CAREER: RF/Microwave components and devices using micro-/nano machined metamaterial

摘要射频/微波元件和设备使用微/纳米加工的超材料：本研究的目标是（1）研究和实现低损耗，多维高品质的超材料使用先进的微加工和纳米技术，（2）翻译开发的超材料技术，高效，紧凑，多功能的射频（RF）设备和组件。超材料由于其独特的性质，有可能对RF器件产生巨大影响。最近出现了紧凑和多功能的超材料RF器件。然而，几个未解决的问题阻碍了当前超材料技术的实际应用：材料损耗的减少，三维（3-D）结构的构造，以及成本效益的制造工艺的发展。这项研究的知识价值包括：1）一种新颖的气升式结构和一种横向纳米层压导体结构，以分别降低超材料的介电损耗和导体损耗，2）3-D微/纳米制造技术开发的发展，以及3）利用所开发的超材料的一类新的多功能RF器件，例如柔性隐形斗篷，一种紧凑型低损耗双频耦合器和一种紧凑型高效双频天线。所设想的微/纳加工超材料及其射频器件应用将提供该领域的重大突破。该提案的广泛影响包括在各个方面的综合教育和研究，如新课程，少数民族和本科生研究支持，以及布法罗大学的外展活动。还将支助一个包括纽约三个州立大学校园的在线课程。这项研究的技术和社会影响将发生在不同的领域，如电信，国防，微电子和医学成像。

AbstractRF/Microwave components and devices using micro-/nano machined metamaterial:The objectives of this research are (1) to investigate and implement low loss, multidimensional high quality metamaterials using advanced micromachining and nanotechnology, and (2) to translate the developed metamaterial technologies to highly efficient, compact, and multifunctional radio frequency (RF) devices and components. Metamaterials due to their unique properties have a potential to drastically impact RF devices. Compact and multifunctional metamaterial RF devices have recently emerged. However, several unsolved issues hamper the practical applications of current metamaterial technology: reduction of material loss, construction of three dimensional (3-D) structures, and development of cost-effective fabrication processes. The intellectual merit for this research includes: 1) a novel air-lifted architecture and a lateral nano lamination conductor architecture to respectively reduce dielectric loss and conductor loss of metamaterials, 2) the development of 3-D micro-/nano fabrication technique development, and 3) a new class of multifunctional RF devices utilizing the developed metamaterials such as a flexible invisibililty cloak, a compact low loss dual band coupler, and a compact high efficient dual band antenna. The envisioned micro-/nano machined metamaterial and its RF device applications will provide a major breakthrough in the field.The broad impacts of the proposal include integrated education and research at various fronts, such as new courses, minority and undergraduate research support, and outreach activities at the University at Buffalo. Also supported will be an on-line course encompassing three State University of New York campuses. The technical and societal impacts of this research will occur in diverse areas such as telecommunications, defense, microelectronics, and medical imaging.