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圧電微小超音波トランスデューサによるマルチモーダル指紋・静脈認証センサーの開発

使用压电超声波换能器开发多模态指纹/静脉认证传感器

基本信息

批准号：
20J22027
负责人：
LIU ZIYI
金额：
$ 1.6万
依托单位：
Tohoku University
依托单位国家：
日本
项目类别：
Grant-in-Aid for JSPS Fellows
财政年份：
2020
资助国家：
日本
起止时间：
2020-04-24 至 2023-03-31
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-20J22027/
关键词：
pMUT array ultrasonic image monocrystalline PZT Ultrasonic image Monocrystalline PZT pMUT and its array Cavity-SOI structure modification fabrication process

项目摘要

1.Designed, fabricated and demonstrated new structures for pMUT and pMUT array towards near-distance ultrasonic imaging application based on Monocrystalline-PZT based thin film. Firstly, an island-shaped and an annular-shaped structure was designed for single pMUT element. The proposed structures were optimized through FEM simulation and the best design parameters were confirmed. Then, the research of the fabrication process for 2-D pMUT array was completed. A kind of row-column addressed 2-dimensional piezoelectric micromachined ultrasonic transducer (pMUT) array based on the Mono-PZT based thin film was successfully fabricated.2.Characterization of the performance of fabricated pMUT and array. he pMUT can provide 4.8 kPa sound pressure at 5V driving voltage and 0.016 pC/KPa as output sensitivity and receiving sensitivity at resonance, and a -3 dB bandwidth around 3.5 MHz, respectively.3.A platform and corresponding circuit in order to evaluate the beamforming and imaging ability of the fabricated 2-D pMUT array was prepared. The imaging program based on the Tof (time of flight) was also designed and prepared.4.The ultrasonic image was demonstrated via the ToF mode with ultrasonic burst waves by the fabricated pMUT array at a low transmitting voltage (5V). The ultrasonic imaging along the depth direction can shows double layer including fingerprint and vessel structure clearly. The image along the lateral direction can clearly show the surface structure of the observed object.

1.设计、制作并演示了基于单晶PZT基薄膜的近距离超声成像应用的pMUT和pMUT阵列的新结构。首先，针对单个pMUT单元设计了岛形和环形结构。通过有限元仿真对所提出的结构进行了优化，确定了最佳设计参数。在此基础上，完成了二维pMUT阵列的制备工艺研究。基于Mono-PZT基薄膜，成功制备了一种行列寻址二维压电微机械超声换能器（pMUT）阵列。2.对所制备的pMUT及阵列的性能进行了表征。pMUT在5V驱动电压下可提供4.8kPa声压，谐振时输出灵敏度和接收灵敏度分别为0.016pC/KPa，-3dB带宽约为3.5MHz。3.设计了二维pMUT阵列的波束形成和成像性能测试平台和相应的测试电路。设计并实现了基于飞行时间的成像程序。4.在低发射电压（5V）下，利用所制作的pMUT阵列实现了超声脉冲的ToF模式成像。沿着深度方向的超声成像可清晰显示指纹和血管结构的双层结构。沿着横向方向的图像可以清晰地显示被观察物体的表面结构。