Multi-element spreading sensor array for electrical discrimination of complex VOCs

两年来，在JSPS的支持下，成功地制作了千位传感器阵列，并在呼气性能方面取得了很大的进步，测量精度高，可靠性高。在传感器阵列的制造过程中，我们注意到，在千位传感器阵列中，单元的结构设计和材料选择可以极大地改变器件的性能。为了避免传统激光光刻的缺点，我们提出了一种两层光阻辅助方法来提高我们的器件性能的再现性。为了避免传感元件与电极之间的接触问题，我们使用金属氧化物代替传统的钛接触。通过采用金属锑掺杂氧化锡作为电极，我们成功地避免了接触时的热氧化，同时，我们也观察到ITO电极与SnO2单晶结构之间的界面行为异常，这表明并非所有的金属氧化物都适合作为电极来避免热降解。在传感单元设计中，我们对基于金属氧化物纳米材料的气体传感器进行了全面的文献调研，最大限度地发挥了器件的优点。在文献综述的指导下，我们通过测量呼出的气体，根据我们原始系统的阻力变化来观察个体的差异。此外，我们成功地区分了喝醉或没有喝醉的人。

With the support from JSPS during two years, the Thousand-bit sensor array has been successfully fabricated, and great progress in exhaled breath performance has been observed with high accuracy with reliability.In the fabrication process of the sensor array, we have noticed the structure design and the materials selection of the unit in a thousand-bit sensor array can gigantically alter the performance of the device. To avoid the drawback of conventional laser-lithography, we have proposed a two-layer photoresist-assisted method to improve the reproducibility of our device performance. To avoid the contact problem between the sensing element and electrode, we used metallic metal oxide instead of conventional Ti contact. We successfully avoid the thermal oxidization on contact via using metallic Antimony doped Tin Oxide as electrode, meanwhile, we also observed that the anomalous behavior of the interface between ITO electrode and SnO2 single crystalline structure, which indicated that not all metallic oxide is suitable as electrode to avoid thermal degradation.In the sensing unit design, we comprehensively did literature survey based on metal oxide nanomaterials based gas sensors to maximize the merit of our device. With the guidance from our literature review, we observed the disparity in individual based on the resistance variation from our original system by measuring the exhaled breath. Moreover, we successfully distinguished people who has drunk or not.