Zentralprojekt

技术趋势的重要性超过了半导体技术路线图中描述的摩尔，在过去10年中不断增加。超过摩尔依赖于不同技术和功能的集成，以实现与环境的互动，并在信号和信息处理下的小型化系统中实现自主能源供应。除了数字和模拟电子设备之外，传感器和执行器、无源设备、高频和高压技术、生物技术和能源供应组件也是此类系统的一部分。由于这一点以及组件和系统小型化的持续趋势，需要将纳米技术集成到更小的尺寸中，以集成新的和大幅增强的功能或集成现有的功能。1713 Smart Micro und Nano Systems研究单位旨在实现智能系统集成的微纳米技术概念。智能系统是小型化、多功能的构建模块和系统，由最小空间上的异构组件组成。例如，基于纳米结构（如磁性纳米膜）的新传感原理、基于碳纳米管的纳米机电系统（NEMS），或使用晶体管等固态建筑元件作为传感器，这些领域都需要高科学水平的基础研究。由于结构几何形状的不断小型化以及组件和系统的日益复杂，所有抽象级别的开发工具都需要进行调整。从微米技术到纳米技术的过渡导致了新的工艺和材料，这些工艺和材料需要被纳入系统和组件以及半导体行业。此外，在纳米范围内的结构需要具有高空间分辨率的表征技术和进一步开发的可靠性表征模型。因此，在研究活动的中心是理论，系统开发方法，工艺和表征的新材料和纳米技术集成的传感器应用。有条不紊的工作正在三个不同的技术路线中进行：努力的目标需要工程师，科学家，物理学家，化学家和材料科学家之间的密切合作。研究单位的研究人员在切姆尼茨工业大学工作，或者通过弗劳恩霍夫研究所ENAS或莱布尼茨固态和材料研究所的共同提名或荣誉教授职位与大学联系。这些子项目的结构涵盖了所有必要的能力领域，从单分子的量子力学描述开始，通过模拟非均匀组件和系统，开发，

The importance of the technological trend More than Moore being described in the technology roadmap for semiconductors, has increased constantly over the last 10 years. More than Moore relies on the integration of different technologies and functionalities for enabling the interaction with the environment and the autonomous energy supply in a miniaturized system beneath signal and information processing. Besides the digital and analogous electronics, also sensors and actuators, passive devices, high frequency and high voltage technology, biotechnology and components for energy supply are part of such systems. Because of this and the ongoing trend towards miniaturization of components and systems, the demand exists for integration of nanotechnologies to incorporate novel and drastically enhanced functionalities or for the integration of existing functionalities in smaller size.The research unit 1713 Smart Micro und Nano Systems aims for such micro and nano technological concepts for the Smart Systems Integration. Smart Systems are miniaturized, multifunctional building blocks and systems and consist of heterogeneous components on smallest space. Some examples are new sensing principles on the basis of nano structures as magnetic nano membranes, nano electro mechanical systems (NEMS) on the base of carbon nanotubes, or the usage of solid state building elements like transistors as sensing transducers.In these areas, there exists an exhaustive demand for basic research at a high scientific level. Because of the ongoing miniaturization of the structure geometries and the increasing complexity of the components and systems, the development tools on all abstraction levels need to be adapted. The transition from micro to nano technologies leads to new processes and materials that need to be incorporated in the systems and components as well as in the semiconductor industry. Additionally, structures in the nanometer range demand characterization techniques with a high spatial resolution and further developed models for the reliability characterization.Therefore, in the center of the research activities are theory, system development methods, processes and characterization for the integration of new materials and nano technologies for sensor applications. The methodical work is being pursued in the three different technological lines:The strived goals demand a close cooperation between enigneers, scientists, physicists, chemists, and material scientist. The researchers of the research unit are working at the Technische Universität Chemnitz or are linked to the university via common nominations of the Fraunhofer Institute ENAS or the Leibniz Institute of Solid State and Materials Research or honorary professorships. The sub projects are structured in a way that all necessary competence fields are covered starting from quantum mechanical description of single molecules via the simulation of heterogeneous components and systems, the developme