MRI: Acquisition of Metal Organic Vapor Phase Epitaxy (MOVPE) Reactor for Nanostructured Materials Development

MRI：采购用于纳米结构材料开发的金属有机气相外延 (MOVPE) 反应器

• 批准号: 1337592
• 负责人: Seth Hubbard
• 金额: $ 70.67万
• 依托单位: Rochester Institute of Tech
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2013
• 资助国家: 美国
• 起止时间: 2013-09-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1337592&HistoricalAwards=false
• 关键词: MRI; Acquisition; Metal; Organic; Vapor

This Major Research Instrumentation award to the Rochester Institute of Technology funds the purchase of a metal organic vapor phase epitaxy (MOVPE) system for growth of III-V thin film crystals and nanostructures. The MOVPE system is customized for growth of an array of both traditional and novel semiconductor materials containing arsenic, phosphorous and antimony. The instrument will support the study of a range of new material systems spanning research topics in next generation photovoltaics (PV), III-V on silicon optoelectronics and electronics as well as quantum dot (QD) and nanowire based lasers and photovoltaics. The MOVPE tool is further enabling research in the area of heterogeneous integration of photonics which will enable the realization of low cost high performance optoelectronic chips with active photonic functionalities, such as, lasers, amplifiers, modulators and radio-frequency photonic devices. Furthermore, this tool will support the seamless integration of robust QD lasers with high performance silicon photonic devices, which has the potentials to the meet challenges to the realization of complete optical interconnects that are low-cost and have high performance and efficiency. The tool will be part of RIT's state-of-the-art clean room user facility and be available to research teams across multiple disciplines and universities. The tool will play a central role in RIT's growing multi-disciplinary PhD program in Microsystems Engineering, it will strengthen the graduate training program around new material growth and epitaxy, and optical and electronic devices. A new course based on epitaxy of thin-films is being developed. Other activities include educating personnel from local companies in microelectronic technologies through short course programs, collaboration with RIT Middle College program to introduce high-school students to PV technologies through cleanroom tours and hands-on experiences, and outreach sessions to the general public at RIT's annual Imagine RIT festival. In addition, this tool serves to provide resources and support for academic and industrial partners. It not only provides the technical resources and development for state-of-the-art and next-generation devices, but through the graduate training program, the next generation of experienced scientists and engineers.*****This Major Research Instrumentation award to the Rochester Institute of Technology (RIT)supports the purchase of a metal organic vapor phase epitaxy (MOVPE) system for growth of thin film crystals and nanostructures. The MOVPE system is customized for growth of an array of both traditional and novel materials containing arsenic, phosphorous and antimony. The system will be used to study a range of new material systems spanning research topics in next generation photovoltaics, optoelectronics and electronics as well as quantum dot (QD) and nanowire based lasers and photovoltaics. The tool will be part of RIT's state-of-the-art clean room user facility and be available to research teams across multiple disciplines and universities. The tool will be playing a central role in RIT's growing multi-disciplinary PhD program in Microsystems Engineering, allowing for a strong graduate training program around new material growth and epitaxy and optical and electronic devices. A new course is being developed around the MOVPE and related characterization equipment. Other activities include educating personnel from local companies in microelectronic technologies through short course programs, collaboration with RIT Middle College program to introduce high-school students to PV technologies through cleanroom tours and hands-on experiences, and outreach sessions to the general public at RIT's annual Imagine RIT festival.

这项主要研究仪器奖授予罗切斯特理工学院，用于购买金属有机气相外延（MOVPE）系统，用于III-V薄膜晶体和纳米结构的生长。MOVPE系统是为含有砷、磷和锑的传统和新型半导体材料阵列的生长而定制的。该仪器将支持一系列新材料系统的研究，涵盖下一代光伏（PV），硅光电子学和电子学的III-V研究课题，以及量子点（QD）和基于纳米线的激光和光伏。MOVPE工具将进一步推动光子学异构集成领域的研究，从而实现具有有源光子功能的低成本高性能光电子芯片，如激光器、放大器、调制器和射频光子器件。此外，该工具将支持强大的量子点激光器与高性能硅光子器件的无缝集成，这有可能满足实现低成本、高性能和高效率的完全光互连的挑战。该工具将成为RIT最先进的洁净室用户设施的一部分，并可供多个学科和大学的研究团队使用。该工具将在RIT不断增长的多学科微系统工程博士课程中发挥核心作用，它将加强围绕新材料生长和外延以及光学和电子器件的研究生培训计划。一门基于薄膜外延的新课程正在开发中。其他活动包括通过短期课程项目对当地公司的人员进行微电子技术培训，与RIT中学项目合作，通过洁净室参观和实践经验向高中生介绍光伏技术，以及在RIT年度Imagine RIT节上向公众推广。此外，该工具还为学术和工业合作伙伴提供资源和支持。它不仅为最先进的和下一代设备提供技术资源和开发，而且通过研究生培训计划，下一代经验丰富的科学家和工程师。*****罗彻斯特理工学院（RIT）获得的主要研究仪器奖支持购买用于薄膜晶体和纳米结构生长的金属有机气相外延（MOVPE）系统。MOVPE系统是为含有砷、磷和锑的一系列传统和新型材料的生长而定制的。该系统将用于研究一系列新材料系统，涵盖下一代光伏、光电子和电子学以及量子点（QD）和基于纳米线的激光和光伏的研究课题。该工具将成为RIT最先进的洁净室用户设施的一部分，并可供多个学科和大学的研究团队使用。该工具将在RIT不断增长的多学科微系统工程博士课程中发挥核心作用，允许围绕新材料生长和外延以及光学和电子器件的强大研究生培训计划。围绕MOVPE和相关表征设备的新课程正在开发中。其他活动包括通过短期课程项目对当地公司的人员进行微电子技术培训，与RIT中学项目合作，通过洁净室参观和实践经验向高中生介绍光伏技术，以及在RIT年度Imagine RIT节上向公众推广。