Thin Films of Oxide Ceramics

氧化物陶瓷薄膜

• 批准号: DP0666991
• 负责人: Prof Robert Lamb
• 金额: $ 19.98万
• 依托单位: The University of Melbourne
• 依托单位国家: 澳大利亚
• 项目类别: Discovery Projects
• 财政年份: 2006
• 资助国家: 澳大利亚
• 起止时间: 2006-01-01 至 2011-12-31
• 项目状态: 已结题
• 来源: https://dataportal.arc.gov.au/RGS/Web/Grants/DP0666991
• 关键词: Thin; Films; Oxide; Ceramics

Aluminium oxide films are used extensively in the Australian industries of Protective & Decorative Coatings (examples include door-knobs and cutting-tools). The industry will be offered a remarkably simple process for preparation of high quality films. In the microelectronic industry, the uses of aluminium oxide films as a dielectric alternative to silicon dioxide has just started to emerge world - wide and this new process would make a dramatic impact with commercial benefits for Australia.

氧化铝薄膜广泛用于澳大利亚的保护和装饰涂料行业（例如门把手和切割工具）。该行业将提供一个非常简单的方法来制备高质量的电影。在微电子行业中，氧化铝薄膜作为二氧化硅介电替代品的用途刚刚开始在全球范围内出现，这种新工艺将对澳大利亚产生巨大影响，带来商业利益。