MRI: Acquisition of a Nanotopography Capability at the University of Washington Microfabrication Facility

本提案的主要目标是获得具有350 nm特征分辨率的高通量光刻的i线步进工具，弥合电子束光刻和接触光刻之间的差距。纳米压印和光刻通常在单独的机器上完成，本建议是获得一台集成机器，可以同时进行这两项工作，从而获得更好的对准效果。许多令人兴奋的项目将受益于该设备的收购。使用纳米形貌的接触引导研究、为微流体创建纳米电极、用于能量的纳米电极、等离子体学都是高质量的项目，将从此次收购中受益。总的来说，这些项目很有趣，而且具有潜在的变革性。项目是有凝聚力的，将依赖于步进工具，这是一个写得很好，在各个方面都组织得很好的提案。项目负责人具备在当前和未来的研究项目中使用该仪器所需的专业知识。拟议的工具将对研究和教育产生广泛的影响。包括初级教师和高级教师的项目组合是独特的，经过深思熟虑。该工具的获得将使UW NNIN节点的学术研究人员和整体用户受益。外展工作范围广泛，描述良好，包括社区大学、高中和未被充分代表的少数民族学生的参与。洁净室设施已经由NNIN资助，因此在设施中使用该工具不仅可以为更多的研究人员服务，而且还可以得到很好的维护。预计将有100多名学术用户和约40名工业用户使用该工具。

The main objective of this proposal is to acquire an I-line stepper tool for high-throughput lithography with 350 nm feature resolution bridging the gap between electron-beam lithography and contact lithography. Nano-imprint and photolithography are usually done in separate machines and this proposal is to acquire an integrated machine that can do both simultaneously resulting in superior alignment. Numerous exciting projects will benefit from the acquisition of this equipment. Contact guidance studies using nanotopography, creating nanorachets for microfluidics, nanoelectrodes for energy, plasmonics are all high quality projects that will benefit from this acquisition. Overall, the projects are interesting and potentially transformative. The projects are cohesive and will rely on the stepper tool, it is well written and well organized proposal in all aspects. The PIs have the required expertise for use of this instrument in current and future research projects. The proposed tool will have a broad impact in research and education. The combination of projects including junior faculty with senior faculty is unique and well thought of. The acquisition of this tool will benefit the academic researchers and overall users for the UW NNIN node. The outreach efforts are broad and well described including involvement of students from community colleges, high schools and underrepresented minorities. The cleanroom facilities are already funded by NNIN, hence having this tool in the facility not only will serve a larger group of researchers, but also will be maintained well. More than100 academic users and about 40 industrial users are expected to use the tool.