High-Performance Micromachining of Glass using Electrochemical Discharge Machining (ECDM) for Mems Applications

使用电化学放电加工 (ECDM) 对微机电系统 (MEMS) 应用进行高性能玻璃微加工

• 批准号: 1068935
• 负责人: Jun Ni
• 金额: $ 31.97万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2015-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1068935&HistoricalAwards=false
• 关键词: Performance; Micromachining; Glass; using; Electrochemical

The objective of this research is to create a novel, hybrid, and high performance micromachining process for electrically non-conductive brittle hard materials such as glass, quartz and certain ceramics, and to reveal the fundamental material removal mechanisms and microscopic phenomena in micromachining of these materials. The approach includes experimental observations, physics-based modeling and simulation of the material removal processes due to thermal erosion, chemical dissolution or etching, mechanical cutting, and ultrasonic tool vibration. A material removal model based on synthesizing the contributions from each of these material removal mechanisms will be written for this proposed novel micromachining process. This model will then be utilized to design and optimize a robust process for micromachining sample brittle hard materials. If successful, this project would widen the potential applications of micro components made of non-conductive brittle hard materials in emerging fields such as micro-fluidic systems and micro-electromechanical systems. This novel hybrid process will allow the cost effective machining of complex micro-features on many difficult-to-machine materials. The benefits of achieving these new micromachining capabilities include the creation of new and better devices for biomedical applications, microelectronics, and scientific research investigation. This research will extend the engineering application of advanced heat transfer and micro multiphase flow modeling techniques to further understand electrochemical discharge phenomenon.

本研究的目的是为非导电脆性硬材料（如玻璃、石英和某些陶瓷）创造一种新型、混合和高性能的微加工工艺，并揭示这些材料微加工中的基本材料去除机制和微观现象。该方法包括实验观察、基于物理的建模和模拟由于热侵蚀、化学溶解或蚀刻、机械切削和超声工具振动引起的材料去除过程。基于综合这些材料去除机制的贡献，将为该提出的新型微加工工艺编写材料去除模型。该模型将用于设计和优化微加工样品脆性硬材料的鲁棒工艺。如果成功，该项目将扩大非导电脆性硬材料微部件在微流体系统、微机电系统等新兴领域的潜在应用。这种新颖的混合工艺将允许在许多难以加工的材料上具有成本效益的复杂微特征的加工。实现这些新的微加工能力的好处包括为生物医学应用、微电子和科学研究创造新的更好的设备。本研究将扩展先进的传热和微多相流建模技术的工程应用，以进一步了解电化学放电现象。