GOALI: Developing Uncooled Microbolometer Arrays Based on Thin Films of Hole Doped Rare Earth Perovskite Manganite Materials

GOALI：开发基于空穴掺杂稀土钙钛矿锰酸盐材料薄膜的非冷却微测辐射热计阵列

• 批准号: 1128586
• 负责人: Rajeswari Kolagani
• 金额: $ 20万
• 依托单位: Towson University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2011
• 资助国家: 美国
• 起止时间: 2011-09-01 至 2015-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1128586&HistoricalAwards=false
• 关键词: GOALI; Developing; Uncooled; Microbolometer; Arrays

The proposed work is a collaborative effort between Towson University and the industrial partner Triton Services Inc. towards developing uncooled microbolometer arrays based on thin films of hole-doped rare earth perovskite manganite materials. Epitaxial manganite thin films will be developed on Silicon, employing lattice engineering schemes, and the properties of these films will be optimized for bolometer operation at or close to room temperature. Single test bolometers and microbolometer arrays will be fabricated and device performance will be evaluated. Intellectual merit: Manganite materials hold potential for superior performance in terms of sensitivity, stability and robustness compared to other bolometer materials currently employed for uncooled IR imaging. Successful demonstration and evaluation of manganite microbolometer arrays will lead to the assimilation of this technology by the IR imaging industry. The proposed effort will generate a knowledge base related to materials manipulation, silicon-integration and device fabrication, which will be useful for other technological applications of the manganites. The materials physics involved in the hetero-epitaxial lattice engineering will contribute to the understanding of oxide hetero-structures and interfaces.Broader Impacts: the proposed effort will enhance the educational experience of the students at Towson University through the industry-university interaction. Graduate students of the recently started professional science masters program will be involved in the proposed work. The industry-university collaboration and student involvement in applied research will serve as a model for other professional science masters programs. Content related to the proposed project will also be incorporated in K-12 STEM outreach activities at Towson University.

这项拟议的工作是汤森大学和工业合作伙伴Triton Services Inc.合作开发基于空穴掺杂稀土钙钛矿锰矿材料薄膜的非制冷微测辐射热计阵列。采用晶格工程方法，将在硅上制备外延锰氧化物薄膜，这些薄膜的性能将被优化，以适应室温或接近室温的测辐射热计工作。将制造单个测试测辐射热计和微测辐射热计阵列，并对设备性能进行评估。智能优点：与目前用于非制冷红外成像的其他测辐射热计材料相比，锰氧化物材料在灵敏度、稳定性和稳健性方面具有卓越性能的潜力。锰氧化物微测辐射热计阵列的成功示范和评估将导致红外成像业对这项技术的吸收。这项拟议的工作将产生一个与材料操纵、硅集成和器件制造有关的知识库，这将有助于锰氧化物的其他技术应用。异质外延晶格工程所涉及的材料物理学将有助于理解氧化物异质结构和界面。广泛的影响：拟议的努力将通过产学互动提高汤森大学学生的教育体验。最近开始的专业科学硕士项目的研究生将参与拟议的工作。产学合作和学生参与应用研究将成为其他专业科学硕士项目的典范。与拟议项目有关的内容也将纳入汤森大学的K-12 STEM外联活动。