MRI: Acquisition of a Nanotopography Capability at the University of Washington Microfabrication Facility

本提案的主要目标是获得一个I线步进工具，用于高通量光刻，具有350 nm的特征分辨率，弥合电子束光刻和接触光刻之间的差距。纳米压印和光刻通常在单独的机器中完成，并且该建议是获得可以同时进行这两种操作的集成机器，从而导致上级对准。许多令人兴奋的项目将受益于该设备的收购。使用纳米地形学的接触引导研究，为微流体创建纳米囊，用于能源的纳米电极，等离子体都是将从此次收购中受益的高质量项目。总的来说，这些项目是有趣的，并具有潜在的变革性。该项目是有凝聚力的，将依赖于步进工具，它是写得很好，组织良好的建议，在各个方面。PI具有在当前和未来的研究项目中使用该工具所需的专业知识。拟议的工具将对研究和教育产生广泛影响。项目的结合，包括初级教师与高级教师是独特的，深思熟虑的。该工具的获得将使学术研究人员和UW NNIN节点的所有用户受益。外联工作范围广泛，包括社区大学、高中和代表性不足的少数民族学生的参与。洁净室设施已经由NNIN资助，因此在设施中使用该工具不仅可以为更多的研究人员提供服务，而且还可以得到良好的维护。预计将有100多名学术用户和大约40名工业用户使用该工具。

The main objective of this proposal is to acquire an I-line stepper tool for high-throughput lithography with 350 nm feature resolution bridging the gap between electron-beam lithography and contact lithography. Nano-imprint and photolithography are usually done in separate machines and this proposal is to acquire an integrated machine that can do both simultaneously resulting in superior alignment. Numerous exciting projects will benefit from the acquisition of this equipment. Contact guidance studies using nanotopography, creating nanorachets for microfluidics, nanoelectrodes for energy, plasmonics are all high quality projects that will benefit from this acquisition. Overall, the projects are interesting and potentially transformative. The projects are cohesive and will rely on the stepper tool, it is well written and well organized proposal in all aspects. The PIs have the required expertise for use of this instrument in current and future research projects. The proposed tool will have a broad impact in research and education. The combination of projects including junior faculty with senior faculty is unique and well thought of. The acquisition of this tool will benefit the academic researchers and overall users for the UW NNIN node. The outreach efforts are broad and well described including involvement of students from community colleges, high schools and underrepresented minorities. The cleanroom facilities are already funded by NNIN, hence having this tool in the facility not only will serve a larger group of researchers, but also will be maintained well. More than100 academic users and about 40 industrial users are expected to use the tool.