Sensor devices based on integrated, functionalized carbon nanotubes

基于集成、功能化碳纳米管的传感器装置

• 批准号: 195216225
• 负责人: Professor Dr.-Ing. Stefan E. Schulz
• 金额: --
• 依托单位: Zentrum für Mikrotechnologien (ZfM)
• 依托单位国家: 德国
• 项目类别: Research Units
• 财政年份: 2011
• 资助国家: 德国
• 起止时间: 2010-12-31 至 2018-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/195216225?language=en
• 关键词: Sensor; devices; based; integrated; functionalized

The outline for phase 2 of TP5 contains four work packages as follows: AP1 "Sensor platform and piezoresistive sensor", AP2 "Optical sensor", AP3 "Concepts for synthesis and CNT functionalization" und AP4 "Monolithic integration of CNT-based sensor devices".AP1 is continuously dedicated to the integration of CNTs in microelectromechanical systems (MEMS). Especially the formation of an electrical contact between the CNT and metal electrodes and its reliabililty during operation appeared to be challenging. In order to answer related questions, we plan more comprehensive investigations using the nanomanipulator launched in phase 1 and electron microscopy, in close co-operation with TP3. The existing test platform will be further developed to optically and/or electronically characterize single CNTs in operation under mechanical load. In co-operation with TP2 and TP3, we plan the design and manufacturing of MEMS structures with thermal actuators for the characterization of CNT-based, piezoresistive sensors.AP2 and AP3 have the aim to apply the on-chip functionalization of integrated CNTs with metal nanoparticles succesfully shown in phase 1 to achieve optical sensors via microtechnological processing. For this aim, AP 3 will evaluate the necessary approaches for a chemical functionalization, with the most auspicious ones to be conjoined with the wafer-level technology in AP 2. On its part, AP 2 will develop a suitable device geometry and derive and execute a possible microtechnological process plan. The particular task is in that, to improve the transformation of the successful lab-scale juxtaposition of metal nanoparticles on CNTs to the microtechnological environment with respect to controlling the selectivity, degree and density of functionalization. As a central, new approach we plan to employ elongated gold and silver nanoparticles alongside with spherical ones. For the former, a novel synthesis route could be reported already during the first phase. The characterization of the nanostructures will be carried out along two pathes: first, the determination of the structural properties of the involved nanoscale constitutents, second, the characterization of the functional properties of the entire system (current-voltage characteristics, absorption, efficiency, polarization).Finally, AP 4 will develop a strategy for a monolithically integrated CNT-based sensor system in close co-operation with TP7. In the beginning, it is based on the parameters expected for the optical CNT-based sensors. In the course of the project, the input for this task shall increasingly be derived from the experimental measurements in AP 3.

TP 5第2阶段的大纲包含以下四个工作包：AP 1“传感器平台和压阻传感器”，AP 2“光学传感器”，AP 3“合成和CNT功能化的概念”和AP 4“基于CNT的传感器器件的单片集成”。特别是CNT和金属电极之间的电接触的形成及其在操作期间的可靠性似乎具有挑战性。为了回答相关问题，我们计划使用第一阶段推出的纳米操纵器和电子显微镜进行更全面的调查，并与TP 3密切合作。现有的测试平台将进一步开发，以光学和/或电子表征单根CNT在机械负载下的操作。在与TP 2和TP 3的合作中，我们计划设计和制造具有热致动器的MEMS结构，用于表征基于CNT的压阻式传感器。AP 2和AP 3的目标是应用集成CNT与金属纳米颗粒的片上功能化，成功地在第1阶段中显示，通过微技术处理实现光学传感器。为此，AP 3将评估化学功能化的必要方法，其中最有利的方法将与AP 2中的晶圆级技术结合起来。AP 2将开发合适的器件几何形状，并制定和执行可能的微技术工艺计划。具体的任务是，以提高成功的实验室规模的CNT上的金属纳米粒子的并列的微技术环境中控制功能化的选择性，程度和密度的转换。作为一个核心的新方法，我们计划采用细长的金和银纳米粒子以及球形纳米粒子。对于前者，在第一阶段可能已经报告了一种新的合成路线。纳米结构的表征将沿着沿着两条路径进行：首先，确定所涉及的纳米级成分的结构特性，其次，整个系统的功能特性（电流-电压特性，吸收，效率，极化）的表征。最后，AP 4将与TP 7密切合作，开发单片集成CNT传感器系统的策略。一开始，它是基于光学CNT传感器的预期参数。在项目实施过程中，这一任务的投入将越来越多地来源于第3号附加议定书中的实验测量。