MRI: Acquisition of Atomic Layer Deposition Device for Nanoscale Materials Development Research

提议：1428500PI：Fleischer，Amy S.Title：MRI：收购原子层沉积设备用于纳米材料开发研究意义该仪器的新功能将对他们招聘高素质教职员工的能力产生直接和持久的影响。随着维拉诺瓦招聘下一代教职员工，它将提供获得尖端设备的机会。对纳米材料制造和开发的重视需要升级他们的实验设施，以吸引领先的研究人员和教育工作者，他们一旦加入这个充满活力的群体，就能立即产生影响。私人投资机构和共同投资机构都致力于改善在工程和科学领域中代表性不足的少数群体的机会和机会，这笔赠款的两名校长是STEM的女教员。这五个PI总共为16名研究生提供咨询，其中7名是女性，并与19名本科生合作，其中包括5名女性。布林莫尔学院成立于1885年，是美国第一所向女性提供博士学位的机构，本科课程仍然是全女性的，有1300名女性，其中26%是数学或科学专业的学生。维拉诺瓦工程学院也是学习工程学的女生比例最高的学院之一，几乎占工程学院招生人数的三分之一。技术描述维拉诺瓦原子层沉积(ALD)设施将作为一个合作纳米材料研究和开发中心，连接费城地区三所学院和大学的五名教员。合作教员一直在使用宾夕法尼亚大学现有的第一代ALD设备，但三名维拉诺瓦教员在外部资助的薄膜纳米材料开发研究活动的扩大和增长导致了与宾夕法尼亚大学设施的协调和时间安排方面的困难。维拉诺瓦的设施将大大加强教职员工和学生的接触，并允许整个团队极大地扩大他们的协作工作。维拉诺瓦工厂将配备ALD系统，并大幅升级能力。该系统将更快，并具有改进的批处理操作，允许调度更大的工作量，并具有进行热沉积和等离子沉积的能力。等离子沉积技术的加入具有更高的精度和对沉积过程的控制，从而显著提高了薄膜质量。等离子体沉积工艺的特点是增强了薄膜的成核和生长，导致了更大的均匀性和薄膜密度。等离子工艺还可以沉积更多种类的薄膜材料，使关键的新研究领域成为可能。

Proposal: 1428500PI: Fleischer, Amy S.Title: MRI: Acquisition of Atomic Layer Deposition Device for Nanoscale Materials Development ResearchSignificanceThe new capabilities of the instrument will create an immediate and lasting impact on their ability to recruit high-quality faculty members. As Villanova hires its next generation of faculty members, it will be offer access to leading-edge equipment. The emphasis on nanomaterials fabrication and development necessitates the upgrading of their experimental facilities to attract leading researchers and educators who can make an immediate impact as they join this dynamic group. The PI and co-PIs are all dedicated to improving opportunities and access for under-represented minorities in engineering and the sciences and two of the principals on this grant are female STEM faculty members. The five PIs combined are advising 16 graduate students, 7 of whom are women, and are working with 19 undergraduate students, including 5 women. Bryn Mawr College was established in 1885 as the first institution in the US to offer Ph.D. degrees to women and the undergraduate program remains all-female, featuring 1300 women, 26% of whom are majoring in math or science. The Villanova College of Engineering also features one of the highest percentages of female students studying engineering, at almost 1/3 of the engineering school enrollment.Technical DescriptionThe Villanova Atomic Layer Deposition (ALD) facility will serve as a center for collaborative nanomaterials research and development linking five faculty at three Philadelphia-region colleges and universities. The collaborating faculty have been using an existing first generation ALD device at the University of Pennsylvania, but the expansion and growth in externally funded thin film nanomaterials development research activity by the three Villanova faculty has led to difficulties in coordination and timing with the Penn facilities. The Villanova facility will greatly enhance faculty and student access and allow the overall team to greatly expand their collaborative work. The Villanova facility will feature an ALD system with significantly upgraded capabilities. The system will be faster and feature improved batch operation, allowing the scheduling of a greater volume of work, and feature the ability to do both thermal and plasma deposition. The addition of plasma deposition technology features greater precision and control of the deposition process leading to significantly higher film quality. The plasma deposition process features enhanced nucleation and growth of the films, leading to greater homogeneity and film density. The plasma process also enables the deposition of a much wider variety of thin film materials enabling critical new research areas.