Collaborative Research: Development of a Robust, High-Speed, High-Quality Laser-Assisted Nanomanufacturing System
合作研究:开发稳健、高速、高质量的激光辅助纳米制造系统
基本信息
- 批准号:1200557
- 负责人:
- 金额:$ 29.21万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2012
- 资助国家:美国
- 起止时间:2012-08-15 至 2017-07-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
This collaborative research project is focused on understanding the fundamental optical and plasma mechanisms in the laser-assisted tip-based nanomanufacturing (LA-TBN) process, utilizing the understanding to identify the optimal conditions for near-field radiation enhancement and plasma-mediated ablation at the sample surface that allow the use of advanced control techniques to achieve robust, high-speed, high-quality LA-TBN. The near-field radiation enhanced plasma-mediated ablation effect and possibly associated thermal side effects during the LA-TBN process will be clarified and distinguished through simulation and experiments enabled by the use of advanced control techniques. The gained knowledge will then be used to analyze and optimize the nanofabrication conditions towards fabrication robustness and quality. The optimal fabrication conditions will be achieved through the development and implementation of advanced control techniques, which in turn, leads to high-speed and high quality nanofabrication. The technique will be implemented and evaluated through the fabrication of a maze-like complicated pattern in single crystal silicon. The success of this project will not only significantly enhance the advantages of the LA-TBN process over other nanofabrication methodologies, including low-cost, ultra-high-resolution and versatility in materials that can be processed, but willalso increase understanding of the fundamental mechanisms involved in this intriguing process. As one of the first systematic attempts to overcome critical barriers in the LA-TBN process, this project enables these advantages for the productive implementations of this technique in strategically important areas, such as semiconductors. The educational activities comprise curriculum development, recruitment and retaining of under-represented students, and outreach to K-12.
该合作研究项目的重点是了解激光辅助尖端纳米制造(LA-TBN)过程中的基本光学和等离子体机制,利用这种理解来确定样品表面近场辐射增强和等离子体介导烧蚀的最佳条件,允许使用先进的控制技术来实现稳健,高速,高质量的LA-TBN。近场辐射增强等离子体介导的烧蚀效应和可能相关的热副作用在LA-TBN过程中,将澄清和区分通过使用先进的控制技术,使模拟和实验。然后,所获得的知识将用于分析和优化纳米制造条件,以实现制造鲁棒性和质量。最佳的制造条件将通过先进控制技术的开发和实施来实现,这反过来又会导致高速和高质量的纳米纤维。该技术将通过在单晶硅中制造迷宫状复杂图案来实现和评估。该项目的成功不仅将显著增强LA-TBN工艺相对于其他纳米纤维方法的优势,包括低成本,超高分辨率和可加工材料的多功能性,而且还将增加对这一有趣过程中所涉及的基本机制的理解。作为克服LA-TBN工艺中关键障碍的首批系统性尝试之一,该项目为该技术在战略重要领域(如半导体)的生产实施提供了这些优势。教育活动包括课程编制、招收和留住代表性不足的学生,以及向K-12进行宣传。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
数据更新时间:{{ journalArticles.updateTime }}
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
数据更新时间:{{ journalArticles.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ monograph.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ sciAawards.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ conferencePapers.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ patent.updateTime }}
Qingze Zou其他文献
Data-Driven Robust Optimal Acoustic Noise Filtering of Atomic Force Microscope Image
数据驱动的原子力显微镜图像鲁棒最优声学噪声过滤
- DOI:
- 发表时间:
2023 - 期刊:
- 影响因子:0
- 作者:
Jiarong Chen;Qingze Zou - 通讯作者:
Qingze Zou
Stochastic Modeling for Serial-Batching Workstations with Heterogeneous Machines
具有异构机器的串行批处理工作站的随机建模
- DOI:
10.1109/coase.2007.4341649 - 发表时间:
2007 - 期刊:
- 影响因子:0
- 作者:
Sunday;Shengwei Ding;J. Shanthikumar;Raha Akhavan;Kyongsoo Kim;Zhiqun Lin;S. Sundararajan;Qingze Zou - 通讯作者:
Qingze Zou
Feasibility of 5G-enabled process monitoring in milling operations
- DOI:
10.1016/j.mfglet.2024.09.024 - 发表时间:
2024-10-01 - 期刊:
- 影响因子:
- 作者:
Liwen Hu;Baihui Chen;ElHussein Shata;Shashank Shekhar;Charif Mahmoudi;Ivan Seskar;Qingze Zou;Y.B. Guo - 通讯作者:
Y.B. Guo
DATA-DRIVEN ROBUST OPTIMAL ITERATIVE LEARNING CONTROL OF LINEAR SYSTEMS WITH STRONG CROSS-AXIS COUPLING
强横轴耦合线性系统数据驱动的鲁棒最优迭代学习控制
- DOI:
- 发表时间:
2023 - 期刊:
- 影响因子:0
- 作者:
Zezhou Zhang;Qingze Zou - 通讯作者:
Qingze Zou
Acoustic softening and hardening in aluminum: Modeling and experiments
铝的声学软化和硬化:建模和实验
- DOI:
- 发表时间:
2012 - 期刊:
- 影响因子:9.8
- 作者:
Zhehe Yao;Gap-Yong Kim;Zhihua Wang;LeAnn Faidley;Qingze Zou;Deqing Mei;Zichen Chen - 通讯作者:
Zichen Chen
Qingze Zou的其他文献
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
{{ truncateString('Qingze Zou', 18)}}的其他基金
Collaborative Research: NSF-ANR MCB/PHY: Probing Heterogeneity of Biological Systems by Force Spectroscopy
合作研究:NSF-ANR MCB/PHY:通过力谱探测生物系统的异质性
- 批准号:
2412551 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
PFI-TT: Active Acoustic Noise Cancellation and Control for Scanning Probe Microscopy
PFI-TT:扫描探针显微镜的主动声学噪声消除和控制
- 批准号:
2234449 - 财政年份:2023
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
IIBR Instrumentation: Multiscale Multiplex Nanomechanical Stimulus and Sensing of Living Cells on 3D-Cell Culture
IIBR 仪器:3D 细胞培养中活细胞的多尺度多重纳米机械刺激和传感
- 批准号:
1952823 - 财政年份:2020
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Research: Multiscale Characterization and Dynamics Modeling of Stomatal Function in Plants
合作研究:植物气孔功能的多尺度表征和动力学建模
- 批准号:
1851907 - 财政年份:2019
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
GOALI: Control of Broadband Acoustic-caused Vibration at Nanoscale: An Enabling Technology for Cleanroom Metrology
GOALI:纳米级宽带声学振动的控制:洁净室计量的一项使能技术
- 批准号:
1663055 - 财政年份:2017
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
IDBR: Type A: Development of a Polymer-Probe-Based Scanning Probe Microscope for Noninvasive, High-Speed, Broadband Investigation of Live Mammalian Cell
IDBR:A 型:开发基于聚合物探针的扫描探针显微镜,用于活体哺乳动物细胞的无创、高速、宽带研究
- 批准号:
1353890 - 财政年份:2014
- 资助金额:
$ 29.21万 - 项目类别:
Continuing Grant
GOALI: Inversion-Based Nanopositioning Control For Ultra-high-speed Scanning Probe Microscopy
GOALI:用于超高速扫描探针显微镜的基于反转的纳米定位控制
- 批准号:
1063668 - 财政年份:2010
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
CAREER: Control Tools for Nanoscale Rapid Broadband Viscoelasticity Measurement and Mapping of Soft Materials
职业:软材料纳米级快速宽带粘弹性测量和绘图的控制工具
- 批准号:
1066055 - 财政年份:2010
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
CAREER: Control Tools for Nanoscale Rapid Broadband Viscoelasticity Measurement and Mapping of Soft Materials
职业:软材料纳米级快速宽带粘弹性测量和绘图的控制工具
- 批准号:
0846350 - 财政年份:2009
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Project: Integration of Modeling and Control of Smart Actuators for Nano/Bio Technology into Mechanical Engineering Curriculum
合作项目:将纳米/生物技术智能执行器的建模和控制融入机械工程课程
- 批准号:
0632908 - 财政年份:2007
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
相似国自然基金
Research on Quantum Field Theory without a Lagrangian Description
- 批准号:24ZR1403900
- 批准年份:2024
- 资助金额:0.0 万元
- 项目类别:省市级项目
Cell Research
- 批准号:31224802
- 批准年份:2012
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Cell Research
- 批准号:31024804
- 批准年份:2010
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Cell Research (细胞研究)
- 批准号:30824808
- 批准年份:2008
- 资助金额:24.0 万元
- 项目类别:专项基金项目
Research on the Rapid Growth Mechanism of KDP Crystal
- 批准号:10774081
- 批准年份:2007
- 资助金额:45.0 万元
- 项目类别:面上项目
相似海外基金
Collaborative Research: RESEARCH-PGR: Development of epigenetic editing for crop improvement
合作研究:RESEARCH-PGR:用于作物改良的表观遗传编辑的开发
- 批准号:
2331437 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Research: Broadening Instructional Innovation in the Chemistry Laboratory through Excellence in Curriculum Development
合作研究:通过卓越的课程开发扩大化学实验室的教学创新
- 批准号:
2337028 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Continuing Grant
Collaborative Research: CAS: Exploration and Development of High Performance Thiazolothiazole Photocatalysts for Innovating Light-Driven Organic Transformations
合作研究:CAS:探索和开发高性能噻唑并噻唑光催化剂以创新光驱动有机转化
- 批准号:
2400166 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Continuing Grant
Collaborative Research: Broadening Instructional Innovation in the Chemistry Laboratory through Excellence in Curriculum Development
合作研究:通过卓越的课程开发扩大化学实验室的教学创新
- 批准号:
2337027 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Continuing Grant
Collaborative Research: RESEARCH-PGR: Development of epigenetic editing for crop improvement
合作研究:RESEARCH-PGR:用于作物改良的表观遗传编辑的开发
- 批准号:
2331438 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Research: A Multi-Lab Investigation of the Conceptual Foundations of Early Number Development
合作研究:早期数字发展概念基础的多实验室调查
- 批准号:
2405548 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Research: CAS: Exploration and Development of High Performance Thiazolothiazole Photocatalysts for Innovating Light-Driven Organic Transformations
合作研究:CAS:探索和开发高性能噻唑并噻唑光催化剂以创新光驱动有机转化
- 批准号:
2400165 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Continuing Grant
Collaborative Research: HNDS-I. Mobility Data for Communities (MD4C): Uncovering Segregation, Climate Resilience, and Economic Development from Cell-Phone Records
合作研究:HNDS-I。
- 批准号:
2420945 - 财政年份:2024
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
SBP: Collaborative Research: Improving Engagement with Professional Development Programs by Attending to Teachers' Psychosocial Experiences
SBP:协作研究:通过关注教师的社会心理体验来提高对专业发展计划的参与度
- 批准号:
2314254 - 财政年份:2023
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant
Collaborative Research: Frameworks: FZ: A fine-tunable cyberinfrastructure framework to streamline specialized lossy compression development
合作研究:框架:FZ:一个可微调的网络基础设施框架,用于简化专门的有损压缩开发
- 批准号:
2311878 - 财政年份:2023
- 资助金额:
$ 29.21万 - 项目类别:
Standard Grant