SBIR Phase II: Thick Piezoelectric Films with Dielectric Constant above 3000

SBIR第二期：介电常数高于3000的压电厚膜

• 批准号: 1026215
• 负责人: Yuhong Huang
• 金额: $ 50万
• 依托单位: CHEMAT TECHNOLOGY INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1026215&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Thick; Piezoelectric

This Small Business Innovation Research (SBIR) Phase II project aims to develop high dielectric constant (high-K) thick film for high-frequency ultrasonic transducer. Thick piezoelectric film technology is very attractive for the fabrication of thin piezoelectric element in high-frequency ultrasonic medical imaging applications. However, it is challenging to process high-quality piezoelectric film with thickness in the range of 10-20 micrometers. In addition, the film needs to demonstrate dielectric constant of 3000 or higher due to the need of electric matching in fabricating array transducers. In previous Phase I project, a piezoelectric thick film with dielectric constant higher than 3000 was demonstrated. In this Phase II project, the high-K thick film will be utilized to develop miniature high frequency single element and linear array transducers for Intravascular Ultrasonic (IVUS) imaging applications. The broader/commercial impact of this project will be the potential to provide high-K thick film to enable the application of miniature high-frequency ultrasonic transducers. IVUS is a medical imaging methodology using a specially designed catheter with a miniaturized ultrasound probe attached to the distal end of the catheter, which is inserted into the heart or into a coronary vessel for visualizing the vessel and heart structure. This project is expected to further miniaturize the ultrasonic transducer mounted on the catheter and provide improved resolution. With this anticipated catheter, surgeons may view the arteries of patients more clearly and spend less surgery time. Plus, the smaller size will make the procedure less invasive. In addition, this technology can also be used in other applications such as Radio Frequency (RF) filters for cell phone, ultrasonic valve and tuning devices, liquid delivery and droplet ejectors, chemical and biomedical sensors etc.

这项小型企业创新研究（SBIR）II期项目旨在为高频超声传感器开发高介电常数（高K）厚膜。 厚厚的压电膜技术对于在高频超声医学成像应用中制造薄的压电元件非常有吸引力。 但是，处理具有10-20微米范围内厚度的高质量压电膜是一项挑战。 此外，由于制造阵列传感器需要电匹配，该膜需要证明介电常数为3000或更高。 在上一个I期项目中，证明了介电常数高于3000的压电厚膜。 在此II期项目中，将利用高K厚的膜开发用于血管内超声（IVUS）成像应用的微型高频单元和线性阵列传感器。该项目的更广泛/商业影响将有可能提供高K厚膜以实现微型高频超声传感器的应用。 IVU是一种使用特殊设计的导管的医学成像方法，其在导管远端连接的微型超声探针，该探针被插入心脏或冠状动脉中，以可视化血管和心脏结构。 预计该项目将进一步将安装在导管上的超声传感器进行小型化，并提供改进的分辨率。 有了预期的导管，外科医生可能会更清楚地看待患者的动脉，并花费更少的手术时间。 另外，较小的尺寸将使过程减少侵入性。 此外，该技术还可以用于其他应用中，例如用于手机，超声阀和调谐设备的射频（RF）过滤器，液体输送和液滴喷射器，化学和生物医学传感器等。