SBIR Phase I: Novel Technologies to Enable High Volume EUV Manufacturing of Integrated Circuits

该小型企业创新研究（SBIR）第一阶段项目旨在评估定制下一代纳米技术的可行性，该技术可实现集成电路的大批量制造，从而提高计算能力和性能。目前在达到下一代性能方面的进展受到满足大批量制造要求方面的重大技术挑战的限制，从而推高了电子产品的成本。这些问题已经困扰了该行业10多年。这里的研究活动考虑解决以下问题的替代方法： 生产率问题最终降低了芯片制造商的成本，并降低了半导体工业中的能耗，从而以较低的成本提供了更环保的高性能电子器件。该项目更广泛的影响/商业潜力首先是加速下一代计算技术的到来，创造更快、更小、更强大的移动的设备，并为全球社会电子社区的生活质量提供进化性的进步，其次是开发满足世界需求的电子产品。第三，要维持下一代电子产品在全球供应和普及方面的竞争力。

This Small Business Innovation Research (SBIR) Phase I project aims to evaluate the feasibility of customized next generation nanoscale technology which enables high volume manufacture of integrated circuits, leading to faster computing power and performance. Current progress in reaching next generation performance is limited by significant technical challenges in meeting high volume manufacturing requirements driving up the cost of electronics. These problems have plagued the industry for over 10 years. The research activity here considers alternative approaches in addressing the production rate issues which ultimately reduce cost to chipmakers and reduce energy consumption in the semiconductor industry, thereby providing greener high performance electronics at lower cost. The broader impact/commercial potential of this project are firstly to accelerate the arrival of next generation computing technology creating faster, smaller more powerful mobile devices and providing evolutionary advances in quality of life for a globally-social electronic community, and secondly to develop electronics which meet the world?s demand at reasonable cost and without substantial adverse impact on the environment, and thirdly to maintain the competitiveness in global supply and accessibility of next generation electronics.