EAGER: Collaborative Research: Heterogeneous integration of Nanotubes and Nanowires on flexible polymers with CMOS Circuitry

EAGER：合作研究：纳米管和纳米线在柔性聚合物上与CMOS电路的异质集成本研究的目标是开发和研究一种高度通用，低成本的组装和集成方法，用于将各种纳米材料（如碳纳米管和纳米线）集成到柔性聚苯乙烯- c薄膜和CMOS衬底上。实现上述目标的途径是采用低压场辅助装配技术。由此产生的基于柔性衬底的纳米材料传感器将与外围电子硅电路连接，以实现集成传感应用。所提出的研究的智力优势在于新型纳米材料在柔性衬底上的异质集成及其与电子读出电路的集成。这包括在铸造厂制造的电子电路上进行金属化化学工程，以促进具有低接触电阻的不同纳米材料的集成，制造和充分表征这些组件。拟议研究的更广泛影响是需要高灵敏度、低功率和传感器阵列的传感和监测应用的进步。直接应用包括检测有害气体和污染物，用于环境监测和医疗保健应用。除了培训研究生外，pi还将让本科生参与他们的研究工作，特别是来自女性和代表性不足群体的学生。这项合作研究的结果将通过美国国家科学基金会高速纳米制造中心和各种专业会议进行传播。

EAGER: Collaborative Research: Heterogeneous integration of Nanotubes and Nanowires on flexible polymers with CMOS CircuitryThe objective of this research is to develop and investigate a highly versatile, low cost assembly and integration approach for incorporating various nanomaterials such as carbon nanotubes and nanowires on to flexible parylene-C thin films and CMOS substrates. The approach to achieve the above goal is to use low voltage field assisted assembly technology. The resulting nanomaterials based sensors on flexible substrates will be connected with peripheral electronic silicon circuitry to enable integrated sensing applications.The intellectual merits of the proposed research lies in the heterogeneous integration of novel nanomaterials on to flexible substrates and their integration with electronic readout circuits. This includes engineering the metallization chemistry on the foundry fabricated electronic circuitry to facilitate integration of different nanomaterials with low contact resistances, fabrication and full characterization of such assemblies.The broader impacts of the proposed research are advances in sensing and monitoring applications that require high sensitivity, low power and arrays of sensors. The direct applications include detection of hazardous gases and pollutants for environmental monitoring and healthcare applications. In addition to training graduate students, the PIs will involve undergraduate students in their research efforts, especially students from women and under-represented groups. The results from this collaborative research will be disseminated through the NSF Center for High-rate Nanomanufacturing, and various professional meetings and conferences.