Collaborative Research: Liquid Phase Atomic Layer Deposition of Thin Films on Nanoparticles Using Three-Dimensionally Printed Microfluidics

合作研究：利用三维印刷微流控在纳米粒子上进行薄膜的液相原子层沉积

• 批准号: 1761273
• 负责人: Roseanne Warren
• 金额: $ 16.87万
• 依托单位: University of Utah
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2018
• 资助国家: 美国
• 起止时间: 2018-07-01 至 2022-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1761273&HistoricalAwards=false
• 关键词: Collaborative; Research; Liquid; Phase; Atomic

Nanoparticles are particles between 1 and 100 nanometer in size that possess unique, size-dependent properties due to their high surface area-to-volume ratios. Functional nanoparticles have the potential to benefit society through applications such as drug delivery, magnetic resonance imaging, renewable energy, optoelectronics, and catalysis. These applications rely on an ability to precisely customize the surface chemistry of nanoparticles using thin-film coatings. Nanoparticle thin-film coatings are typically on the order of a few monolayers in thickness, yet must be uniformly applied to individual nanoparticles. This award supports fundamental research into a new, high-precision thin-film nanoparticle coating strategy that overcomes current manufacturing challenges, including coating non-uniformity, by combining principles of atomic layer deposition, three-dimensional printing, and microfluidics. Improving the uniformity of nanoparticle coatings enables new applications of functional nanoparticles across health, energy, and technology sectors. This research award supports public engagement with nanotechnology through hands-on educational demonstrations of nanoparticle applications, with a focus on promoting inclusion for groups historically underrepresented in manufacturing research such as women and minorities. Current challenges in thin-film coating of nanoparticles include particle aggregation, non-uniform coating, limited thickness control, and undesired sensitivity to particle size and morphology. This research award meets these challenges by combining the monolayer-by-monolayer deposition principle of conventional atomic layer deposition with the hydrodynamic nanoparticle manipulation approach known as deterministic lateral displacement to achieve a new nanomanufacturing technology termed 'Liquid Phase Atomic Layer Deposition'. This approach represents a shift from conventional atomic layer deposition based on deposition at the solid-vapor interface to a new deposition physics based on successive adsorption and deposition reactions at the solid-liquid interface. The research studies center on utilizing specially positioned nanoposts within a microfluidic channel to passively transport suspended nanoparticles into discrete, adjacent flow streams of successive reactant and wash solutions. It is hypothesized that the controlled solid-liquid interface phenomena of Liquid Phase Atomic Layer Deposition yields a high degree of precision and uniformity for nanoparticle thin-film coating. The engineering of parallel three-dimensional microfluidic reactors, constructed by means of two-photon direct laser writing-based additive manufacturing, ensures that this method is also high throughput. The research team investigates the phenomenon of Liquid Phase Atomic Layer Deposition through fundamental experimental studies, computational fluid dynamics simulations, and multiphysics finite element modeling.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

纳米颗粒是1至100纳米尺寸之间的颗粒，由于其高表面积与体积比率具有独特的尺寸依赖性特性。功能性纳米颗粒有可能通过诸如药物输送，磁共振成像，可再生能量，光电子和催化等应用来使社会受益。 这些应用依赖于使用薄膜涂层精确自定义纳米颗粒的表面化学的能力。 纳米粒子薄膜涂层通常在厚度的几个单层的订单上，但必须均匀地应用于单个纳米颗粒。该奖项支持针对新的高精度薄膜纳米粒子涂料策略的基本研究，该策略通过结合原子层沉积，三维印刷和微流体的原理来克服当前的制造挑战，包括涂层非均匀性。 改善纳米颗粒涂层的均匀性，可以在健康，能源和技术领域的功能性纳米颗粒的新应用。 该研究奖通过动手的纳米颗粒应用程序支持公众与纳米技术的参与，重点是促进促进妇女和少数群体等制造研究中人数不足的群体的包容。纳米颗粒薄膜涂层的当前挑战包括颗粒聚集，不均匀的涂层，有限的厚度控制以及对粒径和形态的不希望的敏感性。 该研究奖通过将常规原子层沉积的单层沉积原理与流体动力学纳米颗粒操纵方法相结合，以应对这些挑战，以达到确定性的侧向位移，以实现一种新的纳米制造技术，称为“液相相位层原子层”。 这种方法代表了基于固体蒸气界面的沉积转移到基于连续的吸附和固液界面上的沉积反应的新沉积物理学的转变。 研究研究中心利用微流体通道中特殊定位的纳米管，以被动地将悬挂的纳米颗粒传输到离散的，相邻的连续反应物和WASH溶液的流动流中。 假设液相原子层沉积的受控固液界面现象可为纳米颗粒薄膜涂层提供高度的精度和均匀性。平行三维微流体反应器的工程，该反应堆通过基于两光激光的基于激光写作的增材制造构建，可确保此方法也很高吞吐量。 研究小组通过基本实验研究，计算流体动力学模拟和多物理学有限元建模来研究液相原子层沉积的现象。该奖项反映了NSF的法定任务，并被认为是值得通过基金会的知识分子优点和更广泛的影响审查标准来通过评估来通过评估来支持的。

项目成果

3D microfluidics via cyclic olefin polymer-based in situ direct laser writing

• DOI: 10.1039/c9lc00542k
• 发表时间: 2019-09-07
• 期刊: LAB ON A CHIP
• 影响因子: 6.1
• 作者: Alsharhan, Abdullah T.;Acevedo, Ruben;Sochol, Ryan D.
• 通讯作者: Sochol, Ryan D.

Multiple Linear Regression Modeling of Nanosphere Self-Assembly via Spin Coating

• DOI: 10.1021/acs.langmuir.1c02057
• 发表时间: 2021-10-13
• 期刊: LANGMUIR
• 影响因子: 3.9
• 作者: Razaulla, Talha;Bekeris, Michael;Warren, Roseanne
• 通讯作者: Warren, Roseanne

Rapid Quantification of Nanosphere Lithography Packing Defects Using Scanning Electron Microscopy Edge Effects

使用扫描电子显微镜边缘效应快速量化纳米球光刻填充缺陷

• DOI: 10.1002/pssr.202000328
• 发表时间: 2020
• 期刊: physica status solidi (RRL
• 作者: Bekeris, Michael;Truong, Takara;Carron, Stephen;Karimi, Zahra;Feng, Haidong;Nze, Ugochukwu;Beeman, Michael;Sochol, Ryan D.;Warren, Roseanne
• 通讯作者: Warren, Roseanne

Direct Laser Writing for Deterministic Lateral Displacement of Submicron Particles

• DOI: 10.1109/jmems.2020.2998958
• 发表时间: 2020-10-01
• 期刊: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
• 影响因子: 2.7
• 作者: Alsharhan, Abdullah T.;Stair, Anthony J.;Sochol, Ryan D.
• 通讯作者: Sochol, Ryan D.