Developmental Study on a compact He/Ar/XeCl Excimer Laser with Automatic Preionization

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In this research project, the developmental studies on the dischargepumped gas-mixture XeCl laser with automatic preionization have been carried out and the following results have been obtained.1. Characteristics of the XeCl 308 nm laser output energy using the Ar/He gas mixture have been investigated and the optimum gas pressure conditions for obtaining the maximum laser output energy have been determined.2. Characteristics of the XeCl 308 nm laser output energy using the Ne/Ar gas mixture instead of Ar/He gas mixture have been investigated and it has been shown that the Ne/Ar/XeCl laser has the larger laser output energy at total gas pressures below 2 atmospheres than the Ar/He/XeCl, He/XeCl and Ar/XeCl lasers do. The optimum gas pressure conditions for obtaining the maximum laser output energy also have been determined.3. It has been shown from the results of 1. and 2. that the Ar/He/XeCl laser and Ne/Ar/XeCl laser have the relatively large laser output energies and the relatively long lifetimes at total gas pressures below 2 atmospheres, and hence it is possible to construct the compact laser device.4. The compact and low-inductance XeCl laser with automatic preionization has been designed in which the spark gas and laser head have been assembled in one body. Under the optimum gas pressure conditions, the dependences of the laser output energy on the circuit parameters and the configuration of preionizer gap pins have been investigated and the optimum conditions have been determined. It has been, moreover, that the present XeCl laser operated under the optimum conditions has the excellent reproducibility of the shotto shot laser pulses and the relatively long lifetime.5. Based on the above results, finally the improved gas mixture XeCl laser device has been designed and constructed.