MRI: Acquisition of a High-Speed Lithography Tool for Research and Education at the University of Hawaii

该主要研究仪器（MRI）奖支持获得最先进的高速无掩膜光刻工具，以支持夏威夷大学马诺阿分校（UHM）的微尺度和纳米尺度科学与工程的基础研究。该仪器将在微流体、传感器、纳米系统和生物医学系统等领域实现新的研究合作——无论是在大学内部还是与更广泛的社区。复杂的、多路复用的、可扩展的微流体和纳米流体装置的制造将使可重构的液态金属电路、药物输送的体外测试、化学增强的石油采收率和水净化成为可能。核磁共振奖为科学和工程培训创造了新的机会，通过实践学生研究项目和加强外展活动，特别是对夏威夷原住民和太平洋岛民学生。生成高分辨率、受控的机械和电气接口的能力对于工程、生物科学和应用物理学的研究至关重要。该奖项建立的先进制造途径将使纳米系统、能量传输和可重构设备制造的基础研究成为可能。该仪器实现了精确的光刻图案化，可以研究基本的能量传输性质和行为，这是扩展能量转换和存储材料库所需要的。电极和其他材料结构的图像化也为阐明纳米材料表面特性的电效应提供了手段，这是推进纳米制造中器件小型化的基础。微流控结构的快速大规模图像化使可穿戴生物医学传感器所需的高度可变形结构和先进光学特性的制造研究成为可能。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

This Major Research Instrumentation (MRI) award supports the acquisition of a state-of-the-art high-speed maskless lithography tool to enable fundamental research in microscale and nanoscale science and engineering at the University of Hawaii at Manoa (UHM). The instrumentation will enable new research collaborations--both within the University and with the broader community--in microfluidics, sensors, nanosystems, and biomedical systems. Fabrication of sophisticated, multiplexed, scalable microfluidic and nanofluidic devices will enable advancement of reconfigurable liquid-metal-based electrical circuits, in vitro testing of drug delivery, chemical-enhanced oil recovery, and water purification. The MRI award creates new opportunities for science and engineering training through hands-on student research projects and enhanced outreach activities, particularly for Native Hawaiian and Pacific Islander students. The ability to generate high-resolution, controlled mechanical and electrical interfaces is essential for research in engineering, biosciences, and applied physics. The advanced fabrication pathways established by this award will enable fundamental research on nanosystems, energy transport, and manufacturing of reconfigurable devices. Precise lithographic patterning achieved with the instrumentation allows study of fundamental energy transport properties and behaviors, which are needed to expand the library of materials for energy conversion and storage. Patterning of electrodes and other material structures also offers the means to elucidate electrical effects on nanomaterial surface properties, which are fundamental to advancing device miniaturization in nanomanufacturing. Rapid large-scale patterning of microfluidic structures enables research in manufacturing of highly deformable structures and advanced optical features that are needed for wearable biomedical sensors.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.