Zentralprojekt

半导体技术路线图中所描述的技术趋势的重要性在过去十年中不断增强。超越摩尔依赖于不同技术和功能的集成，以实现与环境的交互以及在信号和信息处理下的小型系统中的自主能源供应。除了数字和模拟电子产品之外，传感器和执行器、无源器件、高频和高压技术、生物技术和能源供应组件也是此类系统的一部分。由于这一点以及组件和系统小型化的持续趋势，存在对纳米技术集成的需求，以纳入新颖且大幅增强的功能，或将现有功能集成到更小的尺寸中。1713智能微纳米系统研究单位旨在将这种微纳米技术概念用于智能系统集成。智能系统是小型化、多功能的构建块和系统，由最小空间内的异构组件组成。一些例子是基于纳米结构（如磁性纳米膜）的新传感原理、基于碳纳米管的纳米机电系统（NEMS），或使用晶体管等固态建筑元件作为传感传感器。在这些领域，对高科学水平的基础研究存在着详尽的需求。由于结构几何形状的不断小型化以及组件和系统的复杂性不断增加，所有抽象级别的开发工具都需要进行调整。从微米技术到纳米技术的转变导致需要将新的工艺和材料纳入系统和组件以及半导体行业。此外，纳米范围内的结构需要具有高空间分辨率的表征技术，以及进一步开发的可靠性表征模型。因此，研究活动的中心是理论、系统开发方法、过程和表征，用于传感器应用的新材料和纳米技术的集成。有条不紊的工作正在三个不同的技术路线中进行：努力的目标需要工程师、科学家、物理学家、化学家和材料科学家之间的密切合作。该研究单位的研究人员在开姆尼茨工业大学工作，或通过弗劳恩霍夫研究所 ENAS 或莱布尼茨固体与材料研究所的共同提名或名誉教授职位与该大学建立联系。子项目的结构涵盖了所有必要的能力领域，从单分子的量子力学描述开始，通过异构组件和系统的模拟，开发

The importance of the technological trend More than Moore being described in the technology roadmap for semiconductors, has increased constantly over the last 10 years. More than Moore relies on the integration of different technologies and functionalities for enabling the interaction with the environment and the autonomous energy supply in a miniaturized system beneath signal and information processing. Besides the digital and analogous electronics, also sensors and actuators, passive devices, high frequency and high voltage technology, biotechnology and components for energy supply are part of such systems. Because of this and the ongoing trend towards miniaturization of components and systems, the demand exists for integration of nanotechnologies to incorporate novel and drastically enhanced functionalities or for the integration of existing functionalities in smaller size.The research unit 1713 Smart Micro und Nano Systems aims for such micro and nano technological concepts for the Smart Systems Integration. Smart Systems are miniaturized, multifunctional building blocks and systems and consist of heterogeneous components on smallest space. Some examples are new sensing principles on the basis of nano structures as magnetic nano membranes, nano electro mechanical systems (NEMS) on the base of carbon nanotubes, or the usage of solid state building elements like transistors as sensing transducers.In these areas, there exists an exhaustive demand for basic research at a high scientific level. Because of the ongoing miniaturization of the structure geometries and the increasing complexity of the components and systems, the development tools on all abstraction levels need to be adapted. The transition from micro to nano technologies leads to new processes and materials that need to be incorporated in the systems and components as well as in the semiconductor industry. Additionally, structures in the nanometer range demand characterization techniques with a high spatial resolution and further developed models for the reliability characterization.Therefore, in the center of the research activities are theory, system development methods, processes and characterization for the integration of new materials and nano technologies for sensor applications. The methodical work is being pursued in the three different technological lines:The strived goals demand a close cooperation between enigneers, scientists, physicists, chemists, and material scientist. The researchers of the research unit are working at the Technische Universität Chemnitz or are linked to the university via common nominations of the Fraunhofer Institute ENAS or the Leibniz Institute of Solid State and Materials Research or honorary professorships. The sub projects are structured in a way that all necessary competence fields are covered starting from quantum mechanical description of single molecules via the simulation of heterogeneous components and systems, the developme