I-Corps: Large-Area 'eta6-Functionalized' Graphene Sheets with Preserved Lattice for Semiconductor Applications and Industry

家庭、智能手机、电子设备和车辆都配备了各种传感器来检测温度、湿度、压力、空气质量、医疗诊断、触摸、光线、水位、热表面和氧气水平。一个具有多功能性的高成本效益，高灵敏度的平台，以纳入不同的系统，以感知不同的刺激是重要的。这个I-Corps团队用功能化的单原子厚度石墨烯构建了一种具有成本效益的高灵敏度传感元件，可用于生产各种各样的传感器。此外，该团队还开发了一种通过相同机制生产基于石墨烯的高频电子器件的工艺。预计该技术将对传感器和半导体行业产生重大的经济影响。石墨烯是一种超灵敏、超薄的衬底，具有检测单个分子的能力。为了将这种特性整合到工作传感器中，石墨烯的功能化是很重要的。然而，这是一个主要的挑战，因为为了保持石墨烯优越的电子特性，其功能化必须保持其平面晶格（高迁移率）和碳的sp2杂化态（高载流子密度）。为了实现这些目标，I-Corps团队开发了一个传感器基地，其中？{石墨烯共轭体系被功能化，同时保留其晶格完整性和优越的灵敏度。此外，该小组还开发了一种直接在电介质衬底上生长石墨烯的工艺。功能化石墨烯将受益于增强的特异性，并将促进栅极氧化物的原子层沉积（目前是制造高速场效应晶体管的主要挑战）。

Homes, smartphones, electronic devices and vehicles are equipped with a variety of sensors to detect temperature, humidity, pressure, air-quality, medical diagnostics, touch, light, water-level, hot-surface, and oxygen levels. A cost-effective, highly sensitive platform with versatility to be incorporated into diverse systems for sensing different stimuli is important. This I-Corps team has built a cost-effective, high-sensitivity sensing-element with functionalized single-atom-thick graphene, which can be applied to produce a wide variety of sensors. Further, the team also developed a process to produce graphene based high frequency electronic devices via the same mechanism. The technology is expected to have a significant economic impact in the sensors and semiconductors industries. Graphene is an ultrasensitive, ultrathin substrate with the ability to detect a single molecule. To incorporate this property into working sensors, the graphene functionalization is important. However, this is a major challenge since to preserve the superior electronic properties of graphene, its functionalization must retain its planar lattice (for high mobility) and its carbons' sp2 hybridized state (for high carrier density). To achieve these goals, the I-Corps team has developed a sensor base where the ?à?{conjugated system of graphene is functionalized, while retaining its lattice integrity and superior sensitivity. Further, the group has developed a process to grow graphene directly on a dielectric substrate. Functionalized graphene will benefit from enhanced specificity and will facilitate atomic layer deposition of gate-oxide (currently a major challenge) for fabrication of high speed field effect transistors.