MRI: Acquisition of Atomic Layer Deposition Device for Nanoscale Materials Development Research

提案：1428500PI: Fleischer， Amy s.标题：MRI：纳米级材料开发研究中原子层沉积装置的获取仪器的新功能将对他们招募高素质教师的能力产生直接和持久的影响。维拉诺瓦大学在招聘下一代教员时，将提供使用尖端设备的机会。对纳米材料制造和开发的重视需要他们的实验设施的升级，以吸引顶尖的研究人员和教育工作者，当他们加入这个充满活力的群体时，他们可以立即产生影响。PI和联合PI都致力于改善工程和科学领域代表性不足的少数民族的机会和机会，该资助的两位校长是女性STEM教员。这5个pi加起来为16名研究生提供指导，其中7名是女性，并为19名本科生提供指导，其中5名是女性。布林莫尔学院成立于1885年，是美国第一所向女性提供博士学位的学院，本科专业仍然是全女性，有1300名女性，其中26%的人主修数学或科学。维拉诺瓦工程学院也是女学生比例最高的学院之一，几乎占工程学院入学人数的三分之一。维拉诺瓦原子层沉积（ALD）设施将作为合作纳米材料研究和开发的中心，连接费城地区三所学院和大学的五名教师。合作的教师一直在使用宾夕法尼亚大学现有的第一代ALD设备，但维拉诺瓦大学的三位教师在外部资助的薄膜纳米材料开发研究活动中的扩张和增长，导致了与宾夕法尼亚大学设施协调和时间上的困难。维拉诺瓦的设施将大大提高教师和学生的访问，并允许整个团队大大扩大他们的协作工作。Villanova工厂将采用具有显著升级功能的ALD系统。该系统速度更快，具有改进的批处理操作，允许更大工作量的调度，并具有热沉积和等离子沉积的能力。等离子沉积技术的增加具有更高的精度和沉积过程的控制，从而显着提高薄膜质量。等离子沉积过程的特点是增强了薄膜的成核和生长，导致更高的均匀性和薄膜密度。等离子体工艺还可以沉积更多种类的薄膜材料，从而实现关键的新研究领域。

Proposal: 1428500PI: Fleischer, Amy S.Title: MRI: Acquisition of Atomic Layer Deposition Device for Nanoscale Materials Development ResearchSignificanceThe new capabilities of the instrument will create an immediate and lasting impact on their ability to recruit high-quality faculty members. As Villanova hires its next generation of faculty members, it will be offer access to leading-edge equipment. The emphasis on nanomaterials fabrication and development necessitates the upgrading of their experimental facilities to attract leading researchers and educators who can make an immediate impact as they join this dynamic group. The PI and co-PIs are all dedicated to improving opportunities and access for under-represented minorities in engineering and the sciences and two of the principals on this grant are female STEM faculty members. The five PIs combined are advising 16 graduate students, 7 of whom are women, and are working with 19 undergraduate students, including 5 women. Bryn Mawr College was established in 1885 as the first institution in the US to offer Ph.D. degrees to women and the undergraduate program remains all-female, featuring 1300 women, 26% of whom are majoring in math or science. The Villanova College of Engineering also features one of the highest percentages of female students studying engineering, at almost 1/3 of the engineering school enrollment.Technical DescriptionThe Villanova Atomic Layer Deposition (ALD) facility will serve as a center for collaborative nanomaterials research and development linking five faculty at three Philadelphia-region colleges and universities. The collaborating faculty have been using an existing first generation ALD device at the University of Pennsylvania, but the expansion and growth in externally funded thin film nanomaterials development research activity by the three Villanova faculty has led to difficulties in coordination and timing with the Penn facilities. The Villanova facility will greatly enhance faculty and student access and allow the overall team to greatly expand their collaborative work. The Villanova facility will feature an ALD system with significantly upgraded capabilities. The system will be faster and feature improved batch operation, allowing the scheduling of a greater volume of work, and feature the ability to do both thermal and plasma deposition. The addition of plasma deposition technology features greater precision and control of the deposition process leading to significantly higher film quality. The plasma deposition process features enhanced nucleation and growth of the films, leading to greater homogeneity and film density. The plasma process also enables the deposition of a much wider variety of thin film materials enabling critical new research areas.