EAGER: Micromachined Thermophones with Engineered Thermo-acoustic Response

本研究的目标是设计、制造和表征一组新型的气动超声换能器，它可以显著提高声学测距和检测系统的极限。实现上述目标的方法是通过在同一衬底上集成宽带扬声器和麦克风来使用热声产生超声波。为了优化热声换能器的性能，采用微纳米制造技术对基板的热声性能进行了工程设计。本研究的智能优点在于设计和制造高度优化的热声换能器。这些研究包括定制衬底微纳米结构，开发针对SO的制造工艺，在衬底上集成优化设计的加热器，制造和全面表征此类换能器。拟议研究的更广泛影响是需要远程和高分辨率超声波测距和成像的应用领域的进步，如机器人、监视和智能制导系统。例如，为视障人士使用的导航系统可以从这种高分辨率超声波换能器中受益匪浅。在教育和外联领域，在拟议研究项目的整个过程中，将包括任职人数不足的本科生和少数族裔本科生。此外，PI将在普渡大学伯克纳米技术中心大堂区域开发一个教育展览/摊位，为当地高中生提供实践活动和演示。展览/摊位将包括与超声波换能器、其工作原理及其在技术和自然世界中的应用(例如蝙蝠声纳)有关的教育项目。

EAGER: Micromachined Thermophones with Engineered Thermo-acoustic ResponseThe objective of this research is to design, fabricate, and characterize a group of novel air-operated ultrasonic transducers that can significantly push the limits of acoustic ranging and detection systems. The approach to achieve the above goal is to use thermo-acoustic generation of ultrasound by integrating wideband speakers and microphones on the same substrate. The substrate thermo-acoustic properties are engineered using micro and nano fabrication technologies in order to optimize the performance.The intellectual merits of the proposed research lies in the design and fabrication of highly-optimized thermo-acoustic transducers. These include tailoring substrate micro and nano architecture, development of fabrication processes to so, integration of optimally designed heaters on the substrates, fabrication and full characterization of such transducers.The broader impacts of the proposed research are advances in applications that require long range and high resolution ultrasonic ranging and imaging such as robotics, surveillance, and smart guidance systems. For example, navigation systems used for visually impaired individuals can benefit immensely from such high resolution ultrasonic transducers. In the education and outreach area, under-represented and minority undergraduate students will be included throughout the course of the proposed research project. In addition, the PI will develop an educational exhibition/booth to be located at the Purdue University Birck Nanotechnology Center lobby area for hands-on activity and demonstrations for local high-school students. The exhibition/booth will incorporate educational items related to ultrasonic transducers, its operating principle, and their applications in technology and natural world (e.g., bat sonar).