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Tomography of femtosecond laser structured objects inscribed in glass

飞秒激光刻在玻璃上的结构化物体的断层扫描

基本信息

批准号：
382882190
负责人：
Professor Dr. Thomas Höche
金额：
--
依托单位：
Fraunhofer-Institut für Mikrostruktur von Werkstoffen und Systemen (IMWS)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2017
资助国家：
德国
起止时间：
2016-12-31 至 2020-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/382882190?language=en
关键词：
Tomography femtosecond laser structured objects

项目摘要

Laser processing of glass is a young research field, yet under immense and steadily-increasing development. Especially internal glass modifications and processing could lead to various new applications that make use of laser modified properties such as refractive index, volume, birefringence, glass network connectivity or thermodynamic phase states. Possible future technologies encompass a combination of subtractive and additive glass processing fabrication and miniaturization of optomechatronic components, nanofluidics, waveguides, or optical elements. These new devices with novel properties could have a strong impact on future biomedical, optomechatronic applications. Even though a considerable amount of work on this topic has been reported in literature, the nature of laser-induced transformations is still barely understood. The main objective of this proposal is to obtain a fundamental understanding of the ultra-short pulsed laser-glass interaction for short and longer pulse durations as well as for single pulse and multi pulse irradiation since it is known from literature and preliminary results that the glass-laser- interaction is strongly dependent on the glass type and laser parameters. While localized explanations for certain types of observed interactions do exist, they lack the necessary scope to predict the glass behavior for a different glass composition or irradiation parameters. Thus, the aim of this project is to gain sufficient information to formulate an adequate model of the laser glass interaction by connecting the spatially and time resolved observation of the laser glass interaction with Raman and Brillouin spectroscopy as well as transmission electron microscopy (TEM) and time-of-flight secondary mass spectrometry (TOF-SIMS) to detect structural and chemical modifications by which the interaction history of the glass with the laser pulse can be recovered. This makes detailed modelling of the glass-laser-interaction possible. The experiments and the model will give a continuous vision on the underlying processes in a range of nanometer to millimeter for time scales from pikosecond up to infinity. The new laboratory-based, nanometric x-ray microscopy (with the CZ Xradia 810 Ultra soon becoming available in Halle) can fill the missing observation gap between 1 µm and 50 nm. A special emphasis will be given to a chemical approach of the laser matter interaction. For that a large set of glasses will be synthesized and chemically sensitive techniques such as time resolved emission spectroscopy, TOF-SIMS and XRM will help to follow specifically each chemical element through all the underlying processes.

玻璃激光加工是一个年轻的研究领域，但正在取得巨大且稳定的发展。特别是内部玻璃的改性和加工可能会带来各种利用激光改性特性的新应用，例如折射率、体积、双折射、玻璃网络连通性或热力学相态。未来可能的技术包括减材和增材玻璃加工制造以及光机电元件、纳米流体、波导或光学元件的小型化的组合。这些具有新颖特性的新设备可能会对未来的生物医学、光机电一体化应用产生重大影响。尽管文献中已经报道了关于这一主题的大量工作，但激光诱导转变的本质仍然知之甚少。该提案的主要目的是获得对短脉冲持续时间和较长脉冲持续时间以及单脉冲和多脉冲照射的超短脉冲激光-玻璃相互作用的基本了解，因为从文献和初步结果中得知，玻璃-激光相互作用强烈依赖于玻璃类型和激光参数。虽然确实存在对某些类型的观察到的相互作用的局部解释，但它们缺乏必要的范围来预测不同玻璃成分或辐照参数的玻璃行为。因此，该项目的目的是通过将激光玻璃相互作用的空间和时间分辨观察与拉曼和布里渊光谱以及透射电子显微镜（TEM）和飞行时间二次质谱（TOF-SIMS）连接起来，获得足够的信息来制定激光玻璃相互作用的适当模型，以检测结构和化学修饰，从而了解玻璃与激光脉冲的相互作用历史可以恢复。这使得玻璃与激光相互作用的详细建模成为可能。实验和模型将为纳米到毫米范围内的基础过程提供连续的视野，时间尺度从皮秒到无穷大。新型实验室纳米 X 射线显微镜（CZ Xradia 810 Ultra 即将在哈勒上市）可以填补 1 µm 和 50 nm 之间缺失的观察间隙。将特别强调激光物质相互作用的化学方法。为此，将合成大量玻璃，并且时间分辨发射光谱、TOF-SIMS 和 XRM 等化学敏感技术将有助于在所有基础过程中具体跟踪每种化学元素。