Microactuator Systems Based on Epitaxial Ni-Mn-Ga Films with Magnetic Shape Memory Effect (EPITACT)

基于具有磁形状记忆效应的外延 Ni-Mn-Ga 薄膜 (EPITACT) 的微执行器系统

• 批准号: 28340332
• 负责人: Privatdozent Dr. Sebastian Fähler
• 金额: --
• 依托单位: Institut für Ionenstrahlphysik und Materialforschung
• 依托单位国家: 德国
• 项目类别: Priority Programmes
• 财政年份: 2006
• 资助国家: 德国
• 起止时间: 2005-12-31 至 2013-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/28340332?language=en
• 关键词: Microactuator; Systems; Based; Epitaxial; Ni

Bulk magnetic shape memory (MSM) alloys like Ni-Mn-Ga single crystals reach high strains up to 10 % in a moderate magnetic field. In a joint project novel integrated micro actuator systems based on MSM films are developed. This sub-project aims at the growth of epitaxial Ni-Mn-Ga films with a tailored microstructure suitable for micro actuators. Films will be released from the substrate to obtain a significant MSM effect. The influence of the deposition conditions (composition, thermal treatment, substrate, buffer, deposition rate etc.) on phase formation, microstructure (texture, grain size, defects) and the resulting magnetic / magnetoelastic properties are examined. These films are used to study the difference of the MSM effect in thin films compared to bulk.

块体磁性形状记忆合金如Ni-Mn-Ga单晶在中等磁场下可达到高达10%的高应变。在一个联合项目中，开发了基于MSM薄膜的新型集成微致动器系统。这个子项目的目的是在外延生长的Ni-Mn-Ga薄膜与定制的微结构适用于微致动器。薄膜将从基材上释放出来，以获得显着的MSM效果。研究了沉积条件（组分、热处理、衬底、缓冲液、沉积速率等）对沉积速率的影响。对相形成、微观结构（织构、晶粒尺寸、缺陷）和所得到的磁/磁弹性性能进行了检查。这些薄膜被用来研究MSM效应的差异，在薄膜相比，散装。