Improving Limited Angle x-ray computed Tomography by Optical data integration - ILATO

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X-ray computed tomography (CT) offers a non-destructive method for the imaging, inspection and metrology of interior and exterior structures of a specimen. In classical cone-beam CT, the specimen is rotated by 360° in small angle steps in the cone-shaped beam of an X-ray tube. For each angular step, an X-ray absorption image of the specimen is recorded by an X-ray detector aligned with the X-ray source and the rotation table. For specimens deviating substantially from circular symmetry, at a set of rotation angles, the intensity of the transmitted X-ray radiation is often insufficient or the specimen does not fit inside the cone beam. Furthermore, for these samples, the achievable spatial resolution is low, because the specimen has to be moved at a large distance from the X-ray source. Therefore, modified scan procedures under the name “limited angle CT” have been suggested, where only a limited number of projections is recorded. Due to the limited information, the accuracy of the measurement varies significantly over the specimen.