SBIR Phase I: Novel Technologies to Enable High Volume EUV Manufacturing of Integrated Circuits

这项小型企业创新研究（SBIR）第一阶段项目旨在评估定制的下一代纳米技术的可行性，该技术能够实现集成电路的大批量生产，从而提高计算能力和性能。目前在实现下一代性能方面的进展受到了满足大批量制造要求的重大技术挑战的限制，这些挑战推高了电子产品的成本。这些问题已经困扰了这个行业10多年。这里的研究活动考虑了解决生产率问题的替代方法，最终降低了芯片制造商的成本，减少了半导体行业的能源消耗，从而以更低的成本提供更环保的高性能电子产品。这个项目更广泛的影响/商业潜力首先是加速下一代计算技术的到来，创造更快、更小、更强大的移动设备，为全球社交电子社区提供生活质量的进化进步，其次是开发满足世界需求的电子产品。以合理的成本和对环境没有重大不利影响的方式满足美国的需求，第三是保持下一代电子产品在全球供应和可及性方面的竞争力。

This Small Business Innovation Research (SBIR) Phase I project aims to evaluate the feasibility of customized next generation nanoscale technology which enables high volume manufacture of integrated circuits, leading to faster computing power and performance. Current progress in reaching next generation performance is limited by significant technical challenges in meeting high volume manufacturing requirements driving up the cost of electronics. These problems have plagued the industry for over 10 years. The research activity here considers alternative approaches in addressing the production rate issues which ultimately reduce cost to chipmakers and reduce energy consumption in the semiconductor industry, thereby providing greener high performance electronics at lower cost. The broader impact/commercial potential of this project are firstly to accelerate the arrival of next generation computing technology creating faster, smaller more powerful mobile devices and providing evolutionary advances in quality of life for a globally-social electronic community, and secondly to develop electronics which meet the world?s demand at reasonable cost and without substantial adverse impact on the environment, and thirdly to maintain the competitiveness in global supply and accessibility of next generation electronics.