Multi-element spreading sensor array for electrical discrimination of complex VOCs

在JSPS两年来的支持下，千位传感器阵列已经成功制作，呼气性能取得了很大的进步，精度和可靠性都很高。在传感器阵列的制造过程中，我们注意到千位传感器阵列中单元的结构设计和材料选择可以极大地改变器件的性能。为了避免传统激光光刻的缺点，我们提出了一种双层光刻胶辅助的方法来提高器件性能的重复性。为了避免传感元件与电极之间的接触问题，我们用金属氧化物代替了传统的钛接触。通过使用金属Sb掺杂的二氧化锡作为电极，成功地避免了接触处的热氧化，同时还观察到了ITO电极与SnO2单晶结构之间界面的反常行为，这表明并不是所有的金属氧化物都适合作为电极来避免热降解。在传感单元的设计中，我们综合了基于金属氧化物纳米材料的气敏元件的文献资料，以最大限度地发挥我们器件的优点。在文献回顾的指导下，我们通过测量呼气来观察个体之间的差异，这种差异基于我们原有系统的阻力变化。此外，我们还成功地区分了饮酒或不饮酒的人。

With the support from JSPS during two years, the Thousand-bit sensor array has been successfully fabricated, and great progress in exhaled breath performance has been observed with high accuracy with reliability.In the fabrication process of the sensor array, we have noticed the structure design and the materials selection of the unit in a thousand-bit sensor array can gigantically alter the performance of the device. To avoid the drawback of conventional laser-lithography, we have proposed a two-layer photoresist-assisted method to improve the reproducibility of our device performance. To avoid the contact problem between the sensing element and electrode, we used metallic metal oxide instead of conventional Ti contact. We successfully avoid the thermal oxidization on contact via using metallic Antimony doped Tin Oxide as electrode, meanwhile, we also observed that the anomalous behavior of the interface between ITO electrode and SnO2 single crystalline structure, which indicated that not all metallic oxide is suitable as electrode to avoid thermal degradation.In the sensing unit design, we comprehensively did literature survey based on metal oxide nanomaterials based gas sensors to maximize the merit of our device. With the guidance from our literature review, we observed the disparity in individual based on the resistance variation from our original system by measuring the exhaled breath. Moreover, we successfully distinguished people who has drunk or not.