SBIR Phase II: Thick Piezoelectric Films with Dielectric Constant above 3000

SBIR第二期：介电常数高于3000的压电厚膜

• 批准号: 1026215
• 负责人: Yuhong Huang
• 金额: $ 50万
• 依托单位: CHEMAT TECHNOLOGY INC
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2012-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1026215&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Thick; Piezoelectric

This Small Business Innovation Research (SBIR) Phase II project aims to develop high dielectric constant (high-K) thick film for high-frequency ultrasonic transducer. Thick piezoelectric film technology is very attractive for the fabrication of thin piezoelectric element in high-frequency ultrasonic medical imaging applications. However, it is challenging to process high-quality piezoelectric film with thickness in the range of 10-20 micrometers. In addition, the film needs to demonstrate dielectric constant of 3000 or higher due to the need of electric matching in fabricating array transducers. In previous Phase I project, a piezoelectric thick film with dielectric constant higher than 3000 was demonstrated. In this Phase II project, the high-K thick film will be utilized to develop miniature high frequency single element and linear array transducers for Intravascular Ultrasonic (IVUS) imaging applications. The broader/commercial impact of this project will be the potential to provide high-K thick film to enable the application of miniature high-frequency ultrasonic transducers. IVUS is a medical imaging methodology using a specially designed catheter with a miniaturized ultrasound probe attached to the distal end of the catheter, which is inserted into the heart or into a coronary vessel for visualizing the vessel and heart structure. This project is expected to further miniaturize the ultrasonic transducer mounted on the catheter and provide improved resolution. With this anticipated catheter, surgeons may view the arteries of patients more clearly and spend less surgery time. Plus, the smaller size will make the procedure less invasive. In addition, this technology can also be used in other applications such as Radio Frequency (RF) filters for cell phone, ultrasonic valve and tuning devices, liquid delivery and droplet ejectors, chemical and biomedical sensors etc.

此小型企业创新研究（SBIR）第二阶段项目旨在开发用于高频超声换能器的高介电常数（高K）厚膜。 厚压电薄膜技术是高频超声医学成像应用中制备薄压电元件的一种非常有吸引力的方法。 然而，加工厚度在10-20微米范围内的高质量压电薄膜具有挑战性。 此外，由于在制造阵列换能器中需要电匹配，膜需要表现出3000或更高的介电常数。 在先前的第一阶段计划中，展示了介电常数高于3000的压电厚膜。 在该二期项目中，高K厚膜将用于开发用于血管内超声（IVUS）成像应用的微型高频单元件和线性阵列换能器。该项目的更广泛/商业影响将是提供高K厚膜的潜力，以实现微型高频超声换能器的应用。 IVUS是一种医学成像方法，使用专门设计的导管，导管远端连接有微型超声探头，将其插入心脏或冠状血管，以可视化血管和心脏结构。 该项目预计将进一步简化安装在导管上的超声换能器，并提高分辨率。 有了这种预期的导管，外科医生可以更清楚地查看患者的动脉，并花费更少的手术时间。 另外，较小的尺寸将使手术的侵入性更小。 此外，该技术还可用于其他应用，例如用于手机的射频（RF）滤波器、超声波阀和调谐装置、液体输送和液滴喷射器、化学和生物医学传感器等。