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PFI:AIR - TT: Lateral Field Excited Acoustic Wave Sensor for Monitoring Thin Film Properties in Solid State Devices

PFI:AIR - TT：横向场激励声波传感器，用于监测固态器件中的薄膜特性

基本信息

批准号：
1701087
负责人：
John Vetelino
金额：
$ 20万
依托单位：
University of Maine
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2017
资助国家：
美国
起止时间：
2017-06-15 至 2020-12-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=1701087&HistoricalAwards=false
关键词：
PFI AIR TT Lateral Field

项目摘要

This PFI: AIR Technology project focuses on translating research in lateral field excited (LFE) acoustic wave devices to fill the continuing need for improved methods of process monitoring and device metrology for manufacturing processes involving thin-film deposition. A wide range of electronic, microwave, and optical devices that use these thin films are commonplace in existing and future computers, automobiles, mobile communication systems (cell phones), etc. The capability of accurately monitoring thin film properties such as film thickness, mass, viscosity, electrical conductivity and permittivity during film deposition will improve the performance of consumer electronics that depend on these devices. The features associated with the LFE monitor will provide higher sensitivity when compared to the leading competing technology, the Quartz Crystal Microbalance (QCM) in this market space, and allow electrical conductivity and permittivity monitoring which are not possible with QCM.The lateral field excited acoustic wave sensor under development is targeted for industrial factories and research laboratories which fabricate solid state electronic, microwave and optical devices that employ thin films critical to the device performance. In contrast to the commonly used QCM, the LFE device will allow the accurate and sensitive in situ monitoring of both mechanical (mass, film thicknesses and viscosity) and/or electrical (conductivity and permittivity) film properties. However, before this technology can be transitioned to a viable commercial product, two technology gaps have to be filled. First, the LFE device admittance response needs to be improved. Although the current LFE response is adequate for implementation in laboratory instrumentation, a larger change in admittance magnitude and phase is needed to realize a commercial sensor. The second gap involves the design and testing of an oscillator circuit in which the LFE device is a feedback element. In this configuration, the change in oscillator frequency becomes a direct measure of the change in film mechanical and/or electrical properties. University of Maine (UM) faculty in Electrical Engineering and Business Entrepreneurship and Fil-Tech engineers will advise undergraduates and graduate MS and PhD students in acoustic wave technology and/or business entrepreneurship necessary to realize a laboratory prototype that can be transitioned into a commercial product. In order to prepare the LFE sensor for technology transfer and commercialization, the UM Department of Industrial Cooperation will work with Fil-Tech, Inc. to develop intellectual property licensing. The project engages Fil-Tech Inc. to provide customized quartz samples and guidance critical in transitioning this technology to a viable commercial product.

该PFI：AIR技术项目的重点是横向场激励（LFE）声波器件的转化研究，以满足对涉及薄膜沉积的制造工艺的工艺监控和器件计量方法改进的持续需求。使用这些薄膜的各种电子、微波和光学器件在现有和未来的计算机、汽车、移动的通信系统（蜂窝电话）等中是常见的。在膜沉积期间精确监测薄膜特性（例如膜厚度、质量、粘度、电导率和介电常数）的能力将改善依赖于这些器件的消费电子产品的性能。与LFE监测器相关的功能将提供更高的灵敏度，与领先的竞争技术相比，石英晶体微量天平（QCM）在这个市场空间，并允许电导率和介电常数监测，这是不可能的QCM。正在开发的横向场激发声波传感器是针对工业工厂和研究实验室，制造固态电子，微波和光学器件，采用对器件性能至关重要的薄膜。与常用的QCM相比，LFE设备将允许对机械（质量、膜厚度和粘度）和/或电（电导率和介电常数）膜特性进行准确和灵敏的原位监测。然而，在将这项技术转化为可行的商业产品之前，必须填补两个技术空白。首先，LFE器件导纳响应需要改进。虽然当前LFE响应足以在实验室仪器中实现，但需要导纳幅度和相位的较大变化来实现商业传感器。第二个差距涉及振荡器电路的设计和测试，其中LFE器件是反馈元件。在这种配置中，振荡器频率的变化成为膜机械和/或电性能变化的直接量度。缅因州大学（UM）电气工程和商业创业学院和Fil-Tech工程师将为本科生和研究生MS和博士生提供声波技术和/或商业创业方面的建议，以实现可以过渡到商业产品的实验室原型。为了准备LFE传感器的技术转让和商业化，工业合作的UM部门将与Fil-Tech公司合作。发展知识产权许可。该项目由Fil-Tech Inc.提供定制的石英样品和指导，这对于将该技术转化为可行的商业产品至关重要。