MRI: Acquisition of an Advanced E-Beam Evaporation Thin Film Deposition System for Research in Micro and Nanofabrication

这项研究的目标是获得最先进的电子束蒸发薄膜沉积系统，使阿拉巴马a&m大学的研究人员能够制造微纳米级设备。该方法是将薄膜沉积能力与最先进的UV和电子束光刻工具相结合，以扩大微米和纳米级器件制造的研究工作。智力优势：阿拉巴马a&m大学的多个研究项目需要先进的薄膜沉积能力。引进先进的沉积仪器将使这些项目顺利完成。研究项目包括碳纳米管场效应晶体管和逻辑电路、热电器件、移相器和纳米天线、金属-绝缘体-半导体结构、纳米结构太阳能电池、单晶硅氧化锡纳米线以及Co/Cu的磁性能。研究成果将极大地造福于研究界。更广泛的影响：电子束系统的收购将大大增加研究生和本科生的教育机会。使用最先进的仪器为大多数代表性不足的学生提供了必要的培训，这些学生将成为明天？美国政府、学术界和工业界的研究人员。通过研究项目，本科生将接触到纳米制造令人兴奋和丰富的可能性。高中教师和学生将接受有关乐器的培训。该仪器将加强研究人员与当地工业界之间的合作。该项目将进一步促进地方和国家经济的发展，并为会议做出贡献。加强国民教育、科研和经济发展的目标。

The objective of this research is to acquire a state-of-the-art e-beam evaporation thin-film deposition system to enable researchers at the Alabama A&M University to fabricate the micro- and nanoscale devices. The approach is to combine the thin-film deposition capability with the state-of-the-art UV and e-beam lithography tools to enable expanded research efforts in the fabrication of micro- and nanoscale devices. Intellectual Merit: Multiple research projects at Alabama A&M University require an advanced thin film deposition capability. The acquisition of the advanced deposition instrument will make these projects to be completed successfully. The research projects include carbon nanotube field-effect transistors and logic circuits, thermoelectric devices, phase shifter and nano antennas, metal-insulator-semiconductor structures, nanostructured solar cells, single crsytalline tin oxide nanowires, and magnetic properties of Co/Cu. The research accomplishments will greatly benefit the research community.Broader Impact: Acquisition of the e-beam system will greatly enhance educational opportunities for both graduate and undergraduate students. The use of the state-of-the-art instrument provides essential training to the majority underrepresented students who will become tomorrow?s researchers in government, academia, and industries. Undergraduates will be exposed to the exciting and rich possibilities of nanofabrication through the research projects. High school teachers and students will be trained on the instrument. Collaboration between the researchers and local industrials will be enhanced by the instrument. This project will further promote the development of local and national economy, and contribute to meeting the Congress? goals for enhancing national education, research, and economy.