understanding of how gaseous surface passivation molecules interact with nanowire arrays in an atomic layer deposition system. Specifically, the goal will be accomplished by: (1) understanding how the passivation molecules diffuse among ZnO nanowires with different densities; (2) determining the passivation ability of the chosen passivation precursor with respect to the sticking coefficient of the precursors; (3) correlating the surface selective accuracy to the reactivity of the precursors. In addition, integrated vertical NW FETs will be fabricated characterized to optimize the deposition condition for the best dielectric layer quality and device performance. The final outcome of this project is expected to realize a ?smart? thin film deposition technique that can ?self-choosing? deposition area. This research would lead to a general, simple and low-cost fabrication technique for large-scale integrating semiconductor nanowires into three dimensional nanoelectronic systems. Understandings established in this research would pave the path to a novel technique for selectively functionalizing nanowire surfaces in large scale by vapor deposition methods. The research discovery will be integrated in the PI?s graduate course about Nanomaterials and Nanotechnology. This research will provide an excellent opportunity for training graduate and undergraduate students with fabrication and characterization technologies in the frontier of nanoscience. The advanced atomic layer deposition facility and techniques established in this research will be shared with PI?s colleagues to enhance the infrastructure for advanced materials and nanotechnology research and education. A partnership will be established between the PI?s group and K-12 school teachers and students through this research program.
本研究的目的是获得对原子层沉积系统中气体表面钝化分子如何与纳米线阵列相互作用的基本理解。具体而言,目标将通过以下方式实现:(1)了解钝化分子如何在不同密度的ZnO纳米线中扩散;(2)根据所述前驱体的粘附系数确定所选钝化前驱体的钝化能力;(3)将表面选择精度与前驱体的反应性联系起来。此外,为了获得最佳的介电层质量和器件性能,将对沉积条件进行优化。本项目最终成果有望实现“智能”。薄膜沉积技术可以自我选择?沉积区。该研究将为大规模集成半导体纳米线到三维纳米电子系统提供一种通用、简单和低成本的制造技术。在这项研究中建立的理解将为通过气相沉积方法在大规模中选择性地功能化纳米线表面的新技术铺平道路。研究发现将被纳入PI?我们的研究生课程是关于纳米材料和纳米技术的。这项研究将为培养纳米科学前沿的制造和表征技术的研究生和本科生提供一个极好的机会。本研究建立的先进原子层沉积设备和技术将与PI?加强先进材料和纳米技术研究和教育的基础设施。PI之间将建立伙伴关系?通过这个研究项目,我们的团队和K-12学校的老师和学生。

项目成果

期刊论文数量(0)
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科研奖励数量(0)
会议论文数量(0)
专利数量(0)

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Xudong Wang其他文献

Freestanding midinfrared negative-index metamaterials with sandwich configuration perforated with square arrays of holes
独立式中红外负折射率超材料,具有三明治结构,穿孔有方形孔阵列
  • DOI:
    10.1007/s00339-010-5958-8
  • 发表时间:
    2010
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Xudong Wang;Y. Ye;Chao Zheng;W. Tang;T. Cui
  • 通讯作者:
    T. Cui
Excitation and magnetic field performance of a prototype REBCO sextupole magnet at 4.2 K
原型 REBCO 六极磁体在 4.2 K 下的励磁和磁场性能
  • DOI:
  • 发表时间:
    2019
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Xudong Wang;Kiyosumi Tsuchiya;Yasushi Arimoto;Akio Terashima;Ryuichi Ueki;Zhanguo Zong;Masanori Kawai;Mika Masuzawa;Norihito Ohuchi; Masafumi Tawada;Akihiro Kikuchi
  • 通讯作者:
    Akihiro Kikuchi
Chalcogenide MAX phases Zr2Se(B1-xSex) (x=0–0.97) and their conduction behaviors
硫属化物 MAX 相 Zr2Se(B1-xSex) (x=0−0.97) 及其传导行为
  • DOI:
    10.1016/j.actamat.2022.118183
  • 发表时间:
    2022
  • 期刊:
  • 影响因子:
    9.4
  • 作者:
    Ziqian Li;Erxiao Wu;Ke Chen;Xudong Wang;GuoXin Chen;Lijing Miao;Yiming Zhang;Yujie Song;Shiyu Du;Zhifang Chai;Qing Huang
  • 通讯作者:
    Qing Huang
Final-focus Superconducting Magnets for SuperKEKB
SuperKEKB 的最终焦点超导磁体
  • DOI:
    10.18429/jacow-ipac2018-tuzgbe2
  • 发表时间:
    2018
  • 期刊:
  • 影响因子:
    0
  • 作者:
    N. Ohuchi;B. Parker;M. Tartaglia;Tae Hyun Kim;K. Aoki;Y. Ohnishi;Y. Arimoto;M. Kawai;H. Sugimoto;G. Velev;Z. Zong;R. Ueki;H. Koiso;H. Yamaoka;J. DiMarco;A. Marone;T. Kawamoto;Animesh Jain;Y. Ohsawa;Y. Kondo;M. Anerella;Xudong Wang;T. Oki;J. Escallier;K. Tsuchiya;A. Morita;J. Nogiec;T. J. Gardner;M. Masuzawa;S. Nakamura;P. Wanderer
  • 通讯作者:
    P. Wanderer
Inverse estimation of heat flux and temperature field for a nonlinear heat transfer system using step-renewed two-stage Kalman filter

Xudong Wang的其他文献

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{{ truncateString('Xudong Wang', 18)}}的其他基金

FMSG: Bio: Interface-Directed Manufacturing of Piezoelectric Biocrystal Thin Films
FMSG:生物:压电生物晶体薄膜的界面导向制造
  • 批准号:
    2328250
  • 财政年份:
    2024
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant
I-Corps: Electrostimulation-based process that uses weak alternative electric fields to stimulate and activate hair follicles in the scalp
I-Corps:基于电刺激的过程,使用弱的替代电场来刺激和激活头皮中的毛囊
  • 批准号:
    2114428
  • 财政年份:
    2021
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant
Defect-Rich Quasi Two Dimensional Metal Oxides with Strong Ferromagnetism
具有强铁磁性的富缺陷准二维金属氧化物
  • 批准号:
    2114931
  • 财政年份:
    2021
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant
I-Corps: A Green and Flexible Nanogenerator Film for Sensing and Energy-Harvesting Applications
I-Corps:用于传感和能量收集应用的绿色柔性纳米发电机薄膜
  • 批准号:
    1823839
  • 财政年份:
    2018
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant
Nanometer-Scale Piezoelectric, Flexoelectric and Piezotronic Effects from 2D Piezoelectric Nanomaterials
二维压电纳米材料的纳米级压电、挠曲电和压电效应
  • 批准号:
    1709025
  • 财政年份:
    2017
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Continuing Grant
CAREER: Flexoelectric Effect in Ferroelectric Nanowires for High-Performance Nanogenerators
职业:用于高性能纳米发电机的铁电纳米线的挠曲电效应
  • 批准号:
    1148919
  • 财政年份:
    2012
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant
Coupling between Piezoelectricity and Charge Transport Property in ZnO Nanowires
ZnO 纳米线压电与电荷传输特性之间的耦合
  • 批准号:
    0905914
  • 财政年份:
    2009
  • 资助金额:
    $ 15.9万
  • 项目类别:
    Standard Grant

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职业:针对腐蚀控制镁基植入物的混合表面涂层
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    2339911
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    2024
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High-Entropy Alloy Nanocrystals with Controlled Compositions and Surface Structures
成分和表面结构可控的高熵合金纳米晶
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    23H01327
  • 财政年份:
    2023
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    $ 15.9万
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Quantum controlled collisions; an empirical approach for studying the interaction potential of molecule-surface systems.
量子控制碰撞;
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    EP/X037886/1
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通过受控范德华纳米通道制造探索限制和缺陷对二维材料表面电荷的影响。
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