GOALI: Continuous Spatial Particle Atomic Layer Deposition Processing

GOALI：连续空间粒子原子层沉积处理

• 批准号: 1852824
• 负责人: Alan Weimer
• 金额: $ 36.47万
• 依托单位: University of Colorado at Boulder
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-08-15 至 2023-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1852824&HistoricalAwards=false
• 关键词: GOALI; Continuous; Spatial; Particle; Atomic

Atomic layer deposition (ALD) is the most precise method for manufacturing conformal, continuous thin film coatings. ALD processing is important in many manufacturing processes for optics, microelectronics, and biomedical applications, though it can be slow and costly. ALD uses sequential gas-solid reactions where gas-phase reactions are prevented by having precursors fed separately into the reaction chamber and react with functional groups bonded to the surface. The proposed GOALI project is a collaboration between an academic team from the University of Colorado at Boulder and an industrial partner, ALD NanoSolutions. The objective of the proposed research is to develop an improved fundamental understanding of spatial atomic layer deposition on particles (i.e. spatial Particle ALD), so that high-efficiency and low-cost continuous Particle ALD can be achieved.The proposed project will involve Computational Fluid Dynamics (CFD) model development and integrated experiments aimed at developing a scalable ALD process in which primary particles are coated uniformly and expensive precursor gases are effectively utilized. A continuum-scale model will account for agglomerate formation and breakup as well as chemical reactions, fluid dynamics, heat/mass transport, and all relevant multiphase interactions during fine particle agitation using vibration. The hypotheses to be tested include: (1) that a continuum-scale model will adequately describe the proposed agitated particle system; (2) that it is possible to coat individual nanoparticles in a continuous vibrating Particle ALD reactor without loss of active surface area; (3) that Particle ALD processing in a continuous vibrating Particle ALD reactor can be optimized to utilize the precursor gases nearly completely; (4) that the modified in-house lab system will provide data needed for experimental validation of the CFD model; and (5) that substrate particles coated by continuous spatial particle ALD will compare favorably with particles synthesized using a batch fluidized bed process - for the identical number of ALD cycles. Experiments carried out at ALD NanoSolutions will focus on validating the model predictions and findings of the academic team and scaling up the process. The ultimate objective of the project is to substantially improve the fundaental understanding of how Particle ALD enables primary fine particles, including nanoparticles, to be coated in an agitated particle bed reactor and enable process scale up for commercial production. A graduate student will be trained in close collaboration with the industrial partner and undergraduate students will be engaged in research. The project will also be used as a capstone design project for undergraduate student teams to perform process design and techno-economic analysis.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

原子层沉积（ALD）是制造保形、连续薄膜涂层的最精确方法。 ALD处理在光学、微电子和生物医学应用的许多制造工艺中很重要，尽管它可能缓慢且昂贵。ALD使用连续的气-固反应，其中通过将前体单独进料到反应室中并与结合到表面的官能团反应来防止气相反应。拟议中的GOALI项目是位于博尔德的科罗拉多大学的一个学术团队与工业合作伙伴ALD NanoSolutions之间的合作。拟议的研究的目的是发展一个更好的基本了解空间原子层沉积颗粒（即空间粒子ALD），从而实现高效率和低成本的连续粒子ALD。拟议的项目将涉及计算流体动力学（CFD）模型开发和综合实验，旨在开发一种可扩展的ALD工艺，其中初级颗粒被均匀地涂覆并且昂贵有效地利用了前体气体。一个连续尺度模型将考虑团聚体的形成和破碎以及化学反应，流体动力学，热/质传输，和所有相关的多相相互作用，在使用振动的细颗粒搅拌。待测试的假设包括：（1）连续尺度模型将充分描述所提出的搅拌颗粒系统;（2）可以在连续振动颗粒ALD反应器中涂覆单个纳米颗粒而不损失活性表面积;（3）可以优化连续振动颗粒ALD反应器中的颗粒ALD处理以几乎完全利用前体气体;（4）改进的内部实验室系统将提供CFD模型的实验验证所需的数据;以及（5）对于相同数量的ALD循环，通过连续空间颗粒ALD涂覆的基底颗粒将有利地与使用分批流化床工艺合成的颗粒相比较。在ALD NanoSolutions进行的实验将专注于验证学术团队的模型预测和发现，并扩大该过程。该项目的最终目标是大幅提高对粒子ALD如何使包括纳米颗粒在内的初级细颗粒在搅拌粒子床反应器中被涂覆的基本理解，并使工艺规模扩大到商业生产。研究生将与工业合作伙伴密切合作进行培训，本科生将从事研究。该项目还将被用作本科生团队进行工艺设计和技术经济分析的顶点设计项目。该奖项反映了NSF的法定使命，并通过使用基金会的智力价值和更广泛的影响审查标准进行评估，被认为值得支持。

项目成果

A moving porous media model for continuous spatial particle ALD

• DOI: 10.1016/j.powtec.2023.118448
• 发表时间: 2023-03
• 期刊: Powder Technology
• 影响因子: 5.2
• 作者: J. Hartig;Vidumin Dahanayake;Julie Nguyen;Carter A. Wilson;Austin M. Barnes;A. Weimer

Aeration and cohesive effects on flowability in a vibrating powder conveyor

振动粉末输送机中通气和内聚力对流动性的影响

• DOI: 10.1016/j.powtec.2022.117724
• 发表时间: 2022
• 期刊: Powder Technology
• 影响因子: 5.2
• 作者: Hartig, Julia;Shetty, Abhishek;Conklin, Davis R.;Weimer, Alan W.
• 通讯作者: Weimer, Alan W.

DEM modeling of fine powder convection in a continuous vibrating bed reactor

• DOI: 10.1016/j.powtec.2021.03.038
• 发表时间: 2021-03
• 期刊: Powder Technology
• 影响因子: 5.2
• 作者: J. Hartig;Hannah C. Howard;Tanner Stelmach;A. Weimer