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Focus distance modulated fibre-coupled confocal sensor for surface metrology

用于表面计量的焦距调制光纤耦合共焦传感器

基本信息

批准号：
310357385
负责人：
Professor Dr.-Ing. Tino Hausotte
金额：
--
依托单位：
Lehrstuhl für Fertigungsmesstechnik
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2016
资助国家：
德国
起止时间：
2015-12-31 至 2019-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/310357385?language=en
关键词：
Focus distance modulated fibre coupled

项目摘要

Miniaturization and micro-structuring of complex components and accordingly even closer manufacturing tolerances put new challenges on dimensional metrology. Using special micro or nano coordinate measuring systems, it is already possible to realize highly accurate, three-dimensional relative motions between sensor and measuring object in range of a few millimetres and with resolutions in the nanometre or sub-nanometre range. However, there is still demand for high-precision sensors for probing of the measuring objects which are suitable for these challenging measuring tasks. The goal of this research project consists of investigations on the fundamentals, the development and evaluation of a robust, precise, high frequency focus distance modulated confocal point sensor and the integration and validation of this sensor into a nano coordinate measuring system. To achieve this, while maintaining the known advantages of the confocal measurement principle, an innovative combination of a fibre-coupled confocal illumination and detection, a tuneable, acoustically driven gradient-index fluid lens (TAG lens) for modulation of the focus distance and a novel signal processing, applying a lock-in amplifier, shall be used for the stage-scanning mode in a nano coordinate measuring system to significantly increase the accuracy and to reduce the measurement uncertainty and the measurement time.

复杂部件的小型化和微结构化以及相应的更紧密的制造公差对尺寸计量提出了新的挑战。使用特殊的微米或纳米坐标测量系统，已经可以实现传感器和测量对象之间在几毫米范围内的高度精确的三维相对运动，分辨率在纳米或亚纳米范围内。然而，仍然需要用于探测测量对象的高精度传感器，其适合于这些具有挑战性的测量任务。该研究项目的目标包括对基础知识的调查，一个强大的，精确的，高频焦距调制共焦点传感器的开发和评估，以及将该传感器集成和验证到纳米坐标测量系统中。为了实现这一点，在保持共焦测量原理的已知优点的同时，将光纤耦合共焦照明和检测、可调谐的声学驱动梯度折射率流体透镜（TAG透镜），用于焦距的调制和新颖的信号处理，应用锁定放大器，应用于纳米坐标测量系统的台架扫描模式，以显着提高精度并减少测量不确定度和测量时间。