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Research and Development of a Nanostructure Deposition System

纳米结构沉积系统的研究与开发

基本信息

批准号：
247352488
负责人：
Professor Dr. Heiko Jacobs
金额：
--
依托单位：
Fachgebiet Nanotechnologie (NANO)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2013
资助国家：
德国
起止时间：
2012-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/247352488?language=en
关键词：
Research Development Nanostructure Deposition System

项目摘要

- Methodology: The proposed research is motivated by supporting results that have been gathered at the PIs former laboratory in Minnesota before he transitioned to Germany in 2012 (CV, has details). The main goal of this proposal is to gain fundamental understanding and control of the discovered process which is an atmospheric pressure gas phase deposition method. The process has the potential to enable the production of nanostructured deposits beyond what is currently possible. Specifically, we believe that it is possible to enable the production of nearly arbitrary 3D (instead of 2D) and heterogeneous multimaterial composite nanostructured deposits (instead of homogenous and unimaterial/function) with high resolution (~10 nm). The process, as it is understood so far is based on the interplay between high mobility gas ions, lower mobility charged nanoparticles, and a patterned programmable substrate which supports filamentation of the material flux and growth pattern. Specifically, at sufficiently high gas pressure nanostructures can be grown whereby the composition and 3D shape can be locally adjusted with a level of control that we have not seen before. We would like to gain understanding of the underlying mechanism and propose to install and research a modular system that integrates nanomaterial synthesis, nanomaterial transport, programmable selected area multimaterial deposition, and inspection in one apparatus.- Application: While the research is driven by basic science questions the process should find application in an emerging field that is referred to as Nanomanufacturing. It is already established that nanostructured materials provide a variety of size dependent functions whose discovery has driven the 1st phase of nanoscience. The 2nd phase anticipates a positive impact on society, which has been hampered by a lack of scalable Nanomanufacturing methods that enable the integration of functional nanostructures at addressable locations on various substrates with high precision and yield. The proposed research project addresses this challenge. It advances fundamental science questions to achieve a longer term goal in the field of Nanomanufacturing which is the realization of a scalable deposition process to produce novel multimaterial 3D nanostructured deposits.

-方法论：拟议的研究是基于在2012年他过渡到德国之前在明尼苏达州的PIS前实验室收集的支持结果(简历，有详细信息)。这项建议的主要目标是从根本上了解和控制所发现的过程，这是一种常压气相沉积方法。这一过程有可能使纳米结构沉积物的生产超越目前的可能。具体地说，我们认为有可能以高分辨率(~10 nm)生产几乎任意的3D(而不是2D)和异质多材料复合纳米结构(而不是均质和单一材料/功能)。据目前所知，这一过程是基于高迁移率气体离子、低迁移率带电纳米颗粒和支持材料通量和生长模式成丝的图案化可编程衬底之间的相互作用。具体地说，在足够高的气压下，可以生长纳米结构，从而可以用我们以前从未见过的控制水平来局部调整成分和3D形状。我们希望了解基本的机制，并建议安装和研究一个模块系统，该系统将纳米材料合成、纳米材料传输、可编程选择区域多材料沉积和检测集成在一个设备中。-应用：虽然这项研究是由基础科学问题推动的，但该过程应该在一个被称为纳米制造的新兴领域找到应用。已经证实，纳米结构材料提供了各种尺寸相关的功能，这些功能的发现推动了纳米科学的第一阶段。第二阶段预计将对社会产生积极影响，但由于缺乏可扩展的纳米制造方法，使功能纳米结构能够高精度和高产量地集成在各种衬底上的可寻址位置，这一阶段一直受到阻碍。拟议的研究项目解决了这一挑战。它提出了基础科学问题，以实现纳米制造领域的长期目标，即实现可扩展的沉积过程，以产生新颖的多材料三维纳米结构沉积。