EAGER: Collaborative Research: Heterogeneous integration of Nanotubes and Nanowires on flexible polymers with CMOS Circuitry

EAGER：合作研究：异质集成的柔性聚合物与CMOS电路的纳米管和纳米线本研究的目的是开发和研究一种高度通用的，低成本的组装和集成方法，将各种纳米材料，如碳纳米管和纳米线上的柔性聚对二甲苯-C薄膜和CMOS基板。 实现上述目标的途径是采用低压场辅助组装技术。 所得到的柔性衬底上的纳米材料传感器将与外围电子硅电路连接，以实现集成传感应用。拟议研究的智力优势在于将新型纳米材料异质集成到柔性衬底上，并将其与电子读出电路集成。 这包括在铸造制造的电子电路上设计金属化化学，以促进具有低接触电阻的不同纳米材料的集成，以及此类组件的制造和全面表征。拟议研究的更广泛影响是在需要高灵敏度，低功耗和传感器阵列的传感和监测应用方面的进展。 直接应用包括检测环境监测和医疗保健应用中的有害气体和污染物。 除了培训研究生外，研究所还将让本科生参与其研究工作，特别是来自妇女和代表性不足群体的学生。 这项合作研究的结果将通过NSF高速纳米制造中心以及各种专业会议和会议进行传播。

EAGER: Collaborative Research: Heterogeneous integration of Nanotubes and Nanowires on flexible polymers with CMOS CircuitryThe objective of this research is to develop and investigate a highly versatile, low cost assembly and integration approach for incorporating various nanomaterials such as carbon nanotubes and nanowires on to flexible parylene-C thin films and CMOS substrates. The approach to achieve the above goal is to use low voltage field assisted assembly technology. The resulting nanomaterials based sensors on flexible substrates will be connected with peripheral electronic silicon circuitry to enable integrated sensing applications.The intellectual merits of the proposed research lies in the heterogeneous integration of novel nanomaterials on to flexible substrates and their integration with electronic readout circuits. This includes engineering the metallization chemistry on the foundry fabricated electronic circuitry to facilitate integration of different nanomaterials with low contact resistances, fabrication and full characterization of such assemblies.The broader impacts of the proposed research are advances in sensing and monitoring applications that require high sensitivity, low power and arrays of sensors. The direct applications include detection of hazardous gases and pollutants for environmental monitoring and healthcare applications. In addition to training graduate students, the PIs will involve undergraduate students in their research efforts, especially students from women and under-represented groups. The results from this collaborative research will be disseminated through the NSF Center for High-rate Nanomanufacturing, and various professional meetings and conferences.