Muscle-MEMS - Microsystems engineering for fabrication of liquid crystal elastomers

Muscle-MEMS - 用于制造液晶弹性体的微系统工程

• 批准号: 316245751
• 负责人: Professor Dr. Hans Zappe
• 金额: --
• 依托单位: Department Chemie
• 依托单位国家: 德国
• 项目类别: Research Grants
• 财政年份: 2017
• 资助国家: 德国
• 起止时间: 2016-12-31 至 2020-12-31
• 项目状态: 已结题
• 来源: https://gepris.dfg.de/gepris/projekt/316245751?language=en
• 关键词: Muscle; MEMS; Microsystems; engineering; fabrication

This project combines the fabrication and integration technologies of liquid crystal elastomers (LCEs) with the technological capabilities of microsystems engineering and will thereby enable an entirely new type of micro-actuator for MEMS applications. Through the develop and application of wafer-level fabrication, the possibilities for LCE fabrication in micrometer dimensions with high reproducibility will become possible. As a result, considerably larger actuator stroke and greater flexibility in actuator configurations will become possible.To accomplish this, thin LCE films will be synthesized, structured and oriented on substrates at the wafer level. These techniques will require the development of new processing technologies, liquid-crystal orientation methods and novel means for photostructuring these soft and sensitive materials.

该项目将液晶弹性体（LCE）的制造和集成技术与微系统工程的技术能力相结合，从而为MEMS应用提供一种全新的微致动器。随着圆片级工艺的发展和应用，微米级LCE的高重复性制造将成为可能。因此，相当大的致动器行程和更大的灵活性，在致动器configurations.To实现这一点，薄LCE薄膜将合成，结构化和定向在晶圆级的基板上。这些技术将需要开发新的加工技术，液晶取向方法和新的手段，用于光结构化这些柔软和敏感的材料。

项目成果

A practical guide to versatile photoalignment of azobenzenes

• DOI: 10.1080/02678292.2020.1825842
• 发表时间: 2020-10-26
• 期刊: LIQUID CRYSTALS
• 影响因子: 2.2
• 作者: Folwill, Yannick;Zeitouny, Zouheir;Zappe, Hans
• 通讯作者: Zappe, Hans

Measuring the spatial distribution of liquid crystal alignment and retardation using stokes polarimetry

使用斯托克斯偏振法测量液晶排列和延迟的空间分布

• DOI: 10.1117/12.2552931
• 发表时间: 2020
• 作者: Y. Folwill;H. Zappe
• 通讯作者: H. Zappe

MEMS analogous micro-patterning of thermotropic nematic liquid crystalline elastomer films using a fluorinated photoresist and a hard mask process

• DOI: 10.1039/c7tc03958a
• 发表时间: 2017-12
• 期刊: Journal of Materials Chemistry C
• 影响因子: 6.4
• 作者: David Ditter;Wei‐Liang Chen;A. Best;H. Zappe;K. Koynov;C. Ober;R. Zentel

Tunable bandpass filter for mid-infrared wavelengths using liquid crystal elastomer actuators

使用液晶弹性体执行器的中红外波长可调谐带通滤波器

• DOI: 10.1117/12.2289594
• 发表时间: 2018
• 作者: Z. Wang;Y. Folwill;P.-H. Cu-Nguyen;H. Zappe
• 通讯作者: H. Zappe

Mems-Processed Artificial Muscles with Freely-Programmable Actuation Direction

具有可自由编程驱动方向的 MEMS 处理的人造肌肉

• DOI: 10.1109/transducers.2019.8808722
• 发表时间: 2019
• 期刊: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
• 作者: Y. Folwill;S. B. Shah;H. Zappe
• 通讯作者: H. Zappe