MRI: Acquisition of Metal Organic Vapor Phase Epitaxy (MOVPE) Reactor for Nanostructured Materials Development

罗切斯特理工学院的主要研究仪器奖资助购买用于生长III-V薄膜晶体和纳米结构的金属有机气相外延（MOVPE）系统。 MOVPE系统是定制的传统和新型的半导体材料的阵列含有砷，磷和锑的生长。该仪器将支持一系列新材料系统的研究，涵盖下一代光电子学（PV），硅光电子学和电子学上的III-V以及量子点（QD）和纳米线激光器和光电子学的研究课题。 MOVPE工具进一步推动了光子学异构集成领域的研究，这将使低成本高性能光电芯片的实现具有有源光子功能，如激光器，放大器，调制器和射频光子器件。此外，该工具将支持稳健的QD激光器与高性能硅光子器件的无缝集成，这有可能满足实现低成本、高性能和高效率的完整光互连的挑战。该工具将成为RIT最先进的洁净室用户设施的一部分，并可供多个学科和大学的研究团队使用。 该工具将在RIT不断发展的微系统工程多学科博士课程中发挥核心作用，它将加强围绕新材料生长和外延以及光学和电子器件的研究生培训计划。 正在开发一门以薄膜外延为基础的新课程。其他活动包括通过短期课程对当地公司的人员进行微电子技术方面的教育，与RIT中学项目合作，通过洁净室图尔斯参观和实践经验向高中生介绍光伏技术，以及在RIT年度Imagine RIT节上向公众进行宣传。此外，该工具还为学术和工业合作伙伴提供资源和支持。 它不仅为最先进的和下一代设备提供技术资源和开发，而且通过研究生培训计划，为下一代经验丰富的科学家和工程师提供支持。罗切斯特理工学院（RIT）的主要研究仪器奖支持购买用于薄膜晶体和纳米结构生长的金属有机气相外延（MOVPE）系统。 MOVPE系统是定制的一系列传统和新的材料含有砷，磷和锑的生长。该系统将用于研究一系列新材料系统，涵盖下一代光电子学，光电子学和电子学以及量子点（QD）和纳米线激光器和光电子学的研究主题。该工具将成为RIT最先进的洁净室用户设施的一部分，并可供多个学科和大学的研究团队使用。 该工具将在RIT不断增长的微系统工程多学科博士课程中发挥核心作用，从而围绕新材料生长和外延以及光学和电子器件开展强大的研究生培训计划。 正在围绕MOVPE和相关表征设备开发一个新课程。 其他活动包括通过短期课程对当地公司的人员进行微电子技术方面的教育，与RIT中学项目合作，通过洁净室图尔斯参观和实践经验向高中生介绍光伏技术，以及在RIT年度Imagine RIT节上向公众进行宣传。

This Major Research Instrumentation award to the Rochester Institute of Technology funds the purchase of a metal organic vapor phase epitaxy (MOVPE) system for growth of III-V thin film crystals and nanostructures. The MOVPE system is customized for growth of an array of both traditional and novel semiconductor materials containing arsenic, phosphorous and antimony. The instrument will support the study of a range of new material systems spanning research topics in next generation photovoltaics (PV), III-V on silicon optoelectronics and electronics as well as quantum dot (QD) and nanowire based lasers and photovoltaics. The MOVPE tool is further enabling research in the area of heterogeneous integration of photonics which will enable the realization of low cost high performance optoelectronic chips with active photonic functionalities, such as, lasers, amplifiers, modulators and radio-frequency photonic devices. Furthermore, this tool will support the seamless integration of robust QD lasers with high performance silicon photonic devices, which has the potentials to the meet challenges to the realization of complete optical interconnects that are low-cost and have high performance and efficiency. The tool will be part of RIT's state-of-the-art clean room user facility and be available to research teams across multiple disciplines and universities. The tool will play a central role in RIT's growing multi-disciplinary PhD program in Microsystems Engineering, it will strengthen the graduate training program around new material growth and epitaxy, and optical and electronic devices. A new course based on epitaxy of thin-films is being developed. Other activities include educating personnel from local companies in microelectronic technologies through short course programs, collaboration with RIT Middle College program to introduce high-school students to PV technologies through cleanroom tours and hands-on experiences, and outreach sessions to the general public at RIT's annual Imagine RIT festival. In addition, this tool serves to provide resources and support for academic and industrial partners. It not only provides the technical resources and development for state-of-the-art and next-generation devices, but through the graduate training program, the next generation of experienced scientists and engineers.*****This Major Research Instrumentation award to the Rochester Institute of Technology (RIT)supports the purchase of a metal organic vapor phase epitaxy (MOVPE) system for growth of thin film crystals and nanostructures. The MOVPE system is customized for growth of an array of both traditional and novel materials containing arsenic, phosphorous and antimony. The system will be used to study a range of new material systems spanning research topics in next generation photovoltaics, optoelectronics and electronics as well as quantum dot (QD) and nanowire based lasers and photovoltaics. The tool will be part of RIT's state-of-the-art clean room user facility and be available to research teams across multiple disciplines and universities. The tool will be playing a central role in RIT's growing multi-disciplinary PhD program in Microsystems Engineering, allowing for a strong graduate training program around new material growth and epitaxy and optical and electronic devices. A new course is being developed around the MOVPE and related characterization equipment. Other activities include educating personnel from local companies in microelectronic technologies through short course programs, collaboration with RIT Middle College program to introduce high-school students to PV technologies through cleanroom tours and hands-on experiences, and outreach sessions to the general public at RIT's annual Imagine RIT festival.