Highly accurate deflectometric shape measurement including the non ideal properties of a display as reference plane

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Phase-measuring deflectometry is a highly sensitive, 2-D optical measurement method that can determine details of reflective surfaces very accurately. It measures quantitatively the distortion of a reference structure (often represented by a computer monitor) that is reflected by the surface to be measured. The measured quantity resulting from the distortion measurement is the slope for each point of the object surface. By differentiating the data, the local surface curvature can be obtained, and the very high sensitivity of the method with regard to local disturbances leads to a height resolution on the order of one nanometre with little effort. Therefore, this method has found its way into industrial quality inspection. Integration of the slope data to determine the absolute object form is by far the harder task. While various methods for calibration of the camera and the system geometry have been modelled and tested successfully, very little is known about the deviations that a real display imparts to a reference pattern assumed to be ideal in all hitherto existing analyses. Large displays can no longer be regarded as planar surfaces, and neither the impact of the scattering screen located in front of the luminescent pixels nor the influence of the observation angle on the intensity have hitherto been systematically investigated.The goal of the proposed project is to do research on an adequate characterization of the display, including the camera and measurement system calibration in order to reduce the measurement uncertainty of measurement systems based on deflectometry using a monitor from currently around 4 to 15 µm at flat or shallow curved surfaces by around one order of magnitude to smaller than 0,5 µm even for stronger curved surfaces. Within the project, the following sub-goals have to be achieved: i) Characterization of displays and development of a model describing the behavior of real displays. ii) Integration of the display model in the vision ray calibration of the camera. iii) Novel system calibration including the display model and the vision ray calibration for procedures for the measurement of steady and unsteady surfaces. iv) Empirically based results to systematically describe deviations of the measurement procedure via qualification measurements using flat and curved test samples. v) Experimental evidence of reduced measurement uncertainty comparing results without and with consideration of the properties of real displays and improved system calibration.The project is designed as a cooperation of two applicants. During the first part of the project, IPROM investigates the influence of the behavior of real displays, while BIAS formulates and experimentally verifies extended approaches of system calibration for measurement systems based on deflectometry. Towards the end of the project, a joint measurement system will be realized.