DCL:HBCU:EAGER: Development of Wafer-Scale Fabrication of Carbon-Based Integrated Electronic Devices

DCL:HBCU:EAGER：碳基集成电子器件晶圆级制造的发展

• 批准号: 1740687
• 负责人: Zhigang Xiao
• 金额: $ 30万
• 依托单位: Alabama A&M University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2017
• 资助国家: 美国
• 起止时间: 2017-08-01 至 2021-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1740687&HistoricalAwards=false
• 关键词: DCL; HBCU; EAGER; Development; Wafer

DCL:HBCU:EAGER: Development of Wafer-Scale Fabrication of Carbon-Based Integrated Electronic DevicesXiao, ZhigangCarbon nanotubes and graphene are promising electronic nanomaterials and could be used for the application of future electronics because of their superior electrical property. In this project, devices using carbon nanotubes will be made with enhanced electrical properties. The innovative research will result in streamlining and enhancing current manufacturing processes for these devices. This will enable the development of improved integrated circuits and devices for electronics. Semiconductor devices represent a multi-trillion dollar industry. The novel devices developed through this project could contribute to the rapidly growing industries of semiconductor and nano-manufacturing. Thus, if successful, this project could have great impacts on US and global societies, and provide many societal benefits. The primary educational goal of this proposal is to integrate the research objectives to enhance the educational experiences of students. Graduate and undergraduate students will be mentored to perform research in nanofabrication in the project. The proposed project will also offer summer research opportunities for high school students. It will significantly increase opportunities for minority students to perform research and to be trained in nanotechnologyThe objective of this research is to develop wafer-scale fabrication of carbon-based integrated electronic devices. A major problem in the realization of carbon nanotube devices is the difficulty to position and assemble carbon nanotubes in a controlled way. In this Early Grant for Exploratory Research (EAGER) project, an unconventional approach, based on the electric field directed dielectrophoresis method is used to deposit and align ultra-dense carbon nanotubes. The poor yield of functional devices is another major problem, because currently there is no effective way to separate the metallic carbon nanotubes from the semiconducting tubes, and the metallic tubes unavoidably exist in fabricated transistors, resulting in poor electrical properties. In this project, semiconductor materials are proposed to replace metals as the source/drain contacts for solving the problem of poor yield. Another major research effort in this project is to use electrical fields together with nanoscale electrodes to grow nanostructured carbon thin films and graphene using the e-beam/thermal evaporation. The proposed approach could achieve the wafer-scale fabrication of graphene devices. Intellectual Merit: This project is potentially transformative, and could create a new wafer-scale carbon-based device fabrication paradigm. It will greatly benefit the research community and semiconductor industry by providing new approaches for the fabrication of carbon integrated devices. The innovative dielectrophoresis method could effectively align and deposit ultra-dense carbon nanotubes while the semiconductor contact could greatly improve the electrical properties of fabricated devices, significantly increasing the yield of functional devices. The electrical field-directed innovative growth of nanostructured carbon thin films and graphene, while untested, is novel and unexplored, and could lead to wafter-scale fabrication of graphene devices. This EAGER project could lead to the realization of wafer-scale fabrication of carbon nanotube and graphene integrated devices for the application of future nanoelectronics.

碳基集成电子器件晶圆级制造技术的发展碳纳米管和石墨烯由于其优异的电学性能，在未来的电子领域具有广阔的应用前景。在这个项目中，使用碳纳米管的设备将具有增强的电性能。这项创新研究将简化和增强这些设备的当前制造过程。这将使改进的集成电路和电子器件的发展成为可能。半导体设备代表着一个价值数万亿美元的产业。通过该项目开发的新型器件可以为快速发展的半导体和纳米制造产业做出贡献。因此，如果成功，该项目将对美国和全球社会产生巨大影响，并提供许多社会效益。本提案的主要教育目标是整合研究目标，以提升学生的教育体验。该项目将指导研究生和本科生进行纳米制造方面的研究。该计划还将为高中生提供暑期研究机会。它将大大增加少数民族学生进行纳米技术研究和培训的机会。这项研究的目标是开发碳基集成电子器件的晶圆级制造。实现碳纳米管器件的一个主要问题是碳纳米管的可控定位和组装困难。在这个早期探索性研究（EAGER）项目中，采用了一种非常规的方法，基于电场定向电介质电泳方法来沉积和排列超致密碳纳米管。功能器件的成品率差是另一个主要问题，因为目前没有有效的方法将金属碳纳米管与半导体管分离，而金属碳纳米管不可避免地存在于制造的晶体管中，导致电性能差。本课题提出用半导体材料代替金属作为源漏触点，以解决良率差的问题。该项目的另一项主要研究工作是利用电场和纳米级电极，利用电子束/热蒸发来生长纳米结构的碳薄膜和石墨烯。该方法可以实现石墨烯器件的晶圆级制造。知识价值：该项目具有潜在的变革性，可以创造一种新的晶圆级碳基设备制造范式。它为碳集成器件的制造提供了新的方法，将极大地造福于研究界和半导体行业。创新的介质电泳方法可以有效地排列和沉积超致密碳纳米管，而半导体接触可以大大改善所制器件的电学性能，显着提高功能器件的成品率。电场导向的纳米结构碳薄膜和石墨烯的创新生长虽然未经测试，但却是新颖和未开发的，并且可能导致石墨烯器件的水尺度制造。这个EAGER项目可以实现碳纳米管和石墨烯集成器件的晶圆级制造，用于未来的纳米电子学应用。

项目成果

Atomic Layer Deposition of Nanolayered Carbon Films

• DOI: 10.3390/c7040067
• 发表时间: 2021-09
• 期刊: C
• 作者: Zhigang Xiao;K. Kisslinger;Rebhadevi Monikandan

Fabrication of field-effect transistors with transfer-free nanostructured carbon as the semiconducting channel material

• DOI: 10.1088/1361-6528/abb04a
• 发表时间: 2020-11-27
• 期刊: NANOTECHNOLOGY
• 影响因子: 3.5
• 作者: Xiao, Zhigang;Williams, Lauren;Camino, Fernando
• 通讯作者: Camino, Fernando

Comparison of Hafnium Dioxide and Zirconium Dioxide Grown by Plasma-Enhanced Atomic Layer Deposition for the Application of Electronic Materials

• DOI: 10.3390/cryst10020136
• 发表时间: 2020-02
• 期刊: Crystals
• 影响因子: 2.7
• 作者: Zhigang Xiao;K. Kisslinger;S. Chance;S. Banks