Conference: The 17th US-Korea Forum on Nanotechnology: Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing

美韩纳米技术论坛自2003年以来每年轮流在不同国家举行，COVID-19大流行期间除外。这些论坛的重点是加强两国科学家和工程师在纳米技术领域的研究合作。联合论坛促进了两国研究界和机构之间的网络联系，促进了信息交流和研究合作的新机会。今年论坛的主题是下一代半导体和半导体制造的环境影响。来自美国的一名主旨演讲人、七名高级演讲人和七名早期职业演讲人将与同样数量的韩国演讲人一起参加。组委会将强调参与者的多样性。该论坛将汇集两国专家研究人员和创新者，他们致力于下一代半导体和环境友好型半导体制造的前沿。本次论坛的成果将导致美国和韩国在半导体技术方面的里程碑和积极的研究合作，从而产生重大的经济和社会影响。论坛的讨论和成果将在卡内基梅隆大学的网站上公布。半导体技术将成为美国和韩国未来10年经济发展、国防和安全的重要重点领域。该论坛将探讨通过单片和异构集成以及先进的封装工艺使用3D集成来继续摩尔定律的成本/性能收益。 芯片尺寸的进一步减小将需要新的环境、健康和安全（EHS）解决方案。因此，将讨论使用纳米技术来评估半导体制造化学的毒性，环境命运和行为特征的新设备的开发。需要使用具有多尺度方法的纳米技术的具有成本效益的方法，以确保废水和空气排放对环境的影响最小。 超纯水（UPW）在半导体制造和制造工艺中是重要的。因此，新的减少，再利用和回收技术的UPW在制造和化学机械平面化结合EHS也将进行讨论。更广泛的影响将包括在半导体科学，环境友好的制造和教育，以及在半导体制造研究的新的合作，特别是在早期职业科学家之间的新的推荐范例。该奖项反映了NSF的法定使命，并已被认为是值得通过使用基金会的智力价值和更广泛的影响审查标准进行评估的支持。

The Forum on Nanotechnology between the U.S. and Korea has been held annually since 2003 in alternating countries, except during the COVID-19 pandemic. These forums focus on enhancing research collaboration in the field of nanotechnology among scientists and engineers from both countries. The joint forum facilitates networking between the research communities and agencies of both countries, promoting exchange of information and new opportunities for research collaboration. The forum’s topics this year will be Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing. One keynote speaker, seven senior presenters and seven early-career presenters from the U.S. will participate with the same number of Korean presenters. The organizing committee will emphasize diversity of the participants. This forum will bring together a bi-national community of expert researchers and innovators who are working at the leading edge of next-generation semiconductors and environmentally benign semiconductor manufacturing. The outcome of this forum will lead to milestones and vigorous research collaboration between the U.S. and Korea in semiconductor technology that can generate significant economic and social impact. The forum’s proceedings and findings will be made available to a broad audience on Carnegie Mellon’s website.Semiconductor technology will be an important thrust area in economic development, defense, and security for the U.S. and Korea over the next decade. This forum will explore cost/performance gains using 3D integration through monolithic and heterogenous integration and advanced packing processes to continue Moore’s law. Further decreases in chip sizes will require novel environment, health, and safety (EHS) solutions. Therefore, development of novel devices that use nanotechnology to evaluate semiconductor fabrication chemistry for toxicity, environmental fate, and behavioral characteristics will be discussed. Cost effective methods that use nanotechnology with a multiscale approach are needed to assure that wastewater effluents and air emissions have minimal environmental impact. Ultra-pure water (UPW) is important in semiconductor manufacturing and fabrication processes. Thus, novel reduction, reuse, and recycling techniques for UPW in manufacturing and chemical mechanical planarization in conjunction with EHS will also be discussed. The broader impacts will include new recommended paradigms in semiconductor science, environmentally benign manufacturing, and education, as well as new collaborations in the semiconductor manufacturing research, especially among early-career scientists.This award reflects NSF's statutory mission and has been deemed worthy of support through evaluation using the Foundation's intellectual merit and broader impacts review criteria.