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Magnetoelectric Sensors for Frequency Conversion

用于变频的磁电传感器

基本信息

批准号：
269935196
负责人：
Professorin Dr. Martina Gerken
金额：
--
依托单位：
Lehrstuhl für Integrierte Systeme und Photonik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2015
资助国家：
德国
起止时间：
2014-12-31 至 2015-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/269935196?language=en
关键词：
Magnetoelectric Sensors Frequency Conversion

项目摘要

This project is concerned with the research and development of resonant magneto electric (ME) sensors for applications in the fields of magneto encephalography (MEG) and magneto cardiography (MKG). The utilization of these sensors and a frequency conversion method are considered especially promising for achieving a sufficiently low limit of detection in the measurement of low frequency bio magnetic signals, due to resonance amplification and reduction in current noise. ME sensors are to be developed by micro- and nanosystems technology, based on results obtained by multiscale modelling including the readout electronics for front-ends, for the detection of weak bio-magnetic signals while minimizing the noise level. The project will be conducted in close collabora-tion between modelling (Gerken), fabrication (Quandt) and analog signal processing (Knöchel). The first goal comprises volume micromachining of tuning fork sensors and creation of readout electronics which make use of frequency conversion to enable optimum noise suppression and maximum useful signal extraction. These efforts are combined with a theoretical analysis of the noise properties. The second goal will consist of investigation of effect increasing measures for ME cantilever sensors, specifically of tuning fork type. Special aspects concern modifications in the design of the cantilevers (i.e. by integrating mechanical stress concentrators), the integration of magnetic flux concentrators, an increase of the quality factor in resonance (i.e. by vacuum packaging or by using quartz as substrate material) as well as the application of regenerative systems. As a third goal electrical modulation of the ME sensors will be investigated. Fabrication, modelling and control of quartz instead of silicon cantilevers produced by volume micromachining enable an additional electrical modulation of the ME sensors. The aim is to periodically modulate the substrate and its piezoelectric coefficient by an electrical bias field, whereby the magnetic signal caused by magnetostriction causes mixed signals at the mechanical resonance frequency, which enhance the oscillation. If necessary, this project will use the ME composites investigated by projects P1 and P2. The ME sensors will be available as standalone sensors or for system integration by projects P7 - P10 for achieving their corresponding goals.

本计画系关于应用于脑磁图（MEG）与心磁图（MKG）之共振磁电感测器之研究与开发。由于共振放大和电流噪声的降低，这些传感器和频率转换方法的利用被认为特别有希望在低频生物磁信号的测量中实现足够低的检测极限。ME传感器将通过微系统和纳米系统技术开发，基于多尺度建模获得的结果，包括前端的读出电子设备，用于检测微弱的生物磁信号，同时最大限度地降低噪声水平。该项目将在建模（Gerken），制造（Quandt）和模拟信号处理（Knöchel）之间密切合作。第一个目标包括音叉传感器的体积微加工和利用频率转换的读出电子器件的创建，以实现最佳的噪声抑制和最大的有用信号提取。这些努力相结合的噪声特性的理论分析。第二个目标将包括调查的影响增加措施，我悬臂梁传感器，特别是音叉型。特别的方面涉及到杠杆设计的修改（即通过集成机械应力集中器），磁通集中器的集成，谐振品质因数的增加（即通过真空包装或通过使用石英作为衬底材料）以及再生系统的应用。作为第三个目标，将研究ME传感器的电调制。制造，建模和控制的石英，而不是由体积微机械加工产生的硅微杠杆，使一个额外的电调制的ME传感器。目的是通过电偏置场周期性地调制基板及其压电系数，由此由磁致伸缩引起的磁信号在机械谐振频率下引起混合信号，这增强了振荡。如有必要，本项目将使用项目P1和P2研究的ME复合材料。ME传感器将作为独立传感器或用于项目P7 - P10的系统集成，以实现其相应的目标。