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Multi-element spreading sensor array for electrical discrimination of complex VOCs

用于复杂 VOC 电辨别的多元件扩散传感器阵列

基本信息

批准号：
19J12232
负责人：
ZENG Hao
金额：
$ 1.09万
依托单位：
The University of Tokyo (2020)Kyushu University (2019)
依托单位国家：
日本
项目类别：
Grant-in-Aid for JSPS Fellows
财政年份：
2019
资助国家：
日本
起止时间：
2019-04-25 至 2021-03-31
项目状态：
已结题

来源：
https://kaken.nii.ac.jp/en/grant/KAKENHI-PROJECT-19J12232/
关键词：
thousand-bit sensors crossbar array exhaled breath sensing

项目摘要

With the support from JSPS during two years, the Thousand-bit sensor array has been successfully fabricated, and great progress in exhaled breath performance has been observed with high accuracy with reliability.In the fabrication process of the sensor array, we have noticed the structure design and the materials selection of the unit in a thousand-bit sensor array can gigantically alter the performance of the device. To avoid the drawback of conventional laser-lithography, we have proposed a two-layer photoresist-assisted method to improve the reproducibility of our device performance. To avoid the contact problem between the sensing element and electrode, we used metallic metal oxide instead of conventional Ti contact. We successfully avoid the thermal oxidization on contact via using metallic Antimony doped Tin Oxide as electrode, meanwhile, we also observed that the anomalous behavior of the interface between ITO electrode and SnO2 single crystalline structure, which indicated that not all metallic oxide is suitable as electrode to avoid thermal degradation.In the sensing unit design, we comprehensively did literature survey based on metal oxide nanomaterials based gas sensors to maximize the merit of our device. With the guidance from our literature review, we observed the disparity in individual based on the resistance variation from our original system by measuring the exhaled breath. Moreover, we successfully distinguished people who has drunk or not.

在JSPS的支持下，经过两年多的研制成功了千位传感器阵列，并在高精度、高可靠性的条件下，实现了呼气性能的大幅度提高。在传感器阵列的研制过程中，我们注意到千位传感器阵列中单元的结构设计和材料选择对器件性能的影响。为了避免传统的激光光刻的缺点，我们提出了一种两层光刻胶辅助的方法，以提高我们的器件性能的再现性。为了避免传感元件和电极之间的接触问题，我们使用金属氧化物代替传统的Ti接触。通过采用金属锑掺杂氧化锡作为电极，成功地避免了接触热氧化，同时我们也观察到ITO电极与SnO2单晶结构之间界面的异常行为，这表明并非所有的金属氧化物都适合作为电极以避免热降解。我们对基于金属氧化物纳米材料的气体传感器进行了全面的文献调查，以最大限度地发挥我们器件的优点。在我们的文献综述的指导下，我们通过测量呼出气，观察到基于原始系统的电阻变化的个体差异。此外，我们成功地区分了喝酒或不喝酒的人。

项目成果

期刊论文数量（6）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Enhancement of pH Tolerance in Conductive Al-Doped ZnO Nanofilms via Sequential Annealing

DOI：
10.1021/acsaelm.0c01052
发表时间：
2021-02-03
期刊：
ACS APPLIED ELECTRONIC MATERIALS
影响因子：
4.7
作者：
Yan, Ruolin;Takahashi, Tsunaki;Yanagida, Takeshi
通讯作者：
Yanagida, Takeshi

Improvements of Electrical Characteristics of Single-Crystalline ZnO Nanowire Field-Effect Transistors via SelfAssembled Monolayer Modification

通过自组装单层改性改善单晶ZnO纳米线场效应晶体管的电特性

DOI：
发表时间：
2020
期刊：
Engineering Sciences Reports
影响因子：
0
作者：
H. Zeng;T. Takahashi;T. Hosomi;K. Nagashima;M. Kanai;G. Zhang and ＊T. Yanagida
通讯作者：
G. Zhang and ＊T. Yanagida

Anomalous Reversible Sn-Dopant Deactivation between Indium Tin Oxide and Single-Crystalline Oxide Nanowire

氧化铟锡和单晶氧化物纳米线之间的异常可逆锡掺杂剂失活

DOI：
发表时间：
2021
期刊：
影响因子：
0
作者：
11.Hao Zeng;Tsunaki Takahashi;Takehito Seki;Masaki Kanai;Guozhu Zhang;Takuro Hosomi;Kazuki Nagashima;Naoya Shibata and Takeshi Yanagida
通讯作者：
Naoya Shibata and Takeshi Yanagida

Electrical Degradation of ITO Contact Electrodes on Metal Oxide Nanowires

金属氧化物纳米线上 ITO 接触电极的电降解