MRI: Acquisition of an Advanced E-Beam Evaporation Thin Film Deposition System for Research in Micro and Nanofabrication

MRI:购买先进的电子束蒸发薄膜沉积系统用于微纳加工研究

基本信息

  • 批准号:
    1229312
  • 负责人:
  • 金额:
    $ 21.24万
  • 依托单位:
  • 依托单位国家:
    美国
  • 项目类别:
    Standard Grant
  • 财政年份:
    2012
  • 资助国家:
    美国
  • 起止时间:
    2012-09-01 至 2014-08-31
  • 项目状态:
    已结题

项目摘要

The objective of this research is to acquire a state-of-the-art e-beam evaporation thin-film deposition system to enable researchers at the Alabama A&M University to fabricate the micro- and nanoscale devices. The approach is to combine the thin-film deposition capability with the state-of-the-art UV and e-beam lithography tools to enable expanded research efforts in the fabrication of micro- and nanoscale devices. Intellectual Merit: Multiple research projects at Alabama A&M University require an advanced thin film deposition capability. The acquisition of the advanced deposition instrument will make these projects to be completed successfully. The research projects include carbon nanotube field-effect transistors and logic circuits, thermoelectric devices, phase shifter and nano antennas, metal-insulator-semiconductor structures, nanostructured solar cells, single crsytalline tin oxide nanowires, and magnetic properties of Co/Cu. The research accomplishments will greatly benefit the research community.Broader Impact: Acquisition of the e-beam system will greatly enhance educational opportunities for both graduate and undergraduate students. The use of the state-of-the-art instrument provides essential training to the majority underrepresented students who will become tomorrow?s researchers in government, academia, and industries. Undergraduates will be exposed to the exciting and rich possibilities of nanofabrication through the research projects. High school teachers and students will be trained on the instrument. Collaboration between the researchers and local industrials will be enhanced by the instrument. This project will further promote the development of local and national economy, and contribute to meeting the Congress? goals for enhancing national education, research, and economy.
这项研究的目的是获得一个国家的最先进的电子束蒸发薄膜沉积系统,使研究人员在亚拉巴马A M大学制造的微米和纳米器件。该方法是联合收割机的薄膜沉积能力与国家的最先进的紫外线和电子束光刻工具,使扩大的研究工作,在制造微米和纳米器件。智力优势:亚拉巴马A M大学的多个研究项目需要先进的薄膜沉积能力。先进的沉积仪器的购置将使这些项目得以顺利完成。研究项目包括碳纳米管场效应晶体管和逻辑电路、热电器件、移相器和纳米天线、金属-绝缘体-半导体结构、纳米结构太阳能电池、单晶氧化锡纳米线、Co/Cu磁性等。更广泛的影响:电子束系统的获得将大大增加研究生和本科生的教育机会。国家的最先进的仪器的使用提供了必要的培训,以大多数代表性不足的学生谁将成为明天?在政府,学术界和工业界的研究人员。本科生将通过研究项目接触到纳米纤维的令人兴奋和丰富的可能性。高中教师和学生将接受该仪器的培训。该仪器将加强研究人员和当地工业界之间的合作。该项目将进一步促进地方和国家经济的发展,并有助于满足大会?加强国家教育、研究和经济的目标。

项目成果

期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

数据更新时间:{{ journalArticles.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ monograph.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ sciAawards.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ conferencePapers.updateTime }}

{{ item.title }}
  • 作者:
    {{ item.author }}

数据更新时间:{{ patent.updateTime }}

Zhigang Xiao其他文献

High-moisture extrusion of rice bran-peanut proteins: Changes in structural properties and antioxidant activity simulating gastrointestinal digestion
米糠-花生蛋白的高水分挤压:模拟胃肠消化过程中结构特性和抗氧化活性的变化
Fatigue performance of CFRP-strengthened steel pipes with semi-elliptical surface cracks
带有半椭圆形表面裂纹的碳纤维增强塑料加固钢管的疲劳性能
  • DOI:
    10.1016/j.engstruct.2025.120774
  • 发表时间:
    2025-10-01
  • 期刊:
  • 影响因子:
    6.400
  • 作者:
    Tao Chen;Zhuxuan Li;Xiang-Lin Gu;Zhigang Xiao;Wensu Chen;Haoran Zuo
  • 通讯作者:
    Haoran Zuo
Impact of immobilization technology in industrial and pharmaceutical applications
  • DOI:
    10.1007/s13205-019-1969-0
  • 发表时间:
    2019-11-08
  • 期刊:
  • 影响因子:
    2.900
  • 作者:
    Mohamed E. Hassan;Qingyu Yang;Zhigang Xiao;Lu Liu;Na Wang;Xiaotong Cui;Liu Yang
  • 通讯作者:
    Liu Yang
TEM studies of cross sections of oxidized Fe-25Cr-6Al-La alloy
  • DOI:
    10.1007/bf01058245
  • 发表时间:
    1995-10-01
  • 期刊:
  • 影响因子:
    2.000
  • 作者:
    Guowei Du;Zhiliang Yann;Jiamin Cai;Zhigang Xiao
  • 通讯作者:
    Zhigang Xiao
Adhesion of TiC/Fe Cermet Interface with C Vacancy: A First-Principles Study
TiC/Fe 金属陶瓷界面与 C 空位的粘附:第一性原理研究
  • DOI:
    10.4028/www.scientific.net/amr.415-417.368
  • 发表时间:
    2011-12
  • 期刊:
  • 影响因子:
    0
  • 作者:
    Yi Wu;邹正光;Yufang Shen;Kai Liu;Fei Long;Zhigang Xiao
  • 通讯作者:
    Zhigang Xiao

Zhigang Xiao的其他文献

{{ item.title }}
{{ item.translation_title }}
  • DOI:
    {{ item.doi }}
  • 发表时间:
    {{ item.publish_year }}
  • 期刊:
  • 影响因子:
    {{ item.factor }}
  • 作者:
    {{ item.authors }}
  • 通讯作者:
    {{ item.author }}

{{ truncateString('Zhigang Xiao', 18)}}的其他基金

Excellence in Research: Development of two-dimensional (2D) molybdenum disulfide (MoS2) and molybdenum selenium (MoSe2) thin-film nanomaterials and nanoelectronic devices
卓越研究:二维(2D)二硫化钼(MoS2)和钼硒(MoSe2)薄膜纳米材料和纳米电子器件的开发
  • 批准号:
    2100748
  • 财政年份:
    2021
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
Collaborative Research: RUI: Natural Bio-organic Resistive Random Access Memory Based Synaptic Devices
合作研究:RUI:基于天然生物有机电阻随机存取存储器的突触器件
  • 批准号:
    2105388
  • 财政年份:
    2021
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
DCL:HBCU:EAGER: Development of Wafer-Scale Fabrication of Carbon-Based Integrated Electronic Devices
DCL:HBCU:EAGER:碳基集成电子器件晶圆级制造的发展
  • 批准号:
    1740687
  • 财政年份:
    2017
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant

相似海外基金

MRI: Track 1 Acquisition of a Desktop SEM-EDS for Advanced Material and Biological Characterization
MRI:轨道 1 获取用于先进材料和生物表征的台式 SEM-EDS
  • 批准号:
    2320428
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Track 1 Acquisition of an Advanced Low-altitude Earth Observing System (ALEOS) with Hyperspectral and LiDAR Capabilities to Advance Interdisciplinary Research and Training
MRI:第一轨道采购具有高光谱和 LiDAR 功能的先进低空地球观测系统 (ALEOS),以推进跨学科研究和培训
  • 批准号:
    2320164
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Track 1 Acquisition of Dynamic Mixed Gas Sorption Analyzer-Mass Spectrometer to Enable Advanced Separation, Sensing, and Catalysis Research
MRI:轨道 1 采购动态混合气体吸附分析仪-质谱仪以实现先进的分离、传感和催化研究
  • 批准号:
    2320315
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Acquisition of an advanced X-ray detector for static and dynamic synchrotron X-ray scattering studies of materials at extreme conditions at the Advanced Photon Source
MRI:购买先进的 X 射线探测器,用于在先进光子源的极端条件下对材料进行静态和动态同步加速器 X 射线散射研究
  • 批准号:
    2320309
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
Equipment: MRI: Track 1 Acquisition of a GPU-Accelerated Computing Cluster for Advanced Optimization and Design in Multidisciplinary Research and Education
设备:MRI:Track 1 获取 GPU 加速计算集群,用于多学科研究和教育中的高级优化和设计
  • 批准号:
    2320649
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Track 1 Acquisition of a Multifunctional Thermal Analysis Instrument for Interdisciplinary Research and Research Training in Advanced Nanomaterial Development
MRI:轨道 1 采购多功能热分析仪器,用于先进纳米材料开发的跨学科研究和研究培训
  • 批准号:
    2320284
  • 财政年份:
    2023
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Acquisition of Low Velocity Impact Tester for Advanced Materials Research and Education
MRI:采购低速冲击测试仪用于先进材料研究和教育
  • 批准号:
    2215960
  • 财政年份:
    2022
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Acquisition of a High Brilliance Dual-Source X-ray Diffractometer for Advanced Materials Research, Education, and Training in Western New York
MRI:采购一台高亮度双源 X 射线衍射仪,用于纽约西部的先进材料研究、教育和培训
  • 批准号:
    2216151
  • 财政年份:
    2022
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Acquisition of a versatile pico-second laser and electroplating system for advanced device manufacturing and materials processing
MRI:采购多功能皮秒激光和电镀系统,用于先进设备制造和材料加工
  • 批准号:
    2216312
  • 财政年份:
    2022
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
MRI: Acquisition of High Power and Resolution X-ray Microscopy System for Advanced Characterization, Non-Destructive Evaluation, and Cross-Disciplinary Research & Innovation
MRI:采购高功率和分辨率 X 射线显微镜系统,用于高级表征、无损评估和跨学科研究
  • 批准号:
    2216175
  • 财政年份:
    2022
  • 资助金额:
    $ 21.24万
  • 项目类别:
    Standard Grant
{{ showInfoDetail.title }}

作者:{{ showInfoDetail.author }}

知道了