SusCheM: Directed Covalent Assembly of Nanodiamonds into Films for MEMS Applications

SusCheM：将纳米金刚石定向共价组装成用于 MEMS 应用的薄膜

• 批准号: 1636289
• 负责人: Adarsh Radadia
• 金额: $ 34.34万
• 依托单位: Louisiana Tech University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2016
• 资助国家: 美国
• 起止时间: 2016-08-01 至 2021-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1636289&HistoricalAwards=false
• 关键词: SusCheM; Directed; Covalent; Assembly; Nanodiamonds

Diamond thin films play an important role in many established and emerging areas of technology including manufacturing tools, protective coatings, and high power electronics due to their increased resistance to wear, chemical stability, low coefficient of friction, low coefficient of thermal expansion, wide optical transparency, biocompatibility, and tunable conductivity. For similar reasons, diamond thin films have also started attracting attention from researchers for use in microelectromechanical systems (MEMS) such as sensors and actuators. However, besides performance the scalability, sustainability, and cost of these films are also factors that influence their viability for widespread use. This award supports fundamental research to provide needed knowledge for the development of a novel diamond film growth process that: (1) can be performed virtually on any substrate, including metals, oxides, and plastics, (2) is economical due to low cost and ready availability of the raw material, (3) poses lower health hazards and is environmentally safe, and (4) can be integrated with standard semiconductor technology. Such low cost, scalable diamond films with tailorable physical properties will enable broad impact in energy, manufacturing, healthcare, sensors, electronics, and other important applications, thus providing a positive impact on the U.S. economy and society. In addition, this multi-disciplinary approach involving research in chemistry, materials science, manufacturing, and engineering will provide a significant impact on broadening participation of minorities in research, and incorporating nanomaterial manufacturing concepts in K-12 curriculum.The concept of directed covalent assembly of nanodiamonds using versatile, room-temperature chemistry to form conformal and compact films will pave the way to a novel class of sustainable coatings for MEMS. The full application potential of covalently assembled nanodiamond films can be achieved by overcoming the scientific barrier of tuning its physical properties (mechanical, thermal, and optical) which are directly linked to the level and distribution of porosity in the film micro-/nanostructure. This research seeks to fill the knowledge gap on the mechanism(s) of porosity reduction through precise control over nanodiamond aggregate size during film fabrication as well as post-fabrication anneal. The research team will characterize porosity distribution and the associated physical properties using state-of-the-art materials characterization methods. Further, microfabricated devices will be made with the nanodiamond films as a vehicle to demonstrate its integration into MEMS, to facilitate quantification of physical properties such in-plane and cross-plane thermal conductivity, and to correlate these findings to the nanodiamond aggregate sizes used during the direct covalent assembly process.

金刚石薄膜在许多成熟和新兴的技术领域中发挥着重要作用，包括制造工具，保护涂层和高功率电子器件，因为它们具有更高的耐磨性，化学稳定性，低摩擦系数，低热膨胀系数，宽光学透明度，生物相容性和可调导电性。出于类似的原因，金刚石薄膜也开始引起研究人员的注意，用于微机电系统（MEMS），如传感器和执行器。然而，除了性能之外，这些膜的可扩展性、可持续性和成本也是影响其广泛使用的可行性的因素。该奖项支持基础研究，为开发新型金刚石薄膜生长工艺提供所需的知识，该工艺：（1）实际上可以在包括金属、氧化物和塑料的任何基底上进行，（2）由于原料的低成本和容易获得而经济，（3）造成较低的健康危害并且是环境安全的，以及（4）可以与标准半导体技术集成。这种具有可定制物理特性的低成本、可扩展金刚石薄膜将在能源、制造、医疗保健、传感器、电子和其他重要应用中产生广泛影响，从而对美国经济和社会产生积极影响。此外，这种涉及化学，材料科学，制造和工程研究的多学科方法将对扩大少数民族参与研究产生重大影响，并将纳米材料制造概念纳入K-12课程。室温化学形成保形和致密的薄膜将为MEMS的新型可持续涂层铺平道路。共价组装的纳米金刚石膜的全部应用潜力可以通过克服调整其物理性质（机械、热和光学）的科学障碍来实现，这些物理性质与膜微/纳米结构中的孔隙率的水平和分布直接相关。这项研究旨在填补知识空白的机制（S）的孔隙率降低，通过精确控制纳米金刚石聚集体的大小在薄膜制造过程中，以及制造后退火。研究团队将使用最先进的材料表征方法来表征孔隙率分布和相关的物理特性。此外，将用纳米金刚石膜作为载体来制造微制造装置，以证明其集成到MEMS中，以便于量化物理性质如平面内和跨平面热导率，并将这些发现与直接共价组装过程中使用的纳米金刚石聚集体尺寸相关联。

项目成果

Directed covalent assembly of nanodiamonds into thin films

• DOI: 10.1016/j.diamond.2019.107605
• 发表时间: 2020-01-01
• 期刊: DIAMOND AND RELATED MATERIALS
• 影响因子: 4.1
• 作者: Patoary, Naim H.;Rai, Amit;Radadia, Adarsh D.
• 通讯作者: Radadia, Adarsh D.

Superior, processing-dependent thermal conductivity of cellulose Nanocrystal-Poly(vinyl alcohol) composite films

• DOI: 10.1016/j.polymer.2019.01.006
• 发表时间: 2019-02-15
• 期刊: POLYMER
• 影响因子: 4.6
• 作者: Chowdhury, Reaz A.;Rai, Amit;Youngblood, Jeffrey P.
• 通讯作者: Youngblood, Jeffrey P.

Effect of pH variation and annealing on covalently assembled nanodiamond films

• DOI: 10.1016/j.apsusc.2021.150585
• 发表时间: 2021-07-16
• 期刊: APPLIED SURFACE SCIENCE
• 影响因子: 6.7
• 作者: Desai, Tithi;Patoary, Naim H.;Radadia, Adarsh D.
• 通讯作者: Radadia, Adarsh D.