Integrating Environmentally Improved Photolithography Technology and Virtual Reality into Advanced Nanotechnology Education

将环保光刻技术和虚拟现实融入先进纳米技术教育

• 批准号: 1700695
• 负责人: Paul Weber
• 金额: $ 70.39万
• 依托单位: Utah Valley University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-06-01 至 2022-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1700695&HistoricalAwards=false
• 关键词: Integrating; Environmentally; Improved; Photolithography; Technology

Advances in nanotechnology have significantly influenced manufacturing methods, the development of new systems and devices as well as the future of science, engineering, and technology in the nation. Nanoscience is critical to many high-technology and manufacturing industries in Utah, and the state is faced with a rising need for skilled workers in this field. In response to the urgent workforce need in local industries, Utah Valley University (UVU) will develop curricula to train students in nanotechnology principles. A nanotechnology course and associated modules will be developed for community college students and other introductory-level undergraduate students. The course will include design projects and laboratories using innovative environmentally-friendly fabrication techniques. Advanced virtual-reality game techniques will be used to promote students' understanding and visualization of the underlying physics concepts and the methods used to build very small-scale structures. The new course will also serve as a springboard for students intending to pursue advanced degrees in nanotechnology. The project will enhance the preparation of students, increase the number of skilled technicians, and help strengthen the regional workforce.This project will implement an introductory nanotechnology course that aligns with rapidly changing industry requirements, develop new tools for nanotechnology education, and complement existing associate and bachelor degree programs at UVU. The course will include a series of modules and projects, as well as laboratories that feature a novel water-based technique for photolithography which avoids the hazardous solvents of conventional methods. This improved method for photolithographic fabrication will contribute a potentially transformative methodology for both education and industry, and contribute to the knowledge base about the effectiveness of virtual learning environments in education. The laboratory experience also includes thin film fabrication using auto-catalytic metallization, and scanning electron microscopy for both characterization and electron beam lithography. Virtual-reality learning modules with high-fidelity simulation of various experimental methods and processes will also be incorporated into the course. These virtual-reality techniques will allow students the opportunity to learn from their mistakes without the disadvantage of depleting resources or trying to assemble flawed designs in the laboratory. The virtual-reality modules will also provide an effective alternative in circumstances where advanced equipment may not be available. The format of this nanotechnology course will facilitate adoption and adaptation at other institutions. The resources and practices from the project will be shared through a project website and through professional development workshops for educators. Summer programs for high school students, with an emphasis on groups underrepresented in STEM fields, will incorporate virtual-reality educational games and simplified lab experiments from the course to expose and engage students in nanotechnology.

纳米技术的进步对制造方法、新系统和设备的发展以及国家科学、工程和技术的未来产生了重大影响。纳米科学对犹他州的许多高科技和制造业至关重要，该州正面临着对该领域熟练工人的日益增长的需求。为了满足当地工业对劳动力的迫切需求，犹他州山谷大学（UVU）将开发课程，对学生进行纳米技术原理的培训。将为社区学院学生和其他入门级本科生开发纳米技术课程和相关模块。该课程将包括使用创新的环保制造技术的设计项目和实验室。先进的虚拟现实游戏技术将用于促进学生对基本物理概念的理解和可视化，以及用于构建非常小规模结构的方法。新课程也将作为学生打算追求在纳米技术的高级学位的跳板。该项目将加强学生的准备，增加熟练技术人员的数量，并帮助加强区域劳动力。该项目将实施一个介绍性的纳米技术课程，与快速变化的行业需求保持一致，开发纳米技术教育的新工具，并补充现有的副学士和学士学位课程。该课程将包括一系列的模块和项目，以及具有新颖的水基光刻技术的实验室，避免了传统方法的有害溶剂。这种改进的方法，为电子制造将有助于一个潜在的变革性的方法，为教育和工业，并有助于知识基础的有效性，虚拟学习环境在教育。实验室的经验还包括薄膜制造使用自催化金属化，和扫描电子显微镜的表征和电子束光刻。虚拟现实学习模块与高保真模拟各种实验方法和过程也将纳入课程。这些虚拟现实技术将使学生有机会从错误中学习，而不会消耗资源或试图在实验室中组装有缺陷的设计。虚拟现实模块还将在可能无法获得先进设备的情况下提供有效的替代方案。这种纳米技术课程的形式将促进其他机构的采用和适应。该项目的资源和做法将通过一个项目网站和教育工作者专业发展讲习班进行分享。针对高中生的暑期课程，重点是在STEM领域代表性不足的群体，将结合虚拟现实教育游戏和课程中的简化实验室实验，让学生接触和参与纳米技术。

项目成果

Virtual Reality to Improve Nanotechnology Education: Development Methods and Example Applications

虚拟现实改善纳米技术教育：开发方法和示例应用

• DOI: 10.1109/mnano.2020.2994802
• 发表时间: 2020
• 期刊: IEEE Nanotechnology Magazine
• 影响因子: 1.6
• 作者: Kamali-Sarvestani, Reza;Weber, Paul;Clayton, Marty;Meyers, Mathew;Slade, Skye
• 通讯作者: Slade, Skye