SBIR Phase I: Dynamic Surface Profile Measurement System

SBIR 第一阶段：动态表面轮廓测量系统

• 批准号: 1014221
• 负责人: James Millerd
• 金额: $ 15万
• 依托单位: 4 D Technology Corporation
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-07-01 至 2011-04-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1014221&HistoricalAwards=false
• 关键词: SBIR; Phase; Dynamic; Surface; Profile

This Small Business Innovation Research (SBIR) Phase I project addresses the metrology needs of next-generation manufacturing of precision components by developing a surface measuring microscope with extended vertical range/slope capability that can operate under extreme vibration conditions. The aims of this Phase I project are to develop a breadboard system capable of making high spatial resolution measurements without the need for vibration isolation, to develop and demonstrate an extended range measurement technique that will enable the measurement of any type of surface, and to evaluate the performance of this prototype in terms of repeatability, precision and accuracy. The Phase II goal is to develop a prototype instrument that will be mounted on computer-controlled machining equipment used in the manufacturing of precision components such as large optics and x-ray telescope mirrors. The proposed instrument will enable the manufacture of complex surfaces and provide a flexible research tool to study a wide variety of surface phenomenon. The broader impact/commercial potential of this project extends to industries such as micro electro-mechanical structures (MEMS), flat panel displays, bio-medical devices, data storage, solar, semiconductor, and automotive. Surface finish/roughness is critical to the performance of precision machined components in all these industries. For example, in the manufacture of large mirrors for astronomy and aspheric mirrors for x-ray optics, surface roughness is critical to the final imaging performance due to limitations caused by light scattering. In applications such as medical implants and precision automotive components, longevity is critically affected by surface finish owing to friction and wear. Additionally, the measurement of nanostructures is important in the fields of hard disk drive components, MEMS, flat-panel displays, and semiconductor chips to provide feedback to improve fabrication processes and tools. Instruments that directly measure surface roughness in-situ in the presence of vibration, and over a large area, are not readily available. The proposed instrument will allow rapid measurement over a large scale in manufacturing environments enabling quick optimization of the fabrication process, minimization of productions costs, and development of new surface fabrication processes.

该小型企业创新研究（SBIR）第一阶段项目通过开发具有扩展垂直范围/斜率能力的表面测量显微镜，满足下一代精密部件制造的计量需求，可在极端振动条件下工作。 第一阶段项目的目标是开发一个试验板系统，能够在不需要隔振的情况下进行高空间分辨率测量，开发和演示一种扩展范围的测量技术，该技术将能够测量任何类型的表面，并评估该原型在可重复性，精度和准确性方面的性能。第二阶段的目标是开发一种原型仪器，该仪器将安装在计算机控制的加工设备上，用于制造大型光学器件和X射线望远镜反射镜等精密部件。拟议的仪器将使复杂表面的制造，并提供一个灵活的研究工具，研究各种各样的表面现象。 该项目更广泛的影响/商业潜力延伸到微机电结构（MEMS）、平板显示器、生物医疗设备、数据存储、太阳能、半导体和汽车等行业。表面光洁度/粗糙度对于所有这些行业中精密加工部件的性能至关重要。例如，在制造用于天文学的大型反射镜和用于X射线光学器件的非球面反射镜时，由于光散射引起的限制，表面粗糙度对最终成像性能至关重要。 在医疗植入物和精密汽车零部件等应用中，由于摩擦和磨损，表面光洁度严重影响寿命。此外，纳米结构的测量在硬盘驱动器组件、MEMS、平板显示器和半导体芯片领域中是重要的，以提供反馈来改进制造工艺和工具。在振动存在的情况下，直接测量现场表面粗糙度的仪器，并在大面积上，是不容易获得的。 所提出的仪器将允许在制造环境中进行大规模的快速测量，从而能够快速优化制造过程，最大限度地降低生产成本，并开发新的表面制造工艺。