SBIR Phase II: Real-time Economic Sampling System

这个小型企业创新研究(SBIR)第二阶段项目将创建第一个用于高质量密集型高科技制造的实时经济采样(RES)系统。该系统最初专注于半导体制造，将允许对所有工艺工具、步骤和产品每天多次优化和调整缺陷检测采样。通过适应性地将抽样集中在产生最大回报的地方，这可以将制造商生产劣质产品的经济风险降至最低。基础跨学科模式的复杂性阻碍了可持续发展战略的实现。申请者最近的进展表明了这项研究将以此为基础的可行性。研究主要有三类：1)风险与优化，2)周期时间，3)收益率模型。第1类和第2类建立在第一阶段可行性结果的基础上，在该阶段建立了复杂工厂模型的快速而准确的近似。风险与优化建模将在传统的(长期平均)风险模型中引入由于工厂车间事件而产生的短期风险。周期研究将改进具有异类服务器的队列的近似值。产量建模将引入RE所需的新的实时产量近似。所包括的实施任务将创建第一个工厂就绪的RES系统，该系统捕捉到半导体制造的必要复杂性。拟议的RES系统是一个“绿色制造”的推动者，它将创造一个新的市场，因为它将第一个弥补许多过程控制操作中存在的低效率。最初的关注点是半导体制造商，他们受到耗时的离线分析、严格的抽样规则和高风险的临时抽样调整的限制。与此同时，由于失控事件和/或检查能力未得到充分利用，宝贵的产品正在被浪费。拟议中的制度可以改变这一点。RES系统属于半导体行业中一个快速增长的领域：过程控制。也可以追求其他市场，减少浪费所产生的社会影响可能会变得普遍。

This Small Business Innovation Research (SBIR) Phase II project will create a first Real-time Economic Sampling (RES) system for quality intensive high-tech manufacturing. Focusing initially on semiconductor manufacturing, the system will allow defect inspection sampling to be optimized and adjusted many times per day across all process tools, steps, and products. This minimizes, among other things, a manufacturer's economic risk of producing bad products by adaptively focusing sampling where it gives the greatest return. The complexity of the underlying interdisciplinary models have hindered the realization of RES. Recent advancements by the applicants showed feasibility that this research will build on. There are three main research categories, 1) Risk & Optimization, 2) Cycle-Time, and 3) Yield Modeling. Categories 1 & 2 build on Phase I feasibility results where fast, yet accurate, approximations of complex factory models were established. Risk & Optimization modeling will introduce near-term risk due to factory floor events into traditional (long-run average) risk models. Cycle-time research will refine the approximations for queues with heterogeneous servers. Yield modeling will introduce novel real-time yield approximations needed for RES. The included implementation tasks will then create the first factory-ready RES system that captures the necessary intricacies of semiconductor manufacturing.The proposed RES system is a "Green Manufacturing" enabler that creates a new market as it will be the first to recoup inefficiencies present in many process control operations. The initial focus is on semiconductor manufacturers who are limited by time-consuming off-line analysis, rigid sampling rules, and risky ad-hoc sampling adjustments. Meanwhile valuable products are being wasted due to out-of-control incidents and/or under-utilized inspection capacity. The proposed system can change this. An RES system belongs to a fast growing segment of the semiconductor industry: process control. Other markets can also be pursued and a societal impact due to reduced waste can become widespread.