Novel three dimensional shape measurement technique for fast rotating objects

用于快速旋转物体的新型三维形状测量技术

• 批准号: 235791889
• 负责人: Professor Dr.-Ing. Jürgen W. Czarske
• 金额: --
• 依托单位: Fachbereich 5.2 - Dimensionelle Nanometrologie
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2013
• 资助国家: 德国
• 起止时间: 2012-12-31 至 2019-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/235791889?language=en
• 关键词: Novel; three; dimensional; shape; measurement

The measurement of shape und position of fast rotating workpieces with sub-micron precision enables important advances in process technology. During the first funding period a novel laser Doppler distance sensor (P-LDD Sensor) was investigated systemically. The P-LDD sensor system employs the simultaneous measurement of the lateral surface velocity and the axial surface distance, in order to measure the absolute shape and position of rotation axis with keyhole access. A scientific breakthrough was accomplished. The measurement uncertainty has been reduced by more than one magnitude by observing the scattered light under different angles and employing novel signal evaluation. Furthermore, the P-LDD sensor system was integrated into a lathe (cooperation with PTB in Braunschweig) and the shape of a workpiece was measured with a standard deviation of 300 nm also at high lateral surface velocities. However, the total measurement uncertainty for this novel system is currently limited by speckle noise and thermal drifts of the calibration functions. Additionally, the lateral resolution is limiting the application of the sensor to measurements of macro geometric features.Therefore, the aim of the proposed second funding period is to reduce the measurement uncertainty due to the speckle effect and due to drifts of the calibration functions (systematic uncertainties) as well as to increase the lateral resolution. This will enable macro- and micro-geometric shape measurements with sub-micron uncertainty at rotating objects. For this purpose cameras will be introduced to the system instead of single detectors and novel image processing for moving speckle pattern will be applied and fundamentally investigated. The image processing will enable an evaluation of single speckles. Therefore phase jumps, which currently occur in the detector signal will be eliminated. Preliminary, numerical experiments show a reduction of the speckle induced measurement deviations. Using a matrix camera and an extended image processing enables an in-situ calibration additionally, which will be applied and characterized to reduce systematic deviations. Furthermore, the extension of the P-LDD sensor system by a camera enables an increased lateral resolution. Thus, micro-geometric features of free form parts can be resolved additionally to the shape in-situ.

用亚微米精度的快速旋转工件的形状和速度位置的测量可以在过程技术方面取得重要的进步。在第一个资金期间，系统地研究了新型激光多普勒距离传感器（P-LDD传感器）。 P-LDD传感器系统采用侧面速度和轴向表面距离的同时测量，以测量使用钥匙孔访问的旋转轴的绝对形状和位置。实现了科学的突破。通过观察不同角度的散射光并采用新颖的信号评估，测量不确定性已通过多个级降低。此外，将P-LDD传感器系统集成到车床中（与Braunschweig中的PTB合作），并在高侧面速度下以300 nm的标准偏差为300 nm测量工件的形状。但是，当前，该新系统的总测量不确定性受校准函数的斑点噪声和热漂移的限制。此外，横向分辨率限制了传感器在宏几何特征的测量中的应用。因此，拟议的第二资金期间的目的是减少由于型号效应而导致的测量不确定性，并且由于校准功能（系统的不确定性）的漂移以及后期的分辨率。这将使旋转物体的宏观几何形状测量值和微米几何形状测量。为此，将将摄像头引入系统而不是单个检测器，并将应用用于移动斑点模式的新型图像处理并从根本上进行研究。图像处理将对单个斑点进行评估。因此，将消除当前发生在检测器信号中的相位跳跃。初步的数值实验表明，斑点诱导的测量偏差的减少。使用矩阵摄像头和扩展的图像处理可以另外进行现场校准，该校准将被应用和表征以减少系统偏差。此外，通过摄像机对P-LDD传感器系统的扩展可以提高横向分辨率。因此，自由形式零件的微观几何特征还可以在原位形状上解析。

项目成果

Measurement uncertainty propagation in spindle error separation techniques - Investigation by means of stochastic spectral method

主轴误差分离技术中的测量不确定度传播 - 随机谱法研究

• DOI: 10.1016/j.ijmachtools.2019.03.006
• 发表时间: 2019
• 期刊: International Journal of Machine Tools and Manufacture
• 影响因子: 14
• 作者: Shi Shengyu;Zhang Hao;Qu Jinping;Jin Gang;Kuschmierz Robert;Czarske Juergen
• 通讯作者: Czarske Juergen

Miniaturized interferometric 3-D shape sensor using coherent fiber bundles

• DOI: 10.1016/j.optlaseng.2018.04.011
• 发表时间: 2018-08
• 期刊: Optics and Lasers in Engineering
• 影响因子: 4.6
• 作者: Haoyang Zhang;R. Kuschmierz;J. Czarske

Modeling, quantification, and mitigation of uncertainty propagation in two-step roundness measurements

两步圆度测量中不确定性传播的建模、量化和缓解

• DOI: 10.1016/j.measurement.2020.107530
• 发表时间: 2020-04-01
• 期刊: MEASUREMENT
• 影响因子: 5.6
• 作者: Shi, Shengyu;Kuschmierz, Robert;Qu, Jinping
• 通讯作者: Qu, Jinping

Non-contact, bi-directional tool tip vibration measurement in CNC milling machines with a single optical sensor

• DOI: 10.1016/j.ymssp.2020.106647
• 发表时间: 2020-05
• 期刊: Mechanical Systems and Signal Processing
• 影响因子: 8.4
• 作者: Haoyang Zhang;Damian Anders;Michael Löser;S. Ihlenfeldt;J. Czarske;R. Kuschmierz

Camera-based speckle noise reduction for 3-D absolute shape measurements.

基于相机的散斑降噪，用于 3D 绝对形状测量

• DOI: 10.1364/oe.24.012130
• 发表时间: 2016
• 期刊: Optics express
• 影响因子: 3.8
• 作者: H. Zhang;R. Kuschmierz;J. Czarske;A. Fischer
• 通讯作者: A. Fischer