Conference: The 17th US-Korea Forum on Nanotechnology: Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing

韩美纳米技术论坛从2003年开始，除了新冠疫情期间，每年轮流举行一次。这些论坛的重点是加强两国科学家和工程师在纳米技术领域的研究合作。联合论坛促进了两国研究界和机构之间的网络交流，促进了信息交流和研究合作的新机会。今年论坛的主题是“下一代半导体”和“半导体制造对环境的影响”。主讲人1名、美国资深讲者7名、创业初期讲者7名，韩国讲者人数相同。组委会将强调参加者的多样性。本次论坛将汇集两国专家研究人员和创新者，他们致力于下一代半导体和环境友好型半导体制造的前沿。此次论坛的成果将成为韩美两国在半导体技术领域的里程碑式的研究合作，并产生重大的经济和社会影响。论坛的会议记录和调查结果将在卡内基梅隆大学的网站上向广大读者公布。未来10年，半导体技术将成为韩美两国经济发展和国防安全的重要领域。本次论坛将探讨通过单片集成和异构集成以及先进的封装工艺来实现3D集成的成本/性能提升，以延续摩尔定律。芯片尺寸的进一步减小将需要新的环境、健康和安全（EHS）解决方案。因此，将讨论使用纳米技术来评估半导体制造化学的毒性、环境命运和行为特征的新设备的开发。需要采用具有多尺度方法的具有成本效益的纳米技术方法，以确保废水流出物和空气排放对环境的影响降到最低。超纯水（UPW）在半导体制造和制造过程中非常重要。因此，与EHS相结合的制造和化学机械平面化中UPW的新型减少，再利用和回收技术也将被讨论。更广泛的影响将包括半导体科学、环境友好型制造和教育方面的新推荐范例，以及半导体制造研究方面的新合作，特别是在早期职业科学家之间。该奖项反映了美国国家科学基金会的法定使命，并通过使用基金会的知识价值和更广泛的影响审查标准进行评估，被认为值得支持。

The Forum on Nanotechnology between the U.S. and Korea has been held annually since 2003 in alternating countries, except during the COVID-19 pandemic. These forums focus on enhancing research collaboration in the field of nanotechnology among scientists and engineers from both countries. The joint forum facilitates networking between the research communities and agencies of both countries, promoting exchange of information and new opportunities for research collaboration. The forum’s topics this year will be Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing. One keynote speaker, seven senior presenters and seven early-career presenters from the U.S. will participate with the same number of Korean presenters. The organizing committee will emphasize diversity of the participants. This forum will bring together a bi-national community of expert researchers and innovators who are working at the leading edge of next-generation semiconductors and environmentally benign semiconductor manufacturing. The outcome of this forum will lead to milestones and vigorous research collaboration between the U.S. and Korea in semiconductor technology that can generate significant economic and social impact. The forum’s proceedings and findings will be made available to a broad audience on Carnegie Mellon’s website.Semiconductor technology will be an important thrust area in economic development, defense, and security for the U.S. and Korea over the next decade. This forum will explore cost/performance gains using 3D integration through monolithic and heterogenous integration and advanced packing processes to continue Moore’s law. Further decreases in chip sizes will require novel environment, health, and safety (EHS) solutions. Therefore, development of novel devices that use nanotechnology to evaluate semiconductor fabrication chemistry for toxicity, environmental fate, and behavioral characteristics will be discussed. Cost effective methods that use nanotechnology with a multiscale approach are needed to assure that wastewater effluents and air emissions have minimal environmental impact. Ultra-pure water (UPW) is important in semiconductor manufacturing and fabrication processes. Thus, novel reduction, reuse, and recycling techniques for UPW in manufacturing and chemical mechanical planarization in conjunction with EHS will also be discussed. The broader impacts will include new recommended paradigms in semiconductor science, environmentally benign manufacturing, and education, as well as new collaborations in the semiconductor manufacturing research, especially among early-career scientists.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.