SiC金型切削とナノ構造形成およびグラフェン成膜による高機能ガラス光学素子成形

使用SiC模具切割、纳米结构形成和石墨烯膜形成的高性能玻璃光学元件成型

• 批准号: 21H01230
• 负责人: 閻 紀旺
• 金额: $ 11.48万
• 依托单位: Keio University
• 依托单位国家: 日本
• 项目类别: Grant-in-Aid for Scientific Research (B)
• 财政年份: 2021
• 资助国家: 日本
• 起止时间: 2021-04-01 至 2024-03-31
• 项目状态: 已结题
• 来源: https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-21H01230/
• 关键词: 超精密切削; 金型加工; プレス成形; 光学レンズ; グラフェン成膜; ガラス成形; 微細構造表面; 超硬合金; SiC; レンズアレイ

本研究では，スローツールサーボ（STS）援用分割切削を用いて超硬合金や反応焼結SiC金型の超精密加工を行い，切削面へフェムト秒レーザを照射することによって表面ナノ周期構造（LIPSS）を形成させる．さらに，LIPSS表面へグラフェン膜をコーティングすることによって高精度・長寿命かつ離型性の優れる金型を製作する．そして，製作した金型を用いてガラスプレス成形を行い，ガラス製マイクロレンズアレイや各種の微細構造表面の高精度創成を可能にする．令和４年度では，前年度で加工した超硬合金や反応焼結SiC金型表面へのLIPSS（レーザ誘起ナノ周期構造）形成とグラフェン成膜を行い，その形成メカニズムや成膜特性の究明を行った．具体的には，切削後の金型表面に対してフェムト秒パルスレーザ照射を行い，LIPSSを全面に形成させるための照射条件の探索を行った．1方向のLIPSSを形成する場合，表面異方性が現れ，プレス成型時にガラスの流動特性に影響を及ぼす可能性がある．表面異方性を抑制するためには，本研究室が独自に開発したナノドット形成法を用いてレーザ照射を行った．特に可能が困難とされている反応焼結SiCについて，フェムト秒パルスレーザ照射を行い，様々なLIPSSが形成の可能を検証でき，またナノ周期構造のピッチや深さの制御も可能であることを確認できた．さらに，ナノ周期構造のピッチや深さの制御も試みた．その後，グラフェンCVD装置を用いてLIPSS表面へのグラフェン成膜を行い，成膜条件の最適化を行った．

In this paper, the ultra-precision machining of superhard alloy and sintered SiC gold mold by means of split cutting (STS) is studied. The cutting surface is irradiated with light and the periodic structure (LIPSS) is formed. In addition, LIPSS surface coating can be produced with high precision, long life, excellent mold separation and high mold quality. In the process of making metal patterns, it is possible to create various fine structure surfaces with high precision. In the fourth year of this year, the processing of superhard alloy and sintered SiC gold surface layer LIPSS (periodic structure) formation and film formation were carried out in the previous year, and the film formation characteristics were studied. Specifically, after cutting, the metal surface is exposed to radiation, and the LIPSS is formed in an all-round way. When the irradiation conditions are explored, the surface anisotropy appears, and the flow characteristics of the metal surface are affected and possibly affected during molding. The surface anisotropy is suppressed by the method of irradiation. In particular, it may be difficult to detect the possibility of formation of LIPSS due to irradiation of SiC, and it may be possible to identify the possibility of formation of LIPSS due to periodic structure. Today, the periodic structure of the structure is divided into two parts: one is the structure of the structure, the other is the structure of the structure. After that, the LIPSS surface coating and film formation process were carried out in the application of CVD apparatus, and the film formation conditions were optimized.

项目成果

Formation of Laser-Induced Periodic Surface Structures on Reaction-Bonded Silicon Carbide by Femtosecond Pulsed Laser Irradiation

• DOI: 10.1007/s41871-023-00184-8
• 发表时间: 2023-03
• 期刊: Nanomanufacturing and Metrology
• 作者: T. Meshram;Jiwang Yan

Study on nano-graphitic carbon coating on Si mold insert for precision glass molding

精密玻璃模压硅模具嵌件纳米石墨碳涂层的研究

• DOI: 10.1016/j.surfcoat.2022.128893
• 发表时间: 2022
• 期刊: Surface & Coatings Technology
• 影响因子: 5.4
• 作者: Lin Zhang;Jiwang Yan
• 通讯作者: Jiwang Yan

Tool path generation and optimization for freeform surface diamond turning based on an independently controlled fast tool servo

• DOI: 10.1088/2631-7990/ac5f12
• 发表时间: 2022-06-01
• 期刊: INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING
• 影响因子: 14.7
• 作者: Sato, Yusuke;Yan, Jiwang
• 通讯作者: Yan, Jiwang

Optimization of fast tool servo diamond turning for enhancing geometrical accuracy and surface quality of freeform optics

优化快速刀具伺服金刚石车削，提高自由曲面光学器件的几何精度和表面质量

• DOI: 10.1299/jamdsm.2023jamdsm0012
• 发表时间: 2023
• 期刊: Journal of Advanced Mechanical Design, Systems, and Manufacturing
• 作者: Lin ZHANG;Yusuke SATO and Jiwang YAN
• 通讯作者: Yusuke SATO and Jiwang YAN