Novel nano scale reactive material systems for bonding with internal heat source

用于与内部热源粘合的新型纳米级反应材料系统

• 批准号: 251987705
• 负责人: Professorin Dr.-Ing. Karla Hiller, since 7/2016
• 金额: --
• 依托单位: Zentrum für Mikrotechnologien (ZfM)
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2014
• 资助国家: 德国
• 起止时间: 2013-12-31 至 2015-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/251987705?language=en
• 关键词: Novel; nano; scale; reactive; material

In this proposal, material systems are investigated which allow due to their stoichiometric composition and geometric dimensions a self-sustaining, exothermic chemical reaction, releasing energy that can be used as an internal heat source. This locally generated heat can be used for bonding in microsystems technology. The aim of this proposal is to provide more flexible and powerful technologies for the development of microsystems. Thus, new materials as well as new functionalities can be integrated by the reduced heat input as well as heat damage, the increased bonding strength and a simple and flexible application.The aim of this project is the deposition and analysis of reactive nanoscale material systems, which, in contrast to the conventional approaches, involves a new principle. With the help of these new so called vertically arranged systems individual process steps as well as deposition temperatures can be reduced. In the proposed project, the bonding feasibility with these new nanoscale reactive material systems is demonstrated.

在该提案中，研究了材料系统，由于其化学计量成分和几何尺寸，允许自持、放热化学反应，释放可用作内部热源的能量。这种局部产生的热量可用于微系统技术中的粘合。该提案的目的是为微系统的开发提供更灵活、更强大的技术。因此，可以通过减少热输入和热损伤、提高粘合强度以及简单灵活的应用来集成新材料和新功能。该项目的目的是沉积和分析反应性纳米材料系统，与传统方法相比，它涉及一种新原理。借助这些新的所谓垂直布置系统，可以降低各个工艺步骤以及沉积温度。在拟议的项目中，论证了这些新型纳米级反应材料系统的粘合可行性。

项目成果

Modelling the reaction behavior in reactive multilayer systems on substrates used for wafer bonding

对用于晶圆键合的基板上的反应性多层系统的反应行为进行建模

• DOI: 10.1063/1.4885457
• 发表时间: 2014
• 期刊: Journal of Applied Physics
• 影响因子: 3.2
• 作者: R. Masser;J. Bräuer;T. Geßner
• 通讯作者: T. Geßner