MRI: Acquisition of a High-Speed Lithography Tool for Research and Education at the University of Hawaii

MRI：夏威夷大学购买用于研究和教育的高速光刻工具

• 批准号: 1919539
• 负责人: Joseph Brown
• 金额: $ 46.69万
• 依托单位: University of Hawaii
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2019
• 资助国家: 美国
• 起止时间: 2019-09-01 至 2022-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1919539&HistoricalAwards=false
• 关键词: MRI; Acquisition; Speed; Lithography; Tool

This Major Research Instrumentation (MRI) award supports the acquisition of a state-of-the-art high-speed maskless lithography tool to enable fundamental research in microscale and nanoscale science and engineering at the University of Hawaii at Manoa (UHM). The instrumentation will enable new research collaborations--both within the University and with the broader community--in microfluidics, sensors, nanosystems, and biomedical systems. Fabrication of sophisticated, multiplexed, scalable microfluidic and nanofluidic devices will enable advancement of reconfigurable liquid-metal-based electrical circuits, in vitro testing of drug delivery, chemical-enhanced oil recovery, and water purification. The MRI award creates new opportunities for science and engineering training through hands-on student research projects and enhanced outreach activities, particularly for Native Hawaiian and Pacific Islander students. The ability to generate high-resolution, controlled mechanical and electrical interfaces is essential for research in engineering, biosciences, and applied physics. The advanced fabrication pathways established by this award will enable fundamental research on nanosystems, energy transport, and manufacturing of reconfigurable devices. Precise lithographic patterning achieved with the instrumentation allows study of fundamental energy transport properties and behaviors, which are needed to expand the library of materials for energy conversion and storage. Patterning of electrodes and other material structures also offers the means to elucidate electrical effects on nanomaterial surface properties, which are fundamental to advancing device miniaturization in nanomanufacturing. Rapid large-scale patterning of microfluidic structures enables research in manufacturing of highly deformable structures and advanced optical features that are needed for wearable biomedical sensors.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.

该重大研究仪器（MRI）奖支持收购最先进的高速无掩模光刻工具，以使夏威夷大学马诺阿分校（UHM）能够进行微米级和纳米级科学与工程的基础研究。该仪器将使新的研究合作-无论是在大学内，并与更广泛的社区-在微流体，传感器，纳米系统和生物医学系统。制造复杂的、多路复用的、可扩展的微流体和纳米流体装置将使可重构的基于液体金属的电路、药物递送的体外测试、化学增强的石油回收和水净化的进步成为可能。 MRI奖通过动手学生研究项目和加强外展活动，特别是夏威夷土著和太平洋岛民学生，为科学和工程培训创造了新的机会。生成高分辨率、可控的机械和电气接口的能力对于工程、生物科学和应用物理学的研究至关重要。该奖项建立的先进制造途径将使纳米系统，能量传输和可重构设备制造的基础研究成为可能。利用仪器实现的精确光刻图案化允许研究基本的能量传输特性和行为，这是扩展用于能量转换和存储的材料库所需的。电极和其他材料结构的图案化也提供了阐明对纳米材料表面性质的电效应的手段，这对于推进纳米制造中的器件小型化是至关重要的。微流体结构的快速大规模图案化使可穿戴生物医学传感器所需的高度可变形结构和先进光学特性的制造研究成为可能。该奖项反映了NSF的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。