Measurement concepts for new, highly integrated antennas

该提案是DFG项目的后续应用，主题为高度集成的天线的测量技术概念。该项目的主要重点是深入分析测量概念和可实现的测量精度，用于表征集成天线从100 GHz到300 GHz。最小的传感器尺寸和大的可用绝对带宽导致了对毫米波范围内集成传感器的高度研究兴趣。然而，所需的集成天线的表征是具有挑战性的，因为小的结构尺寸和短波长需要精心的测量设置。由于芯片尺寸小，用于为天线馈电的接触夹具位于AUT的周围，通常比被测设备本身大得多。这会导致较大的系统测量误差。在通过对设置进行全面的误差分析大大提高了测量精度之后，现在将详细分析剩余的误差机制，如晶圆探针反射或与键合线和封装的相互作用。首先，将来自天线的期望直接辐射与不需要的反射分离，以获得隔离天线的辐射场。通过将由此过滤的场与原始测量进行比较，然后可以获得对发生的误差机制和相互作用的更好理解。两种算法，即MARS和源重建。识别键合线和封装的影响，但是，由于来自晶圆探针的强烈反射，可能是困难的。因此，实现了一种新的测量方法，允许通过直接在芯片上产生的信号而不是通过晶圆探针从外部源提供的信号来馈送AUT的相位测量。测量数据的后处理还可以允许使用较低价格的标准探针来表征集成天线。到目前为止，只有在使用针对天线测量进行了优化的晶圆探针时，才有可能对集成天线进行精确测量。信号在标准探头后面的反射和阴影会导致大的测量误差，从而抑制有意义的测量。因此，利用后处理算法重建实际辐射方向图，定位探头的反射中心，通过天线的增益和方向性来计算天线的精度。到目前为止，所确定的效率的准确性受到集成天线增益测量中的误差的限制。为了提高效率的测量，进行了详细的分析，在增益比较测量中出现的误差。

This proposal is a subsequent application to the DFG project with the topic Measurement Technique Concepts for Highly Integrated Antennas. The main focus of the project were in-depth analyses of measurement concepts and of the achievable measurement accuracy for the characterization of integrated antennas from 100 GHz to 300 GHz.Minimal sensor sizes and large available absolute bandwidths lead to a high research interest towards integrated sensors in the millimeter wave range. However, the characterization of the required integrated antennas is challenging, as the small structure sizes and the short wavelengths require elaborate measurement setups. Due to the small chip dimensions the contacting fixtures, which are used to feed the antenna, are in the immediate surrounding of the AUT and are usually much bigger than the device under test itself. This leads to large systematic measurement errors. After the measurement accuracy has been improved considerably through a thorough error analysis of the setup, the remaining error mechanisms, like wafer probe reflections or interaction with bond wires and the packages, are now to be analyzed in detail. First, the desired direct radiation from the antenna is separated from the unwanted reflections to obtain the radiated field of the isolated antenna. By comparing the thereby filtered fields to the original measurements, a better understanding of the occurring error mechanisms and interactions can then be obtained. Two algorithms are employed for this, namely MARS and source reconstruction.Identifying the influence of bond wires and package can, however, be difficult due to the strong reflections from the wafer probe. Therefore, a new measurement method is realized to allow phase measurements of an AUT that is fed by a signal generated directly on the chip, instead of a signal supplied through a wafer probe from an external source.Post processing of the measurement data can also allow the characterization of integrated antennas with lower-priced standard probes. Until now accurate measurements of integrated antennas are only possible when wafer probes are used that are optimized for antenna measurements. Reflections and shadowing of the signal behind standard probes cause large measurement errors that inhibit meaningful measurements. Therefore, the post processing algorithms are used to reconstruct the actual radiation pattern and to locate the reflection centers of the probe.The accuracy of antennas can be calculated with gain and directivity of an antenna. So far the accuracy of the determined efficiency is limited by errors in the integrated antenna gain measurement. In order to improve efficiency measurements, a detailed analysis of errors, which occur in gain comparison measurements, is conducted.