Ultra-high performance and environment-friendly micro-energy harvesters towards self-powered micro/nano-systems for the Internet of Things

超高性能、环保型微能量收集器，面向物联网自供电微/纳米系统

• 批准号: 20K15146
• 负责人: LE VANMINH
• 金额: $ 2.66万
• 依托单位: Tohoku University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Early-Career Scientists
• 财政年份: 2020
• 资助国家: 日本
• 起止时间: 2020-04-01 至 2022-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-20K15146/
• 关键词: Micro-energy harvesters; piezoelectric thin film; piezoelectric device; aluminum nitride; nitride piezoelectricity; MEMS; Power MEMS; doped AlN; Energy harvester; piezoelectric thin films; lead-free piezoelectric; Nitride piezoelectrics; Piezo

项目成果

Piezoelectric Tantalum Aluminum Nitride Films for Vibrational Micro Energy Harvesters

用于振动微能量采集器的压电钽氮化铝薄膜

• 发表时间: 2021
• 作者: 三星 響;K. Kanishka H. De Silva;松原 歩;原 正則;吉村 雅満;L. Van Minh and H. Kuwano
• 通讯作者: L. Van Minh and H. Kuwano