GOALI: ADVANCING THE UNDERLYING SCIENCE OF IN-LINE RF METROLOGY AND PULSED RF POWER DELIVERY FOR LOW TEMPERATURE PLASMA HEATING
目标:推进低温等离子体加热的在线射频计量和脉冲射频功率传输的基础科学
基本信息
- 批准号:1202259
- 负责人:
- 金额:$ 30万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Continuing Grant
- 财政年份:2012
- 资助国家:美国
- 起止时间:2012-07-01 至 2015-12-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
This project will advance a class of manufacturing processes that are critical to the high technology economy of the United States through a unique academic / industry partnership that will advance manufacturing through science-based understanding and application of learning to systems used in a plurality of domestic industries spanning electronics, energy, and the environment. These manufacturing processes utilize reactive plasma systems that are driven by radio frequency power sources. Specifically, this program will advance the knowledge of pulsed radio frequency heating to advance plasma assisted manufacturing capability for future technology manufacturing nodes. Pulsed Radio Frequency (PRF) heating of these plasmas demonstrates unprecedented dynamic range in its ability to modify plasma chemistry and plasma/surface interactions. The advancement of stable, manufacturing worthy systems that employ PRF will enable new processes for applications of broad national interest including integrated circuit fabrication, energy production, and medical applications. This project will advance the understanding of plasma response to transient RF systems by correlating measured plasma conditions via a suite of time resolved diagnostics to waveform-resolved voltage, current, and phase measurements made with an in-line RF measurement system capable of resolving the transient response of the electrical system to levels of accuracy previously not available to the scientific community. This project will leverage this unique academic/industry partnership to develop educational modules that will be incorporated into not only an established STEM program in plasma science, but also into freely accessible continuing education modules for mid-career technologists considering a focus in low temperature plasma applications in their profession. Finally, this project will develop instructional, visually stimulating media designed to educate high-school level science teachers on the application of plasma science in an array of industries that are tangible to the typical high school student, such as microelectronics, display technology, and photovoltaic fabrication.
该项目将通过独特的学术/行业伙伴关系推进一类对美国高科技经济至关重要的制造工艺,该伙伴关系将通过基于科学的理解和学习应用于多个国内行业(包括电子,能源和环境)中使用的系统来推进制造。 这些制造工艺利用由射频电源驱动的反应等离子体系统。具体而言,该计划将推进脉冲射频加热的知识,以提高未来技术制造节点的等离子体辅助制造能力。 这些等离子体的脉冲射频(PRF)加热在其改变等离子体化学和等离子体/表面相互作用的能力方面展示了前所未有的动态范围。 采用PRF的稳定的、有制造价值的系统的进步将使新工艺能够用于具有广泛国家利益的应用,包括集成电路制造、能源生产和医疗应用。 该项目将通过一套时间分辨诊断将测量的等离子体条件与波形分辨电压,电流和相位测量相关联,从而促进对瞬态RF系统的等离子体响应的理解,该测量系统能够将电气系统的瞬态响应解析到科学界以前无法获得的准确度水平。 该项目将利用这种独特的学术/行业合作伙伴关系来开发教育模块,这些模块不仅将纳入等离子体科学的既定STEM计划,而且还将纳入考虑在其专业中专注于低温等离子体应用的中期职业技术人员的免费继续教育模块。 最后,这个项目将开发教学,视觉刺激的媒体,旨在教育高中水平的科学教师对等离子体科学的应用在一系列的行业,是有形的典型高中生,如微电子,显示技术,和光伏制造。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
数据更新时间:{{ journalArticles.updateTime }}
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
数据更新时间:{{ journalArticles.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ monograph.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ sciAawards.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ conferencePapers.updateTime }}
{{ item.title }}
- 作者:
{{ item.author }}
数据更新时间:{{ patent.updateTime }}
Steven Shannon其他文献
Steven Shannon的其他文献
{{
item.title }}
{{ item.translation_title }}
- DOI:
{{ item.doi }} - 发表时间:
{{ item.publish_year }} - 期刊:
- 影响因子:{{ item.factor }}
- 作者:
{{ item.authors }} - 通讯作者:
{{ item.author }}
{{ truncateString('Steven Shannon', 18)}}的其他基金
Collaborative Research: SI2-SSE: An open source multi-physics platform to advance fundamental understanding of plasma physics and enable impactful application of plasma systems
合作研究:SI2-SSE:一个开源多物理平台,可促进对等离子体物理学的基本理解并实现等离子体系统的有效应用
- 批准号:
1740300 - 财政年份:2017
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
International Experiences for Students in Plasma Science: Student Travel Support to Attend the 2016 Gaseous Electronics Conference
等离子体科学学生的国际经验:学生参加 2016 年气体电子会议的旅行支持
- 批准号:
1618560 - 财政年份:2016
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Student Travel Support to Attend the 2014 Gaseous Electronics Conference in Raleigh NC 2 November 2014 - 8 November 2014
学生旅行支持参加2014年北卡罗来纳州罗利举行的2014年气体电子会议2014年11月2日至2014年11月8日
- 批准号:
1414527 - 财政年份:2014
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
I/UCRC: Proposal to add North Carolina State University as a center site for the existing I/UCRC "Center for Lasers and Plasmas in Advanced Manufacturing"
I/UCRC:提议将北卡罗来纳州立大学添加为现有 I/UCRC“先进制造激光和等离子体中心”的中心站点
- 批准号:
1362103 - 财政年份:2014
- 资助金额:
$ 30万 - 项目类别:
Continuing Grant
Planning Grant Proposal to Join the NSF I/UCRC Laser & Plasma for Advanced Manufacturing (LPAM)
加入 NSF I/UCRC 激光计划拨款提案
- 批准号:
1134813 - 财政年份:2011
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
相似海外基金
Advancing Governance and Resilience for Climate Adaptation through Cultural Heritage (AGREE)
通过文化遗产促进气候适应的治理和抵御能力(同意)
- 批准号:
AH/Z000017/1 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Research Grant
Advancing Child and Youth-led Climate Change Education with Country
与国家一起推进儿童和青少年主导的气候变化教育
- 批准号:
DP240100968 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Discovery Projects
Governing Sustainable Futures: Advancing the use of Participatory Mechanisms for addressing Place-based Contestations of Sustainable Living
治理可持续未来:推进利用参与机制来解决基于地方的可持续生活竞赛
- 批准号:
ES/Z502789/1 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Research Grant
Collaborative Research: Conference: DESC: Type III: Eco Edge - Advancing Sustainable Machine Learning at the Edge
协作研究:会议:DESC:类型 III:生态边缘 - 推进边缘的可持续机器学习
- 批准号:
2342498 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
HSI Implementation and Evaluation Project: Green Chemistry: Advancing Equity, Relevance, and Environmental Justice
HSI 实施和评估项目:绿色化学:促进公平、相关性和环境正义
- 批准号:
2345355 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Continuing Grant
AUC-GRANTED: Advancing Transformation of the Research Enterprise through Shared Resource Support Model for Collective Impact and Synergistic Effect.
AUC 授予:通过共享资源支持模型实现集体影响和协同效应,推进研究企业转型。
- 批准号:
2341110 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Cooperative Agreement
ALPACA - Advancing the Long-range Prediction, Attribution, and forecast Calibration of AMOC and its climate impacts
APACA - 推进 AMOC 及其气候影响的长期预测、归因和预报校准
- 批准号:
2406511 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Planning: Advancing Discovery on a Sustainable National Research Enterprise
规划:推进可持续国家研究企业的发现
- 批准号:
2412406 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Collaborative Research: CHIPS: TCUP Cyber Consortium Advancing Computer Science Education (TCACSE)
合作研究:CHIPS:TCUP 网络联盟推进计算机科学教育 (TCACSE)
- 批准号:
2414607 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Standard Grant
Photonic-Enabled THz Duplex Metasurface: Advancing Communication and Sensing
光子太赫兹双工超表面:推进通信和传感
- 批准号:
24K17324 - 财政年份:2024
- 资助金额:
$ 30万 - 项目类别:
Grant-in-Aid for Early-Career Scientists